0.55

Manual override 42 30 20.5 2 x 7.2 (For mounting) 23.5 NC 122.3 83.8 41.1 3R 60 33 1P NO 3/8 1(P), 3(R) port PE port (Pitch) P = 33 31 (3.8) 7.5 L2 L1 Refer to page 24 separately when piping to PE port is required.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Instantaneous flow: L/min cfm Accumulated flow: L ft3 L3 IO-Link/ NPN/PNP Analog 1 to 5 V Analog 0 to 10 V*3 ZS-33-D ZS-33-F L4 IO-Link/ NPN/PNP Analog 4 to 20 mA + ZS-33-D *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.

0.4

0.42 0.65 0.21 0.20 0.85 25 or less 47 or less A B C Dual 3-port valve VQ1 01 33 or less Rubber seal 0.16 0.20 0.70 0.16 0.20 0.70 25 or less 47 or less VQ2100 29 or less Metal seal 0.60 0.15 2.6 0.46 0.15 2.0 22 or less 49 or less 95 Single VQ2101 31 or less Rubber seal 0.80 0.30 3.2 0.55 0.28 2.2 24 or less 51 or less VQ2200 20 or less Metal seal 0.60 0.15 2.6 0.46 0.15 2.0 15 or less

Table of Contents

T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

LEC-OM071xx

Byte 33 to byte 35 of the command format are specified as the SUB_CTRL field.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

M5 01 Conduit terminal: VF1120-T-M5 01 DIN terminal: VF1120-DVF1120-YVFN Applicable cable O.D. 6 to 8 Applicable cable O.D.

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 Body side VZA422-P-01 M5 x 0.8 0.53 0.17 2.2 0.49 0.17 2.0 N.O. Rc 1/8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Sub-plate side M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C.

SYJ300/500/700

VFN 4-4-43 Series SYJ700 Manifold for Internal Pilot Type Type 20/Type 21 How to Order Applicable solenoid valve SYJ712--01 SYJ712M--01 SYJ722--01 SYJ722M--01 Applicable blanking plate assembly SYJ700-10-2A A port 1/8 SS3YJ7 20 05 A port 1/8 P, R port thread type Manifold type Stations Nil Rc G NPT NPTF -+ -+ -+ -+ 20 21 Type 20 Type 21 2 stations : 20 stations 02 : 20 00F 00N 00T -+ -+ -

7ND9071en

Microswitch OMRON D2VW-01 Gold plated contacts Bus Powered, no external power needed.

/

(mm) Model Flow characteristics NBR, FKM 1 cm3/min or less Port size Weight (g) External Leakage C[dm3/(sbar)] b Cv Seal material Leakage 2 3 4.5 2 0.59 1.2 2.3 0.59 1.2 0.48 0.45 0.46 0.48 0.18 0.33 0.61 0.18 VXE2110-01 VXE2120-01 VXE2130-01 VXE2110-02 VXE2120-02 VXE2220-02 VXE2320-02 VXE2130-02 VXE2230-02 VXE2330-02 VXE2240-02 VXE2340-02 VXE2250-02 VXE2350-02 VXE2260-02 VXE2360-02 VXE2220

0.

Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP (for VQZ100) This is used when changing piping location.

Smooth Cylinder/Low Speed Cylinder

32 29 28.5 29.5 22.5 23.5 25.5 26.5 27.5 28.5 24 25 25 25 28 27 29.5 30 28 33 32 29 28.5 29.5 22.5 23.5 25.5 26.5 27.5 28.5 24 25 32 32 31.5 30.5 33 33.5 29 34 33 30 29.5 30.5 23.5 24.5 26.5 27.5 28.5 29.5 25 26 40 40 36 35 37.5 38 32 39 36 35 32.5 35.5 26.5 29.5 29.5 32 31.5 34.5 28 31 50 50 41.5 40.5 43 43.5 40 46 44 42 40.5 42.5 34.5 36.5 37.5 39.5 39.5 41.5 36 38 63 63 48.5 47.5 50 50.5

5 Port Solenoid Valve Series SV1000/2000/3000/4000

-06 AS2200-01 70% 100 50 10% 30% 50% 0 CM2 25 200 150 AS2201F -01-06 AS2200-01 100 50 0 SV100 ANA1 -C08 T0604 CM2 32 200 150 AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Applicable related components For details regarding different conditions

Compact Hydraulic Cylinder

Hs 12 Auto switch 24.5 24.5 A 33 B A 33 6.5 B D-A3m/G39/K39 D-A44 Approx. Hs 36 Auto switch Approx.

5 Port Air Operated Valve

EXH port EXH port VF 000 75 A 2 3 Series Thread type Nil F N T Rc Symbol 3 5 Series Port size VFA3000 1/8 G VFA5000 1/4 NPT NPTF 1520 VFA3000/5000 Series 5 Port Air Operated Valve Base Mounted/Manifold Dimensions: VFA3000 Series Type 40: VV5FA3-40-2-02: Common exhaust L2 L1 19 6 SYA 13 4 x 5.5 (For mounting) 0.5 SYJA 49 33 40.5 33 33 R P R R P R 23 23 97 VZA 81 24 66 VFA VFA 1/4 [1 (P), 5

Series VQ Metal Seal/Rubber Seal Body Ported

Stations 1 station 01 16 VVQ1000FPG066 stations of manifold VQ1000FPGC4M5D, 3 sets VQ1000FPGC6M5D, 3 sets Double check block 16 stations } 1.10-60 Precautions Be sure to read before handling. Refer to p.0-33 to 0-36 for Safety Instructions and common precautions.

Series SV

-01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions, make determinations after using the SMC

13

-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 19 43 44.5 27 35 12 19

AC Servo Motor Driver (CC-Link Type ）

15.5.1 Power on and off procedures . 33 15.5.2 Stop . 33 15.5.3 Test operation . 34 15.5.4 Parameter setting . 35 15.5.5 Point table setting . 36 15.5.6 Actual operation . 36 15.6 Driver display . 37 15.7 Automatic operation mode . 39 15.7.1 What is automatic operation mode?

Modular F.R.L. Units

Optional specifications Model AW20(K)-B AW30(K)-B AW40(K)-B AW40(K)-06-B AW60(K)-B Bracket assembly *1 AW23P-270AS AR33P-270AS AR43P-270AS AW62P-270AS Set nut AR23P-260S AR33P-260S AR43P-260S *2 Round type *3 Standard G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G36-4-01 G46-4-01 Round type *3 (with color zone) Standard G36-10-01-L G46-10-01-L 0.02 to 0.2 MPa setting G36-4-01-L G46-4-01-L