Series XLAV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases. Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. XLAV valves are single-acting, normally closed, with a bellows seal over the shaft and spring.
Series XLAV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases. Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. XLAV valves are single-acting, normally closed, with a bellows seal over the shaft and spring.
10A 15A 20A 25A 32A 1 8 1 4 3 8 3 8 1 2 3 4 220 VAC 50/60 Hz Valve size 1 7 5 6 24 VDC 12 VDC B: Slotted locking type B (tool required) 7 240 VAC 50/60 Hz 15 (11) 2 Semi-standard For other rated voltages, please consult with SMC. 20 (14) 3 25 (16) 4 1 1 1 4 32 (22) 5 1 B 1 4 Flange 32F Nil: Non-locking push type 40A 1 1 2 Valve size 2 to 9 40 (28) 6 1 B 1 2 Flange 40F 2 50A 50 (33) 7 50F
C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 200 VAC (50/60 Hz)2.1 A5 A180/200 W 50/60 Hz220 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?
C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 230 VAC (50/60 Hz)4.8 A10 A385/440 W 50/60 Hz420 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?
C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 100 VAC (50/60 Hz)4.2 A10 A180/200 W 50/60 Hz220 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?
C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 100 VAC (50/60 Hz)4.2 A10 A180/200 W 50/60 Hz220 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?
C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 200 VAC (50/60 Hz)4.8 A10 A385/440 W 50/60 Hz420 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?
C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 200 VAC (50/60 Hz)4.8 A10 A385/440 W 50/60 Hz420 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?
C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 230 VAC (50/60 Hz)4.8 A10 A385/440 W 50/60 Hz420 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?
MGQ MXS8-50F SMXS8, #3 MGG Axial piping (8) MXS8-llP MGC 15.5 Operating port MGF 40 Max 6.5 (mm) 2-M5 X 0.8 Model J 39 44 55 73 91 141 MXS8-10R MXS8-20R MXS8-30R MXS8-40R MXS8-50R MXS8-75R CY1 MY1 15 6.5 * Dimensions not indicated are the same as the basic style.
Semi-standard Note 3) For other rated voltages, please consult with SMC. 2 15A 1 2 15 14 3 20 16 20A 3 4 25 4 25A 1 Nil: Non-locking push type Valve size 5 to 7 32A 22 11 4 5 32 1 B 32F 22 32 28 40 6 28 40 1 4 Flange 11 2 40A Note) Semi-standard 1 2 1 B 40F Flange Electrical entry/With light/surge voltage suppressor 2 50A 33 Symbol Electrical entry Valve size 1 to 4 Valve size 5 to 7 7 50 2B 50F
N.C. 6A 8A 10A 10A 15A 20A 25A 32A 32F 40A 40F 50A 50F 1 8 1 4 3 8 3 8 1 2 3 4 7 1 15 2 20 3 25 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 50 7 2B Flange 634
C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 230 VAC (50/60 Hz)2.1 A5 A180/200 W 50/60 Hz220 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?
C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 100 VAC (50/60 Hz)4.2 A10 A180/200 W 50/60 Hz220 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?
C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 200 VAC (50/60 Hz)4.8 A10 A385/440 W 50/60 Hz420 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?
C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 100 VAC (50/60 Hz)4.2 A10 A180/200 W 50/60 Hz220 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?
C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 100 VAC (50/60 Hz)9.4 A15 A385/440 W 50/60 Hz420 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?
Size: 7 (ø50), Valve Type: 0 [NC (Operating Pressure 1MPa)], Body Material: Standard (Bronze Body), Thread: Rc(PT), Port Size: 50F (2B Flange)
Size: 7 (ø50), Valve Type: 0 [NC (Operating Pressure 1MPa)], Body Material: S (Stainless Steel Body), Thread: Rc(PT), Port Size: 50F (2B Flange)