Rotary Actuator/Vane Style Series CRB1

Applicable shaft type: Y Applicable shaft types: S, Y CRA1 (mm) (mm) X Y Size Size CRQ2 50 50 24.5 to 39.5 24.5 to 39.5 28 to 45 28 to 45 63 63 MSQ X = X = X = Y = Y = Y = Y = Y = 30.5 to 53.5 30.5 to 53.5 80 80 MSZ 40 to 65 40 to 65 100 100 Symbol: A51 Symbol: A52 Shorten the long shaft. CRQ2X MSQX Shorten the long shaft.

MGG

(mm) Q R X Y + Stroke Y Q R X Bore size (mm) 32 86 (94) 25 13 39 40 96 (105) 29 14 46 50 109 (121) 31 15 57 Dimensions inside ( ) are for long strokes.

VFS

YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

One-touch Fittings

[mm] Release button shape KQ2C-00A1 4, 6 Oval type KQ2C-00A 8 to 16 Round type U Union Y v Different diameter union Y v UD Different diameter double union Y v R Plug-in reducer v v Applicable tubing O.D.

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1 y r i e Component Parts Description Material Material Note Note Description No. q w e r t y u No. i o !0 !1 !2 !

Digital Gap Checker ( compatible)

U8 0 Y 2420 0X0974 6 R/W 6 th letter (11seg) U8 0 Y 7 R/W 7 th letter (11seg) U8 0 Y 8 R/W 8 th letter U8 0 Y LINE name 9 R/W 9 th letter U8 0 Y 1 R/W 1st dot (left side) U8 0 Y 2 R/W 2nd dot U8 0 Y 3 R/W 3rd dot U8 0 Y 4 R/W 4th dot U8 0 Y 0: OFF (dot OFF) 1: ON (dot ON) 2430 0X097E 5 R/W 5th dot U8 0 Y 6 R/W 6th dot U8 0 Y 7 R/W 7th dot U8 0 Y 8 R/W 8th dot U8 0 Y -100No.PS-OMW0009-C 4

CRQ2

8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Note) Block pin (2 pcs.) is attached for q, e, t, y.

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Base material: Aluminum Fluid: Air Base material: Aluminum Fluid: Air Common SUP type Individual SUP type Common SUP type Individual SUP type u u e t u e t u w w t e y r q y i OUT t e y r q y i w i w i y r q y r q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com o

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2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

Environment

1 y i o !

High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

ZP3

Type/ZP3-Y ZP3-Y(J/K)-B ZP3-YJP-B ZP3-YK(15/20)-B ZP3-Y-(02/04/06) ZP3-Y-(U2/U4/U6) Vacuum inlet o o y y t t Vacuum inlet u u i y t Component Parts u No.

ZP

dia. 1 02 to 08 2 10 to 16 Lock ring 3 20 to 32 4 40, 50 Pad N6 A8 4 ZP Y Pad [q Type Y adaptor] With buffer ZP 50 K20 Y A14 U6 UGN [Pad model no.]

Stability of suction position,

Stroke 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EU-(T/Y)F1JB10 10 V V V V ZP3EU-(T/Y)F1JB30 30 ZP3EU-(T/Y)F1JB50 50 ZP3EU-(T/Y)F2JB10 10 V V ZP3EU-(T/Y)F2JB30 30 ZP3EU-(T/Y)F2JB50 50 ZP3EU-(T/Y)F3JB10 10 V V V ZP3EU-(T/Y)F3JB30 30 ZP3EU-(T/Y)F3JB50 50 ZP3EU-(T/Y)F4JB10 10 V V ZP3EU-(T/Y)F4JB30 30 ZP3EU-(T/Y)F4JB50 50 ZP3EU-(T/Y)F5JB10 10 V V ZP3EU-(T/Y)F5JB30 30 ZP3EU-(T/Y)F5JB50

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y y e e r r r u u u Drain Drain Drain Component Parts Material No.

EX120/121/122

y t Shown with cover removed.

Micro Mechanical Valve Series VM1000

Twist selector (3 position) VM131-01-35 (R, B, G, Y) A VM151-01-35 (R, B, G, Y) A Panel mounting hole ON 45 T.T.

4-channel Flow Monitor ( compatible)

W Line name 9th letter Y U8 0x00 Refer to Figure "Line name communication data (7 seg)". (0) 1 R/W Line name 1st letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot ON) (0) 2 R/W Line name 2nd letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot ON) (0) 3 R/W Line name 3rd letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot ON) (0) 4 R/W Line name 4th letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot

Guide Cylinder Series MGG

Auto switch can be mounted. 359 Series MGG Slide Bearing Allowable End Load and Deflection F Y MGGM 20Stroke Stroke Stroke MGGM 25MGGM 324 4.5 2.5 (Slide bearing type) (Slide bearing type) (Slide bearing type) 4 2 3 500st 400st 600st Deflection Y (mm) Deflection Y (mm) Deflection Y (mm) Deflection Y (mm) 3 300st 500st 2 400st st: Stroke (mm) 2 400st 1 300st 200st st: Stroke (mm) st: Stroke