Series XLAV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases.  Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  XLAV valves are single-acting, normally closed, with a bellows seal over the shaft and spring.  

Series XLAV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases.  Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  XLAV valves are single-acting, normally closed, with a bellows seal over the shaft and spring.  

SYJ300/500/700

Example: SS3YJ3-20-03.1 set (Manifold base) SYJ312-5LZ-M3.2 sets (Valve) SYJ300-10-1A.1 set (Blanking plate assembly) SS3YJ3-42R-03-C4 .1 set (Manifold base) SYJ314R-5G.2 sets (Valve) SYJ300-10-2A. 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

SYJ3000/5000/7000

(Manifold base) SYJ5120-5G-M5 2 pcs. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) SS5YJ5-43-03-C4 1 pc. (Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Plug-in/Plug Lead: Single Unit

(Station 5) W5Q55-05042Cz1 set VQ5150-5G 2 sets VQ5250-5G 2 sets VQ5350-5G 1 set 5 VQ5000 W Dusttight/Low jetproof type (IP65) Type of actuation Manual override 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 3 position double check 1 2 3 4 5 6 Prefix the asterisk to the part nos. of the solenoid valve, etc.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Manifold base) SYJ314R-5G .2 pcs. (Valve) SYJ300-10-2A .1 pc.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(Manifold base) SYJ5120-5G-M5 2 pcs. (Valve) SYJ5000-21-1A 1 pc. (Blank plate ass'y) PSS5YJ5-43-03-C4 1 pc. (Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc.

VQ5000

VQ 5 5 1 0 5 G Connector kit Enclosure Series Nil Dust proof W5Q55-05042C. 1 set * VQ5150-5G .. 2 sets * VQ5250-5G .. 2 sets * VQ5350-5G . 1 set Manifold base part number 5 VQ5000 W Dust tight, Splash proof (IP65) Valve part number (Stations 1 and 2) Valve part number (Stations 3 and 4) Type of actuation Manual override Valve part number (Station 5) 2 position single 2 position

NVZseies

Free 3oc,/5G (8.3-2oooNz) Dust Solenoid Specifications Electrical Allowable voltage Coil insulation Power Apparent power suppressor Indicator light 'Consult laclory for others. o Cons truc t ion,/ Pa r ts L ist N\r232 O,/N.O. l{l|et10,,/N.c. Spare Parts Part number pxr170 c-QQ!)

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Fluid /cm2) position Free lm gact/vibration resistance 1sc,i 5G (45 100OHz) Enclosure Dust Solenoid Specifications Options crommet (G) (H) Plug connector(L) (M) 0rr170-3418 NVz1120 4 For R port of valve body NAN120-M5 Noise reduction: 18 dB or more 1 1 Ov 6a/Bo Hz, 220V 5o/ao Hz . . . : t t i t i v1ry?

3 Port Air Operated Valve Series SYJA300

Example: SS3YJ3-20-03.1 set (Manifold base) SYJ312-5LZ-M3.2 sets (Valve) SYJ300-10-1A.1 set (Blanking plate assembly) SS3YJ3-42R-03-C4 .1 set (Manifold base) SYJ314R-5G.2 sets (Valve) SYJ300-10-2A. 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

4/5 Port Air Operated Valve Series SYJA3000

(Manifold base) SYJ5120-5G-M5 2 pcs. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) SS5YJ5-43-03-C4 1 pc. (Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

SYJ300/500/700

Example: SS3YJ3-20-03.1 set (Manifold base) SYJ312-5LZ-M3.2 sets (Valve) SYJ300-10-1A.1 set (Blanking plate assembly) SS3YJ3-42R-03-C4 .1 set (Manifold base) SYJ314R-5G.2 sets (Valve) SYJ300-10-2A. 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

Fluid /cm2) position Free lm gact/vibration resistance 1sc,i 5G (45 100OHz) Enclosure Dust Solenoid Specifications Options crommet (G) (H) Plug connector(L) (M) 0rr170-3418 NVz1120 4 For R port of valve body NAN120-M5 Noise reduction: 18 dB or more 1 1 Ov 6a/Bo Hz, 220V 5o/ao Hz . . . : t t i t i v1ry?

3 Way,3 Port Solenoid Valve NVZ Series

Free 3oc,/5G (8.3-2oooNz) Dust Solenoid Specifications Electrical Allowable voltage Coil insulation Power Apparent power suppressor Indicator light 'Consult laclory for others. o Cons truc t ion,/ Pa r ts L ist N\r232 O,/N.O. l{l|et10,,/N.c. Spare Parts Part number pxr170 c-QQ!)

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

VQ 5 5 1 0 5 G Connector kit Enclosure Series Nil Dust proof W5Q55-05042C. 1 set * VQ5150-5G .. 2 sets * VQ5250-5G .. 2 sets * VQ5350-5G . 1 set Manifold base part number 5 VQ5000 W Dust tight, Splash proof (IP65) Valve part number (Stations 1 and 2) Valve part number (Stations 3 and 4) Type of actuation Manual override Valve part number (Station 5) 2 position single 2 position

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Modular mounting type 2-port solenoid valve JSXM21-AN301R-5G-U-F 1 pc.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Example 10-SS5YJ3-S41-03-C4 1 set (Manifold base) 10-SS5YJ3-20-03 1 set (Manifold base) 10-SYJ3123-5G-M3 2 sets (Valve) 10-SYJ3143-5LZ 2 sets (Valve) SYJ3000-21-1A 1 set (Blanking plate assembly) SYJ3000-21-2A 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

(Manifold base) 10-SYJ7123-5G-01 2 pcs. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) 10-SS5YJ7-41-03-01 1 pc. (Manifold base) 10-SYJ7143-5LZ 1 pc. (Valve) 10-SYJ7243-5LZ 1 pc. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(Example) 10-SS3YJ3-20-03 . 1 set (manifold base) 10-SS3YJ3-42-03-C4 . 1 set (manifold base) SYJ300-10-7A . 1 set (blanking plate assembly) 10-SYJ312M-5LZ-M3 . 2 sets (valve) 10-SYJ314M-5G . 2 sets (valve) SYJ300-10-7A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.