Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 32x222, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/Multiple Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 32x222, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 32x222, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/0.5m Lead Wire and No Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 32x222, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -

Function: 1 (2 Position Single), Body Option: 0 (Plug-in), Option: 0 (Standard), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in)

Function: 3 (3 Position Closed Center), Body Option: 00 (Base Mounted Plug-in), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in)

Function: 6 (3 Position Perfect), Body Option: 00 (Base Mounted Plug-in), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in)

Function: 4 (3 Position Exhaust Center), Body Option: 00 (Base Mounted Plug-in), Pilot: R (External Pilot), Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in)

Function: 1 (2 Position Single), Body Option: 00 (Base Mounted Plug-in), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in)

Function: 3 (3 Position Closed Center), Body Style: 0 (Base Mounted Plug-in), Body Option: 0 (Standard for Base Mounted Type), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in)

Function: 4 (3 Position Exhaust Center), Body Style: 0 (Base Mounted Plug-in), Body Option: 0 (Standard for Base Mounted Type), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in)

Function: 1 (2 Position Single), Body Style: 0 (Base Mounted Plug-in), Body Option: 0 (Standard for Base Mounted Type), Pilot: R (External Pilot), Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in)

Function: 2 (2 Position Double), Body Style: 0 (Base Mounted Plug-in), Body Option: 1 (Direct Manual Override for Base Mounted Type), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in)

Function: 2 (2 Position Double), Body Style: 0 (Base Mounted Plug-in), Body Option: 0 (Standard for Base Mounted Type), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in)

Function: 1 (2 Position Single), Body Style: 0 (Base Mounted Plug-in), Body Option: 0 (Standard for Base Mounted Type), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in)

Function: 1 (2 Position Single), Body Option: 0 (Base Mounted Plug-in), Direct Manual Override: 0 (Standard), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in)

Function: 3 (3 Position Closed Center), Body Option: 0 (Base Mounted Plug-in), Direct Manual Override: 0 (Standard), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in)

Function: 2 (2 Position Double), Body Option: 0 (Base Mounted Plug-in), Direct Manual Override: 0 (Standard), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in)

Function: 1 (2 Position Single), Body Option: 0 (Base Mounted Plug-in), Direct Manual Override: 0 (Standard), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in Conduit w/Terminal)

Function: 1 (2 Position Single), Body Option: 00 (Base Mounted Plug-in), Pilot: Internal Pilot, Voltage: 2 (200VAC 50/60HZ), Lead Wire: F (Plug-in)