Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

SX5000-50-1A-Q C4 C6 C8 SX3000-50-1A-Q C4 C6 1 Manifold block assembly P, R ports SY3000 8 One-touch fitting P, R ports SY5000 10 One-touch fitting 2 SUP/EXH block assembly SX3000-51-1A SX5000-51-1A 3 For D side End block assembly R SX3000-52-1A-Q SX5000-52-1A-Q 4 End block assembly L SX3000-53-1A-Q SX5000-53-1A-Q For U side 5 Connector box VZ3000-106-1A 24VDC only 6 Rail stopper Made by

Compact 5-Port Solenoid Valve

JSY1000 JSY11M-15P-1A JSY3000 SY30M-15-1A JSY5000 SY50M-15-1A Number of cores (Lead wire) Lead wire length [m] * The part number is for 1 piece.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VZ1000-1A-2 Note No.

V100

PVT317-53-1A 1 pc.

Hydraulic Filters

AL-196H 04 06 08 10 12 16 20 24 28 32 04 06 08 10 12 16 20 24 28 32 JIS B2401-1A-G70 JIS B2401-1A-G35 AL-197H JIS B2401-1A-G90 JIS B2401-1A-G45 JIS B2401-1A-G50 JIS B2401-1A-G105 JIS B2401-1A-G55 AL-198H JIS B2401-1A-G65 Petroleum, Emulsion, Water-glycol FHIA N W JIS B2401-1A-G125 JIS B2401-1A-G70 AL-199H JIS B2401-1A-G80 JIS B2401-1A-G145 JIS B2401-1A-G95 AL-200H JIS B2401-1A-G100 JIS B2401

4/5 Port Solenoid Valve

(Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) SS5YJ7-41-03-01 1 pc. (Manifold base) SYJ7140-5LZ 1 pc. (Valve) SYJ7240-5LZ 1 pc. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Table of Contents

(N) VVZS2000-1A-3-Bore size-1 (-X12) Conventional block assembly part no. (N) VVZS2000-1A-3-Bore size (-X12) For VZS3000 New block assembly part no. (N) VVZS3000-1A-3-Bore size-1 (-X12) Conventional block assembly part no. (N) VVZS3000-1A-3-Bore size (-X12) Note) -X12 shows the part no. for all common style.

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Switch Characteristics Contact point configuration 1a Maximum contact point capacity 2 VA (AC), 2 W (DC) Operating voltage: AC, DC 100 V or less Maximum operating current 12 V to 24 V AC, DC: 50 mA 48 V AC, DC: 40 mA 100 V AC, DC: 20 mA 157 Series AC Accessories (Spacers/Brackets) Spacer Modular F.R.L.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Series Assembly part no. 10-SY3000 SY3000-26-19A-Q 10-SY5000 SY5000-26-1A-Q 10-SY7000 SY7000-26-1A-Q 10-SY9000 SY9000-26-1A-Q Series Assembly part no.

SX

SX3000-77-1A SX5000-77-1A SX3000 SX5000 Series Part no.

Valve Single Unit

SX3000-77-1A SX5000-77-1A SX3000 SX5000 Series Part no. SX3000-77-1A SX5000-77-1A SX3000 SX5000 SY SYJ Lable for block disk The labels shown below are used on manifold stations containing SUP/EXH block disk(s) to show their location. (3 pcs. each) EXH port SUP port SX VZ3000-123-1A Label for SUP/EXH block disk Label for EXH block disk Label for SUP block disk Series Assembly part no.

Vacuum System Peripherals:

block assembly (for RS): SX3000-51-5A 2 pcs 1 location EXH block disk: SX3000-77-1A SUP/EXH block assembly (Standard): SX3000-51-1A The following columns shall be filled in by SMC.

Valve Single Unit

SX3000-77-1A SX5000-77-1A SX3000 SX5000 Series Part no. SX3000-77-1A SX5000-77-1A SX3000 SX5000 SY SYJ Lable for block disk The labels shown below are used on manifold stations containing SUP/EXH block disk(s) to show their location. (3 pcs. each) EXH port SUP port SX VZ3000-123-1A Label for SUP/EXH block disk Label for EXH block disk Label for SUP block disk Series Assembly part no.

CATALOG

www.stevenengineering.com I 2.10 SOLENOID VALVES SERIES SY3000/5000/7000 M A N I F O L D O P T I O N S BLANKING PLATE ASSEMBLY INDIVIDUAL/EXH SPACER ASSEMBLY INDIVIDUAL/SUP SPACER ASSEMBLY Series Assembly No Port Size Series Assembly No Port Size SY3000 SY3000-38-1A M5 (10-32Nom) SY3000 SY3000-39-1A M5 (10-32Nom) SY5000 SY5000-38-1A PT 1/8 SY5000 SY5000-39-1A PT 1/8 SY5000 SY5000-38-1TA NPTF

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(Valve) SYJ5000-21-1A 1 pc. (Blank plate ass'y) PSS5YJ5-43-03-C4 1 pc. (Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc.

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SX3000-77-1A SX5000-77-1A SX3000 SX5000 Series Part no. SX3000-77-1A SX5000-77-1A SX3000 SX5000 SY SYJ Lable for block disk The labels shown below are used on manifold stations containing SUP/EXH block disk(s) to show their location. (3 pcs. each) EXH port SUP port SX VZ3000-123-1A Label for SUP/EXH block disk Label for EXH block disk Label for SUP block disk Series Assembly part no.

V

www.stevenengineering.com I 2.10 SOLENOID VALVES SERIES SY3000/5000/7000 M A N I F O L D O P T I O N S BLANKING PLATE ASSEMBLY INDIVIDUAL/EXH SPACER ASSEMBLY INDIVIDUAL/SUP SPACER ASSEMBLY Series Assembly No Port Size Series Assembly No Port Size SY3000 SY3000-38-1A M5 (10-32Nom) SY3000 SY3000-39-1A M5 (10-32Nom) SY5000 SY5000-38-1A PT 1/8 SY5000 SY5000-39-1A PT 1/8 SY5000 SY5000-38-1TA NPTF

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

For AC 10-SYJ3123-1LO-M3 SY100-30-1A-20 Crimping area Core wire crimping area Core wire Lead wire Socket 0.2 to 0.33mm 2 Max. cover diameter: 1.7 mm Hook Insulation 3.

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SX3000-77-1A SX5000-77-1A SX3000 SX5000 Series Part no. SX3000-77-1A SX5000-77-1A SX3000 SX5000 SY SYJ Lable for block disk The labels shown below are used on manifold stations containing SUP/EXH block disk(s) to show their location. (3 pcs. each) EXH port SUP port SX VZ3000-123-1A Label for SUP/EXH block disk Label for EXH block disk Label for SUP block disk Series Assembly part no.

Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: -, End Lock: -