Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Full MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -

Swivels

1.19 7/16-20 7/16-20 73.7 mm 53.0 mm 19.0 mm 30.2 mm UNF-2A UNF-2A B Hex 2 Hex 1 PS610503-6-6 3.11 2.18 .88 1.31 9/16-18 9/16-18 78.9 mm 55.2 mm 22.2 mm 33.3 mm UNF-2A UNF-2A Port 2 PS810503-8-8 3.34 2.38 1.12 1.50 3/4-16 3/4-16 84.9 mm 60.3 mm 28.6 mm 36.5 mm UNF-2A UNF-2A Port 1 PS810503-10-10 3.50 2.48 1.12 1.50 7/8-14 7/8-14 88.9 mm 62.9 mm 28.6 mm 36.5 mm UNF-2A UNF-2A PS1210503-12-

SY

Port size M5 x 0.8 Rc 1/8 Rc 1/4 SY3000 SY3000-39-2A SY5000 SY5000-39-2A SY7000 SY7000-39-2A SY3000 SY3000-38-2A SY5000 SY5000-38-2A SY7000 SY7000-38-2A M5 x 0.8 Rc 1/8 Rc 1/4 Series Round head combination screw Gasket Rc 1/4 SY9000 SY9000-39-2A Rc 1/4 SY9000 SY9000-38-2A SY3000 SY3000-23-4 (M2 x 21) M3 x 26 (Flat nickel plated) SY3000-11-25 Note 1) The SUP port can be on the lead wire side

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Note D side SY9000-50-2A-C8 SY9000-50-2A-C10 SY9000-50-2A-C12 SY9000-50-2A-N9 SY9000-50-2A-N11 SY9000-50-2A-02 SY9000-50-2A-03 SY9000-18-2 SY9000-11-2 C8: A, B port with one-touch fitting for 8 C10: A, B port with one-touch fitting for 10 C12: A, B port with one-touch fitting for 12 Manifold block assembly 1 5 16" N9: A, B port with one-touch fitting for How to assemble lead wire cover 3

3 Port Solenoid Valve

2a 2a 2a 2a 2a 2a 2a 2a 2a One-touch fitting [1(P), 3(E) port] L2 11.4 5.7 L1 Applicable tubing O.D: 4 6 5/32" 1/4" L3 (8.9) If the fittings are mounted on side.

NCM

NN-UNF-2A NN-UNF-2A ZC B-DIA NA LB+Stroke ZB+Stroke F YC L W Y 056 (9/16") 2xZD UNF MM-DIA G-DIA Bushing A 0.37 EA EA KK-UNF-2A NN-UNF-2A ZC NN-UNF-2A B-DIA LB No bumper, No magnet 2.56 2.56 LB With bumper, No magnet 2.75 2.69 LB No bumper, With magnet 2.81 2.56 LB With bumper, With magnet 3.00 2.69 ZB No bumper, No magnet 2.81 2.75 ZB With bumper, No magnet 3.00 2.88 ZB No bumper, With

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Port size M5 1/8 1/4 SY3000 SY3000-39-2A-Q SY5000 SY5000-39-2A-Q SY7000 SY7000-39-2A-Q SY3000 SY3000-38-2A-Q SY5000 SY5000-38-2A-Q SY7000 SY7000-38-2A-Q M5 1/8 1/4 Series Round head combination screw Gasket 1/4 SY9000 SY9000-39-2A-Q 1/4 SY9000 SY9000-38-2A-Q SY3000 SY3000-23-4 (M2 x 21) M3 x 26 (Flat nickel plated) SY3000-11-25 SY5000 SY5000-11-13 Note 1) The SUP port can be on the lead wire

1

SY5000: SY5000-221-2A (2 pcs.) SY7000: SY7000-221-2A (3 pcs.)

5-Port Solenoid Valve

SY5000: SY5000-221-2A (2 pcs.) SY7000: SY7000-221-2A (3 pcs.)

0.55

N.C. 3.2 4 6 8 10 12 16 1P, 2A, 3R 1/8, 1/4 VP(A)300 X M5 1P, 2A, 3R 1/4, 3/8 VP(A)500 X 1/8 N.O. 1P, 2A, 3R 3/8, 1/2 VP(A)700 1. Remove the body from the sub-plate and reset the H mark on the body corresponding to the N.O. mark on the sub-plate as shown in the figure above. 2.

SX

-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

V100

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

Valve Single Unit

-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

Valve Single Unit

-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

4/5 Port Solenoid Valve

How to Order Type 41 (5 port / Base mounted) 10-SS5YJ7-4105 01 01 1/8 A, B port size Thread type Stations P port 1/4 Nil F N T Rc G NPT NPTF 02 2 stations Applicable individual EXH spacer assembly SYJ7000-17-2A Applicable individual SUP spacer assembly SYJ7000-16-2A : : 20 20 stations A, B port 1/8 R port 1/4 Note) For more than 8 stations, supply air to both sides of P port and exhaust air

Compact 5-Port Solenoid Valve

JSY3000: JSY31V-23-2A (2 pcs.) JSY5000: JSY51V-23-2A (2 pcs.) Manifold Options Base gasket * The body and plug-in spacer of the JSY1000 are separate. The connector gasket is not used.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-3A-1U t VZ1000-2A-1M SUP/EXH block assembly y Note) Block pin (2 pcs.) is attached for q, e, t, y.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 10-SY3000 SY3000-38-2A(-Q) 10-SY5000 SY5000-38-16A(-Q) 10-SY7000 SY7000-38-16A(-Q) SUP port 1 8 1 4 10-SY9000 SY9000-39-2A(-Q) 1 8 1 4 10-SY9000 SY9000-38-2A(-Q) Note) In case of 41P, 42P and 43P, for protection of the wiring unit section from drainage, piping at the EA port should be arranged so that it will not be directly exposed to exhaust from the valve.

Table of Contents

1 VVFS5000-2A-1 VVFS5000-2A-2 End plate (U side) assembly !

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

(Note) Contact each encoder manufacturer for how to deal with it. encoder was detected. 2A.2 Linear encoder error 1-2 Check it with the check method for [AL. 2A.1]. 2A.3 Linear encoder error 1-3 2A.4 Linear encoder error 1-4 2A.5 Linear encoder error 1-5 2A.6 Linear encoder error 1-6 2A.7 Linear encoder error 1-7 2A.8 Linear encoder error 1-8 Note.