NCA1

2.6 250 (2.5") 5/8 7/16-20 3/4 1 1/8 1 1/8 3/8 9/16 5/16-24 3 0 3/8 1.3 1.06 2.19 1 1.75 3 3/4 2.48 4 7/8 3.1 325 (3.25") 1 3/4-16 1 1/8 1 1/2 1 1/2 1/2 7/8 3/8-24 3 3/4 0 1/2 1.57 1.18 2.76 1 3/8 2.34 4 1/4 2.72 5 53/64 3.9 4.7 1 1/2 1 1/2 1/2 7/8 3/8-24 4 1/2 0 1/2 1.57 1.18 3.32 1 3/8 2.34 4 1/4 2.72 5 53/64 400 (4") 1 3/4-16 1 1/8 Foot Style: NCA1L (MS1 mounting style) ZA + Stroke A XA

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Symbol Specifications -XA Change of rod end shape -XB6 Heat resistant cylinder (150C) w/o auto switch only -XB7 Cold resistant cylinder w/o auto switch only -XB9 Low speed cylinder (10 to 50 mm/s) -XB10 Intermediate stroke (Using exclusive body) -XB11 Long stroke type, Air-hydro type only -XB13 Low speed cylinder (5 to 50 mm/s) -XB14 Cylinder with heat resistant auto switch 16 to 63 only

Compact Guide Cylinder

XX details XAH9 depth 6 S Q GC GA GB 2 x P PB XAH9 depth 6 2 x P (Plug) G J K b a PA + Stroke E FB FA e c d A + Stroke B + Stroke C + Stroke T-slot dimensions [mm] [mm] Bore size [mm] a b c d e Bore size [mm] f f 12 3.3 5.8 2.6 1.6 4.8 16 3.7 6.2 3 2.5 6.5 20 5.4 8.4 4.5 2.8 7.8 25 5.4 8.4 4.5 3 8.2 12 7 16 2.5 20 8.5 25 6 50 mm stroke or less Top-ported type The use of a slot (width XA

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

MHS2-32D MHS2-40D Q 11 12 RA 38 44 SA 4.5 5.5 FX 23 26.5 G 30.5 32 AA 44 47 NA 14 16 J 20 21 AB 41 44 L 2H9 3H9 B 56 62 DO 64 70 DC 56 62 EO 24 28 EC 16 20 CA 8 9 CB 16 17 FY 20.5 23.5 FZ 5 6 +0.025 0 +0.025 0 Model MHS2-32D MHS2-40D UA M5 x 0.8 M6 x 1 UB 10 12 VA VB 3 4 WA XA XB 3 4 SB 8 9.5 +0.025 0 +0.030 0 +0.025 0 +0.030 0 +0.062 0 +0.062 0 34H9 3H9 4H9 3H9 4H9 42H9 6 Series MHS 2

Rotary Table/

3.5 M4 x 0.7 2.2 5.3 M4 x 0.7 4 5H9 5.5 34 18.5 12.6 9.2 35 4.5 29h9 29.5h9 14H9 3.8 5.3 2.5 4.2 10 3.3 6 3.5 M4 x 0.7 2.2 5.3 M4 x 0.7 4 34h9 6H9 5.5 38 23 15.5 10.5 40 4.5 33h9 17H9 5 5.3 2.5 4.2 10 4.2 7.5 4.5 M5 x 0.8 2.5 6 M4 x 0.7 4 40h9 7H9 5.5 45 30 18.4 12.2 50 5 39h9 20H9 6 6.5 2.5 4.5 11.5 4.2 7.5 4.5 M5 x 0.8 2.5 6 M5 x 0.8 5 (mm) JJ JK JU P Q S SD SF SU UU WA WB WC WD WE WF XA

NCA1

2.6 250 (2.5") 5/8 7/16-20 3/4 1 1/8 1 1/8 3/8 9/16 5/16-24 3 0 3/8 1.3 1.06 2.19 1 1.75 3 3/4 2.48 4 7/8 3.1 325 (3.25") 1 3/4-16 1 1/8 1 1/2 1 1/2 1/2 7/8 3/8-24 3 3/4 0 1/2 1.57 1.18 2.76 1 3/8 2.34 4 1/4 2.72 5 53/64 3.9 4.7 1 1/2 1 1/2 1/2 7/8 3/8-24 4 1/2 0 1/2 1.57 1.18 3.32 1 3/8 2.34 4 1/4 2.72 5 53/64 400 (4") 1 3/4-16 1 1/8 Foot Style: NCA1L (MS1 mounting style) ZA + Stroke A XA

NCA1

1.06 2.19 1 1.75 3 3/4 2.48 4 7/8 325 (3.25) 1 3/4-16 1 1/8 3.9 1 1/2 1 1/2 1/2 7/8 3/8-24 3 3/4 0 1/2 1.57 1.18 2.76 1 3/8 2.34 4 1/4 2.72 5 53/64 400 (4) 1 3/4-16 1 1/8 4.7 1 1/2 1 1/2 1/2 7/8 3/8-24 4 1/2 0 1/2 1.57 1.18 3.32 1 3/8 2.34 4 1/4 2.72 5 53/64 Foot Mounting Type NC A1L (MS1 Mounting Style) (in) Bore (in) MM KK A AA AB AE AH AL AO AT B BA C D DD E EA EE F G J S WF Y P LF SA XA

REA/REB

Construction/Dimensions 10, 15 D 4-SS thread depth S (helical insert thread) HL Attached from bottom with cap bolt XA FH L 4Counter bore dia. BB Attached from top with cap bolt Bolt size: MD LA A 4Counter bore depth CC XA FG 4-BA LF Body Switch rail FG X A FH XA High Precision Guide Type REAH HB Note 1) FF Note 1) HL D' FE Note 1) Floating block Section D-D' Max.

