./0.01MPa MPa 80l/min (ANR) or more (SUP = 0.14MPa) SMC Output flow Lock screw (Hexagon 1.5) 200l/min (ANR) or more (SUP = 0.4MPa) MPa 5l/min (ANR) or less (SUP = 0.14MPa) Air consumption 11l/min (ANR) or less (SUP = 0.4MPa) Ambient and fluid temperature 20 to 80C (Non-explosion proof) 20 to 60C (Flame proof and explosion proof) Explosion proof construction Flame proof and explosion proof
./0.01MPa Supply pressure fluctuation 80l/min (ANR) or more (SUP = 0.14MPa) SMC Output flow Lock screw (Hexagon 1.5) 200l/min (ANR) or more (SUP = 0.4MPa) MPa 5l/min (ANR) or less (SUP = 0.14MPa) Air consumption 11l/min (ANR) or less (SUP = 0.4MPa) Ambient and fluid temperature 20 to 80C (Non-explosion proof) 20 to 60C (Flame proof and explosion proof) Flame proof and explosion proof construction
./0.01MPa MPa 80l/min (ANR) or more (SUP = 0.14MPa) SMC Output flow Lock screw (Hexagon 1.5) 200l/min (ANR) or more (SUP = 0.4MPa) MPa 5l/min (ANR) or less (SUP = 0.14MPa) Air consumption 11l/min (ANR) or less (SUP = 0.4MPa) Ambient and fluid temperature 20 to 80C (Non-explosion proof) 20 to 60C (Flame proof and explosion proof) Explosion proof construction Flame proof and explosion proof
Type: Pilot Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 50, Seal Type: Bellows Seal, Sonic Conductance: 80L/S, Valve Type: Angle type, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 60, Switch Part Number
Type: Pilot Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 50, Seal Type: Bellows Seal, Sonic Conductance: 80L/S, Valve Type: Angle type, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 60, Switch Part Number
Type: Pilot Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 50, Seal Type: Bellows Seal, Sonic Conductance: 80L/S, Valve Type: In-line type, Pilot Port Direction: Flange surface, back, Temperature Range(°C): 5 to 60, Switch
Type: Pilot Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 50, Seal Type: Bellows Seal, Sonic Conductance: 80L/S, Valve Type: In-line type, Pilot Port Direction: Flange surface, back, Temperature Range(°C): 5 to 60, Switch
Type: Pilot Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 50, Seal Type: Bellows Seal, Sonic Conductance: 80L/S, Valve Type: In-line type, Pilot Port Direction: Flange surface, left, Temperature Range(°C): 5 to 60, Switch
Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 50, Voltage: 24 VDC, Seal Type: Bellows Seal, Sonic Conductance: 80L
Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 50, Voltage: 12 VDC, Seal Type: Bellows Seal, Sonic Conductance: 80L
Type: Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 50, Seal Type: Bellows Seal, Sonic Conductance: 80L/S, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 60, Switch Part Number: No auto-switch
Type: Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 50, Seal Type: Bellows Seal, Sonic Conductance: 80L/S, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 60, Switch Part Number: D-A93 reed auto
Type: Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 50, Seal Type: Bellows Seal, Sonic Conductance: 80L/S, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 60, Switch Part Number: D-M9B solid-state
Type: Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 50, Seal Type: Bellows Seal, Sonic Conductance: 80L/S, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 60, Switch Part Number: D-M9P solid-state
Type: Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 50, Seal Type: Bellows Seal, Sonic Conductance: 80L/S, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 60, Switch Part Number: D-M9P solid-state
Type: Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 50, Seal Type: Bellows Seal, Sonic Conductance: 80L/S, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 150, Switch Part Number: No auto-switch
Type: Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 50, Seal Type: Bellows Seal, Sonic Conductance: 80L/S, Pilot Port Direction: Flange surface, back, Temperature Range(°C): 5 to 60, Switch Part Number: No auto-switch
Type: Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 50, Seal Type: Bellows Seal, Sonic Conductance: 80L/S, Pilot Port Direction: Flange surface, back, Temperature Range(°C): 5 to 60, Switch Part Number: D-M9B
Type: Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 50, Seal Type: Bellows Seal, Sonic Conductance: 80L/S, Pilot Port Direction: Flange surface, back, Temperature Range(°C): 5 to 60, Switch Part Number: D-M9N
Type: Manual Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 50, Seal Type: Bellows Seal, Sonic Conductance: 80L/S, Seal Material: FKM 1349-80, Amount of leakage(Pa·m3/s): Internal: 1.3 × 10-10, External