Cylinder with Lock

D H11 E FB L4 MF R TF TG 0.2 UF Screw size 32 F5032 30 50 7 5 10 32 64 32.5 79 M6 x 20L 40 F5040 35 55 9 5 10 36 72 38 90 M6 x 20L 50 F5050 40 70 9 6.5 12 45 90 46.5 110 M8 x 20L 63 F5063 45 80 9 6.5 12 50 100 56.5 120 M8 x 20L 80 F5080 45 100 12 9 16 63 126 72 153 M10 x 25L 100 F5100 55 120 14 9 16 75 150 89 178 M10 x 25L D TG R E FB * Supplied with 4 mounting screws UF TF TG MF Single clevis

Compact and Lightweight

AS-25L ZH13/15DA Applicable thread size: M4 AS-30L ZH18/20DA Applicable thread size: M4 L-bracket wDIN Rail Mounting Bracket1 Part no. Applicable model Note Quantity AS-10D ZH05/07/10DA Applicable thread size: M3 1 pc. AS-25D ZH13/15DA Applicable thread size: M4 AS-30D ZH18/20DA Applicable thread size: M4 1 DIN rail is not included. It should be provided by the customer.

1

9 45 18 38 10 65 150 3 x 16l 32 9 45 38 18 10 65 152 4 x 24l 40 12 50 38 55 13 83 200 Series CA2 (CBA2, CV3, CVS1) Hole: NDH10 Shaft: NDd9 Spring pin ZZ + Stroke H10 d9 NZ ND L1 RR1 H ZZ PY PX NX Bore size (mm) Spring pin +0.070 0 +0.070 0 +0.070 0 +0.070 0 +0.084 0 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.065 0.117 +0.3 +0.1 16 4 x 24l 40 12 13 51 192 84 11 38 55 +0.3 +0.1 4 x 25l

MLU

D2) Screw a manual unlocking bolt (a conventional bolt of 25, 32: M3 x 0.5 x 25l or more, 40, 50: M4 x 0.7 x 35l or more) into the lock ring threads as shown above, and lightly push the bolt in the direction of the arrow (rod side) to unlock. 2) Screw a manual unlocking bolt (a conventional bolt of 25, 32: M3 x 0.5 x 25l or more, 40, 50: M4 x 0.7 x 35l or more) into the lock ring threads

XM, XY

Stainless Steel High Vacuum Angle/In-line Valve XM, XY Series Angle type/ XM Series XY Series In-line type XY Series XM Series XLA XL XLQ Body material: SCS13 (conforms to Stainless steel 304) A precision casting, unified composition prevents accumulation of gas. The XM series is interchangeable with the XL series, aluminum high vacuum angle valve.

XLAQ/XLDQ

0) XLA Pilot port S (for initial exhaust valve) Magnet (Option) XL Pilot port M (for main exhaust valve) Bellows holder (Material: Stainless steel 304) !

Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Non-standard Indicator: Non-standard Indicator, Body Surface Treatment: Standard: External - Hard Anodized; Internal - Raw Material, Seal Material: Q1 [KALREZ® (4079)], Seal Replacement: Valve Seal; In Addition for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Required for XLA

Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: External: Hard Anodized - Internal: Raw Material, Seal Material: FKM, Same

Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: External: Hard Anodized - Internal: Raw Material, Seal Material: FKM, Same

An auto switch cannot be retrofitted when a magnet is not mounted on the piston part (e.g., XLA-40-2 and XLA-40H5-2).

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 4.21082 lb

Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 1.10231 lb

Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 1.06232 lb

Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 1.36646 lb

Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 1.41082 lb

Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 2.866 lb

Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 2.8442 lb

Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 6.99967 lb