Air Slide Table

Pilot port side 27 Dimensions [mm] Model F G GB H HB I J M N NN Z ZZ MXQ12C-10Z 28 17 11 32 46 11 32 82.5 4 2 62.5 75 MXQ12C-20Z 28 19 11 32 48 13 32 92.5 4 2 64.5 77 MXQ12C-30Z 38 21 11 40 58 15 40 102.5 4 2 74.5 87 MXQ12C-40Z 34 27 60 23 50 120.5 6 3 92.5 105 MXQ12C-50Z 34 11 37 39 60 23 60 130.5 6 3 102.5 115 MXQ12C-75Z 36 25 41 36 100 42 85 174.5 8 4 146.5 159 MXQ12C-100Z 36 14 66 36

Smooth Cylinder/Low Speed Cylinder

M14 x 1.5 15 17 Up to 1000 25 32 32 64 +0.084 0 0.1 0.3 +0.3 +0.1 0 0.2 50 47 157 128 160 17 32 71 43 15 M14 x 1.5 15 17 Up to 1000 28 36 36 72 +0.084 0 0.1 0.3 +0.3 +0.1 0 0.2 56 53 177 144 180 20 38 78.5 42 18 M16 x 1.5 15 20 Up to 1200 32 40 40 80 +0.100 0 0.1 0.3 +0.3 +0.1 0 0.2 (mm) Bore size (mm) Without rod boot With rod boot K KA L N P S U RR MM Z ZZ e f h Z1 ZZ1 H l 125 140 160

1

36 M3 16 5.5 6 M4 x 0.7 30 66 27 6.5 23.5 4 36 17 37 M3 18 5.5 6 M5 x 0.8 30 70 36 8.0 28.5 5 46 21 47 M4 20 5.5 7 M6 x 1.0 35 80 47 9.5 36 6 60 27.5 61 M5 22.5 6.0 8 M6 x 1.0 40 92 55 9.5 41 6 70 28.5 71 M5 26 6.0 8 M6 x 1.0 40 110 65 11 49 8 86 35 87 M6 35 6.0 11 M8 x 1.25 50 122 80 18 57 10 100 42 101 M6 36 7.0 11 M8 x 1.25 Note 1) With dimension F, the amount of clearance between the

Air Cylinder

With Rod Boot (mm) B3 e f h l Z Symbol Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 30 36 18 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 160 173 185 198 223 248 273 25 32 36 18 72 85 97 110 135 160 185

AC Servo Motor Driver (Network card type ）

600 _ _ 1 F 290 7 7 7.

5

31 43.5 34.5 41 34 77 87 33.5 31 34.5 31 43 31 46.5 39 63 38.5 36 43 36 40.5 36 48.5 39.5 46 39 83.5 93.5 39 36 40 36 48 36 51.5 44 80 46.5 45 52 45 49 45 55 46.5 52.5 46.5 92.5 103 47.5 45 48.5 45 56.5 45 58 51.5 100 54 53.5 59.5 53.5 57 53.5 62 55 59.5 55 103 113.5 55.5 53.5 56.5 53.5 64.5 53.5 65.5 60.5 Operating Range (mm) Auto switch model Bore size 32 40 50 63 80 100 D-M9m/

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Connection threads Rc/NPT L W E Y M H L E Model LQ3H1A-F LQ3H2A-F LQ3H2B-F LQ3H3A-F LQ3H3B-F LQ3H3C-F LQ3H4A-F LQ3H4B-F LQ3H4C-F LQ3H5A-F LQ3H5B-F LQ3H5C-F LQ3H6A-F LQ3H6B-F LQ3H6C-F 18.5 18.5 21.5 18.5 21.5 25 21.5 25 29.5 25 29.5 36 29.5 36 44.5 10 9 34 39 44 47.5 52 52.5 53 56 64 64.5 69.5 71 77.5 79 86.5 14 35 40 45 50.5 55 55.5 55.5 58 66 67 72 73.5 81.5 83 90.5 1/8" 10 11 1/8" 1/8"

Table of Contents

Refer to pages starting with 181 for mounting. 95 100 8(4)-6.2 B 95 ( ) ( ) (170) A 95 110 20 95 ( ) ( ) (150) A B 100 200 300 400 500 600 700 800 900 1000 1200 Stroke Model LG1H212SC-100-F LG1H212SC-200-F LG1H212SC-300-F LG1H212SC-400-F LG1H212SC-500-F LG1H212SC-600-F LG1H212SC-700-F LG1H212SC-800-F LG1H212SC-900-F LG1H212SC-1000-F LG1H212SC-1200-F 80 180 280 380 480 580 680 780 880

Table of Contents

S + Stroke F CX ZZ + Stroke D-X H 20B E G Mounting nut Data NN NA F N CY3B15 (mm) B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Wiper ring Rod seal Piston seal Valve seal Tube gasket 125 140 G55 CS1H125A-PS SDR-36 SKY-36 RPS-125 P7 C120 CS1H140A-PS G55 SDR-36 SKY-36 RPS-140 P7 C135 160 CS1H160A-PS G55 SDR-40 SKY-40 RPS-160 P7 C155 Low Friction 30 Kit no.