CA2

Symbol Specifications Rod Boot Material -XA Change of rod end shape Heat resistant (150C) -XB6 -XC3 Special port positions Max. ambient temperature Rod boot material Symbol J K -XC4 70C With heavy duty scraper Nylon tarpaulin 110C Heat resistant (110C) -XC5 Heat resistant tarpaulin Maximum ambient temperature for the rod boot itself.

Table of Contents

CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 95 + Stroke CX D54 2-M5 x 0.8 -X 2039.5 39 36 27 17.5 17 Data 7 Square nut for body mounting M4 x 0.7 125 + Stroke 62.5 15 7.5 17 20.5 69 54 12 8-15-77 77 Series CY1H Dimensions Single axis type: 15, 20, 25 CY1H15/20/25 L LL PA 4-M thread depth MM 15 20 25 CY1H -B Guide central axis ZZ XA

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Note 2) Lead wire entry is inward when the product is shipped. 81 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS6, CXSL6 10-/1122122163.5+ST ST 50+ST 8 5.5 16 2-3.4 through 15+1/2ST M3 x 0.5 x 5L 2.75 19 26.5 counter bore depth 3.3 14 1 OUT 3 3 (Hexagon socket head set screw) 1 3.2 5.6 (16) 280.2 280.2 22.7 35 16 37 6.3 5 6 M2.5 x 0.45 x 6L M3 x 0.5 x 12.5L and M3 x 0.5 (Hexagon

MU

Applicable auto switch Reed switch Solid state switch Bore size (mm) D-F7, D-J79 D-F7V, D-J79C D-F7W, D-J79W D-F7WV, D-F79F D-F7NTL D-F7BAL/F7BAVL D-A7, D-A80 D-A7H, D-A80H D-A73C, D-A80C D-A79W Auto switch mounting screw (M3 x 0.5 x 6.5l) Switch mounting nut BMU1-025 25, 32, 40, 50, 63 Switch mounting bracket Round head Phillips screw (M3 x 0.5 x 14l) Hexagon socket head cap screw (M3 x 0.5 x 5l

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

. *2 Fixed unit: kPa, MPa *1 Can be switched to auto-shift or copy function r Piping specification t Option 1 y Option 2 Symbol Description Symbol Description Nil Without lead wire Symbol Description Nil None M5 female thread ZS-46-A1 ZS-46-5L M5 Lead wire with connector (5-core, 2 m lead wire) A1 Bracket A (Vertical mounting) Piping port J Without waterproof cover R1/8 ZS-46-A2 01 * For

MU

Applicable auto switch Reed switch Solid state switch Bore size (mm) D-F7, D-J79 D-F7V, D-J79C D-F7W, D-J79W D-F7WV, D-F79F D-F7NTL D-F7BAL/F7BAVL D-A7, D-A80 D-A7H, D-A80H D-A73C, D-A80C D-A79W Auto switch mounting screw (M3 x 0.5 x 6.5l) Switch mounting nut BMU1-025 25, 32, 40, 50, 63 Switch mounting bracket Round head Phillips screw (M3 x 0.5 x 14l) Hexagon socket head cap screw (M3 x 0.5 x 5l

VQZ1000/2000/3000

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ VQD How to Order Valve Manifold Assembly (Example) U side VQZ2150-5L Stations VQZ2250-5L VQZ2350-5L D side VV5QZ25-05C6C1 set (C kit 5 stations manifold base) VVQZ2000-10A-51 set (Blanking plate assembly) VQZ2150-5L1 set (Single solenoid part no.)

Digital Flow Switch

.) *4 Fixed unit: Instantaneous flow: L/min Accumulated flow: L XY 2 outputs (NPN/PNP switching type) + Copy function Sensor connector C *1 Can switch between 1 to 5 V and 0 to 10 V *2 Can be switched to external input or copy function Option 1 Option 2 Symbol Description Nil Without lead wire Symbol Description Nil None ZS-46-5L ZS-46-A1 A1 Bracket A (Vertical mounting) L Power supply/

ZSE30/ISE30

Note Lead wire length: 2m With mounting screws (M3 x 5L: 2 pcs.)

PSE540/560

Mounting with bracket Mount the bracket on the body with two M3 x 5L mounting screws. Tighten the bracket mounting screws at a tightening torque of 0.5 to 0.7 Nm. Wiring Caution M3 x 5L 1. Connection and removal of sensor connector Hold the lever and connector body with two fingers and insert the connector straight into the pin until it is locked with a click sound.

ZSE30/ISE30

Note) Fixed unit: For vacuum/Low pressure: kPA For positive pressure: MPa Lead wire with connector Lead wire length: 2 m With mounting screws (M3 x 5L: 2 pcs.) With M3 x 8L (2 pcs.)

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VF VFR How to Order Valve Manifold Assembly (Example) VP7 VP4 VQZ2150-5L VQZ2250-5L VQ U side 2 3 4 5 VQZ2350-5L VQ4 VV5QZ2505C6C1 set (C kit 5 stations manifold base) VVQZ200010A-51 set (Blank plate assembly) VQZ21505L 1 set (Valve P/N single solenoid) VQZ22505L 2 set (Valve P/N double solenoid) VQZ23505L 1 set (Valve P/N 3 position) VQZ D side 1 VQD VZS Prefix mark to valves etc. to