Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 110 VAC, 50/60 Hz, Electrical Entry: L Type Plug Connector, Surge Suppressor

Valve Type: Normally Closed, Bellows Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 110 VAC, 50/60 Hz, Electrical Entry: L Type Plug Connector, Surge Suppressor

High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

VFR

EVS Applicable terminal: 1.25-3.5M, 1.25Y-3L, 1.25-3M Although A, B+ and B marks are indicated on the terminal block, VFR5000 can be used as either +COM or COM.

VFS

VS4 Terminal block marking AC and 100 VDC or more Applicable terminal: VFS3000: 1.25-3, 1.25-3S, 1.25Y-3N, 1.25Y-3S VFS4000: 1.25-3.5M, 1.25Y-3L, 1.25Y-3M VFS5000: 1.25-4, 1.25-4M VFS6000: 1.25-3.5M, 1.25Y-3L, 1.25-3M There is no polarity. Tightening torque for terminal: 0.6 Nm Non plug-in type (With terminal) Remove cover (1), over terminal block (2) attached to the inside of body.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Applicable terminal: VFS3000: 1.25-3, 1.25-3S, 1.25Y-3N, 1.25Y-3S VFS4000/5000/6000: 1.25-3.5M, 1.25Y-3L, 1.25Y-3M There is no polarity.

High Vacuum L Type Valve

-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-2 59.8 12 4

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

Aluminum High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

XL

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

High Vacuum Angle Valve, XL Series

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

JXCx-OMT0023

Internal torque control mode Position control mode Position control mode Internal speed control mode PD07 *DI3-1 Input signal device selection 3L (CN1-5) 0D06h Refer to Any input signal can be assigned to the CN1-5 pin. The devices that can be assigned and the setting method are the same as in parameter No. PD03. the name and function field. Select the input device of the CN15 pin.

AC Servo Motor Driver (Pulse input type/Positioning type ）

/symbol/ Setting mode digit Function name [unit] P S T PD07 *DI3L Input device selection 3L Any input device can be assigned to the CN1-17 pin. When "_ _ _ 1" is set in [Pr. PA03] and absolute position detection system by DIO is selected, the CN1-17 pin will become ABSM (ABS transfer mode). _ _ x x Position control mode Device selection 04h Refer to table 5.10 in [Pr.

Title not found

s aye inode 2 so aled ccmnon Aslnterhce 8in/8oui 3l s av fiodE I so aled comnon ASnterface 4rn/4cui l1 sale.1odE I soatedcomrnon Nole) P and B pons Lrse the same lype ol 1 to 12 (16) Serial kt wilhout Sl unll Nole l) Nlrbe6 ns.le i I Indr.ate tre mat m!

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: 2, Auto Switch: M9B--Solid State, Gen.

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: 2, Auto Switch: M9// (w/o Auto Switch w/Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: L (L Type Plug Connector), Surge Suppressor: U (w/Light & Surge Voltage

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: 2, Auto Switch: M9// (w/o Auto Switch w/Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: L (L Type Plug Connector), Surge Suppressor: U (w/Light & Surge Voltage

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: 2, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire: Z (5m), Number: A (2pcs, Valve Open/Closed), Voltage: 5 (24 VDC), Electrical Entry: L (L Type Plug Connector), Surge Suppressor: Z (w/Light & Surge Voltage Suppressor

Valve Type: Normally Closed, Bellows Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: 2, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Voltage: 24 VDC, Electrical Entry: M Type Plug Connector, Surge Suppressor: w/Surge Voltage

Valve Type: Normally Closed, Bellows Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: 2, Auto Switch: w/o Auto Switch w/Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light & Surge Voltage Suppressor, Non-polar Type,