CL

36 40 42 50 59 76 92 100 112 118 27 32 32 37 37 47 47 53 40 50 55 65 80 90 90 90 60 70 86 102 116 145 161 182 32 40 40 52 52 59 59 59 43 43 43 9.0 9.0 11.5 13.5 13.5 19 19 19 112.5 121 133 141.5 150 167 Bore (mm) W/o rod boot W/ rod boot KA N H1 K MM GA FV J W M S M1 P GC GB e 36 45 45 60 60 75 75 75 f 16.5 16.0 16.0 18.0 18.0 40 40 40 h 59 66 66 80 81 133 133 141 ZZ 223 245 262 305 324

Combination Cylinder

71 87 89 110 110 120 ZZ 241 263 307 327 e 45 45 60 60 75 75 75 f h 66 66 80 81 133 133 141 ZZ 240 258 300 319 l MGQ 14 14 14 14 15 15 15 / / / / / / / 3/8 3/8 1/2 1/2 1/2 1/2 3/4 76 92 112 136 164 184 204 90 98 116 126 98 98 106 6 10 12 12 30 24 26 22 19 22 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 M30 X 1.5 M30 X 1.5 M36 X 1.5 30 31 37 40 35 35 39 30 40 45 50 36 36 45 0 0 0 0 16.0 1001 to

AC Servo Motor Driver (Pulse input type/Positioning type ）

600 _ _ 1 F 290 7 9 7.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Rod end nut Basic Style Bore size (mm) Stroke range (mm) A B C D E F H K L M N O Q S U V 12 16 20 25 31.5 34 36 37.5 28 30.5 31.5 32.5 6 8 7 12 6 8 10 12 32 38 47 52 6.5 5.5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 5 6 8 10 3.5 3.5 4.5 5 22 28 36 40 3.5 3.5 5.5 5.5 6.5 depth 3.5 6.5 depth 3.5 9 depth 7 9 depth 7 11 10 10.5 11 35.5 41.5 48 53.5 19.5 22.5 24.5 27.5 25 29 36 40 Note 2) External

4/5 Port Solenoid Valve

1.6 (PE port) 1/8 (P, R1, R2 port) B A 17 One-touch fitting (A, B port) (4.9) 36 Applicable tubing O.D.: 6, 1/4" : 8, 5/16" (3.6) L plug connector (L): SYJ7120-L-01 (-F) M plug connector (M): SYJ7120-M-01 (-F) M8 connector (WO): SYJ7120-WO-01 (-F) DIN terminal (D): SYJ7120-D-01 (-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 65 31.5 [38.5] 101 Max. 10 57.5 16.1 46.2 31.1

JIS Standard Hydraulic Cylinder

F F H H Note) Male thread effective length should be no more than 100 mm.

CM2

21 16 M14 x 1.5 24 14 46.5 7 22 41 8 1/4 0 0.039 32 With Rod Boot 20h Symbol Z TZ TY TX TT TD S ZZ Bore size (mm) B3 f e Stroke Bore size (mm) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 52 32 32 10 8 62 118 108 Data 20 17 36 30 68 81 93 106 131 156 181 25 60 40 40 10 9 62 122 112 25 17 36 32 72 85 97 110 135 160 185 32 60 40 40 10 9 64 124 114 32 17 36 32

ISO Cylinder

F FF FX G1 G2 H K KA KK N1 N2 NB ND S SW (WH) ZZ 32 17 20 12 37.5 G1/8 42.4 M6 x 1 depth 11 30 22 9 36 5.5 10 M10 x 1.5 29 17 34.5 26 0 0.033 80 17 16 116 40 21 24 14 46.5 G1/4 52.4 M8 x 1.25 depth 14 36 27 12 40 7 12 M12 x 1.75 38 22 42.5 32 0 0.039 105 19 16 145 Refer to page 63 of Standard Type Single Rod for details of accessories (rod end, floating joint).

LX

Displacement at "A" when a load is applied to "F" with the slide table retracted.

CL

36 40 40 50 55 65 80 90 90 90 6.5 6.0 6.0 8.0 8.0 43 43 43 14 14 14 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 Without rod boot With rod boot Bore size (mm) P J K KA L MM N RR S U W H Z ZZ e f h Z ZZ l 36 45 45 60 60 75 75 75 1/4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/5 stroke 1/5 stroke 1/5 stroke