HRX-OM-M005 E.g.: TEMP SP value: +20C, OFFSET value: +2C Circulating fluid discharge temp.: +22C, TEMP PV: +20C When OFF is selected If no mode is selected, temperature control is conducted to allow the discharge temperature of the circulating fluid to be TEMP SP value.
E.g.: TEMP SP value: +20C, OFFSET value: +2C Circulating fluid discharge temp.: +20C, TEMP PV: +20C When OFF is selected If no mode is selected, temperature control is conducted to allow the discharge temperature of the circulating fluid to be TEMP SP value.
9 SY9000 Single solenoid with spacer assembly SY9000-37-3B Type of actuation Double solenoid/3 position with spacer assembly 1 2 position single 2 2 position double SY9000-37-4B 3 3 position closed center For 110VAC (115VAC) 4 3 position exhaust center Specification Single solenoid Double solenoid/ 3 position SY9000 SY9000-37-1C 5 3 position pressure center Pilot specification SY9000-37-2C
New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2
-X Individual -X Technical data 133 Series CM2 Rubber bumper Boss-cut style Clevis integrated style Air-hydro With air cushion Built-in One-touch fittings Component Parts Material Note Description Material Note Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Description No. 12 13 14 15 16 17 No. 1 2A 2B 2C 3 4 5 6 7 8 9 10 11 Rod cover Head cover A Head cover B Head cover C Cylinder
SY3000-54-2C(-Q) SY3000-54-1C(-Q) SY5000-54-1C(-Q) SY7000-54-1C(-Q) Assembly part no.
Description Material Note 1 Rod cover Aluminum alloy Anodized 2A Head cover A Aluminum alloy Anodized 2B Head cover B Aluminum alloy Anodized 2C Head cover C Aluminum alloy Anodized 3 Cylinder tube Stainless steel 4 Piston Aluminum alloy 5 Piston rod Carbon steel Hard chrome plating 6 Bushing Bearing alloy 7 Seal retainer Stainless steel 8 Return spring Steel wire Zinc chromated 9 Spring
44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55 56 57 58 59 5A 5B 5C 5D 5E 5F 17.6 16.5 15.6 14.8 14.1 13.4 12.8 12.2 11.7 11.3 10.8 10.4 10.0 2250 1125 750 562 450 375 321 281 250 225 204 187 173 160 150 140 132 125 118 112 107 102 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D 1E 1F -8.5 -7.2 -6.0 -5.0 -4.1 -3.3 -2.5 -1.8 -1.2 -0.6 A B C D E F 2A 2B 2C
E.g.: TEMP SP value: +20C, OFFSET value: +2C Circulating fluid discharge temp.: +20C, TEMP PV: +20C When OFF is selected If no mode is selected, temperature control is conducted to allow the discharge temperature of the circulating fluid to be TEMP SP value.
Figure 2C shows a state in which Gate is clamped and Seal surface is sealed by Sealing material of Gate . 3-2 Construction In Figures 1 and 2, Piston rod integrated with Piston and Moving base are connected by a displaceable mechanism. And Roller block is fixed to Moving base .
In locations where the ambient temperature/humidity exceeds the limits as mentioned below or where condensation occurs During transportation/storage: 0C to 50C, 15% to 85% (But as long as water or circulating fluid are not left inside the pipings) During operation: 2C to 45C, 30% to 70% 6. In locations where condensation may occur 7.
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 32222 (32x222, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 32222 (32x222, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (Kalrez® 4079)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 32222 (32x222, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: A (2 pcs D-A93 w/0.5m Lead Wire and No Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 32222 (32x222, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 32222 (32x222, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 32222 (32x222, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: A (2 pcs D-A93 w/0.5m Lead Wire and No Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 32222 (32x222, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 32x222, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/Multiple Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 32x222, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: -, End Lock: -