LEC-OM02904

(10V/10pulse) CCW CCW 10[V] 10[V] 10[pulse] 10[pulse] 0 0 10[pulse] 10[pulse] 10[V] 10[V] CW CW A (124) (10V/1Mpulse) B (124) (10V/10Mpulse) CCW CCW 10[V] 10[V] 1M[pulse] 10M[pulse] 0 0 1M[pulse] 10M[pulse] 10[V] 10[V] CW CW 5 25 5 C (124) (10V/100Mpulse) D (3) CCW 10[V] 8[V] 100M[pulse] 0 100M[pulse] 400[V] 0 10[V] CW E 2(45) CCW 8[V] 0 8[V] CW 1. 2. () 3. 400V8V/800V 4. 5.

OMU0023

(1 bit) 145 20 10 85 15 10 Reading of internal parameters (7 words) 270 40 15 150 25 10 Operation mode selection 165 25 10 95 15 10 Commands for virtual I/O operation by serial communication 195 30 15 110 20 10 Reading of alarm history (4 words) 215 30 15 120 20 10 Clearing of alarm history 245 35 15 135 20 10 Confirmation of communication connection 165 25 10 95 15 10 The communication

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'13'16 10 .

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Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

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Low temperature operation 1) The valve can be used in an ambient temperature of between 10 to 20C.

PFxx-OMX0002

Product number Suitable screws Tightening torque Thread depth PF3A703H Equivalent to M4 1.5 Nm 10 7 PF3A706H Equivalent to M5 3 Nm 10 8 PF3A712H Equivalent to M6 5.2 Nm 10 9 Prepared by the user.

VDW

Series VXP 1 2 3 10 N.C.

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

PFxx-OMX0007

Approx. 1.1 mm Insulator Colours Brown, blue, black, white Sheath Finish O.D. 4 -53No.PF-OMX0007-A Characteristics data Flow rate/Analogue output 0 L/min A 2 B 0 L/min C 2 D Voltage output (1 to 5 V) 1 1 V 1.04 V 5 V Voltage output (0 to 10 V) 1, 3 0 V 0.1 V 10 V Current output 1 4 mA 4.16 mA 20 mA Models Minimum value of rated flow range *4 Maximum value of rated flow range PF3A701H 10 L

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

SOL.B SOL.A 10 10 () (+) White Black SOL.A Double wiring (connected to SOL. A and SOL. B) is adopted for the internal wiring of each station, regardless of valve and option types. Mixed single and double wiring is available as an option. For details, refer to below.

Digital Flow Switch ( compatible)

V) 1, 2 0 V 0.1 V 10 V Current output 1 4 mA 4.16 mA 20 mA Models Minimum value of rated flow range Maximum value of rated flow range PFMC7501 5 L/min 500 L/min PFMC7102 10 L/min 1000 L/min PFMC7202 20 L/min 2000 L/min 1: Analogue output accuracy is within 3%F.S. 2: Set the current to the analogue output from the connected equipment to 20 A or less when selecting 0 to 10 V.

Digital Flow Switch ( compatible)

V) 1, 2 0 V 0.1 V 10 V Current output 1 4 mA 4.16 mA 20 mA Models Minimum value of rated flow range Maximum value of rated flow range PF2MC7501 5 L/min 500 L/min PF2MC7102 10 L/min 1000 L/min PF2MC7202 20 L/min 2000 L/min 1: Analogue output accuracy is within 3%F.S. 2: Set the current to the analogue output from the connected equipment to 20 A or less when selecting 0 to 10 V.

Multi-channel Digital Sensor Monitor ( compatible)

Refer to the table for each pressure specification (page 110) Display/set pressure range Display/min. setting unit Power supply Used as switch output device 12 to 24 VDC (10%), and voltage ripple (p-p) 10% at max. voltage Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Electric spec. Power supply voltage 12 to 24 VDC (10%), and ripple (p-p) 10% at max.

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Give adequate confirmation, and then determine a model, just because the compatibility list shows the general case. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump

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AR20K io 60K Flor / drreclion: Bigh 10 leli AR10 to 60.

OMS0020

(guideline) Command 2400bps 19200bps 57600bps EE 145 25 10 EU 105 20 10 AB 105 20 10 MO 245 35 15 MD 115 20 10 OE 130 20 10 Calculation Example) Number of controllers connected: 5 Required transmission commands: EE,EU, AB Communication response time ( 25 + 20 + 20 ) x 5 = 325 ms Response time (guidline) 500 450 400 Response time [ms] EE 350 EU,AB,MD,OE 300 MO 250 200 150 100 50 0 1 2 3 4

Digital Gap Checker ( compatible)

Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Current consumption 25 mA or less Protection Polarity protection Switch output Select from NPN or PNP open collector output Max. load current 10 mA Max. applied voltage 30.0 V Residual voltage 1 V or less (at 10 mA) Short circuit protection Provided 2-screen (3-screen display available: sub display, 4 digits x 2) Main display

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80A Steel tube 80A Steel tube Piping A Piping A 30 Series VXF2/VXFA2 RoHS Controller Dedicated For Operation/Series VXFC How to Order Controller D VXFC 06 Voltage Number of output points 06 10 D D-6 A 24 to 48 VDC 6 output points 12 VDC 10 output points 85 to 220 VAC Specifications 06 10 VXFC D 06 10 VXFC A 06 10 VXFC D-6 85 to 220 VAC 24 to 48 VDC Model Input voltage 12 VDC Output voltage

VQ5000

Indicate 10 to 12 stations on the manifold specification sheet.) One station is used for serial unit mounting.

Refrigerated Air dryer Series IDU/IDF

(C) 55 50 60 70 80 IDU3D to 6D 45 50 55 65 75 IDU8D to 15C 45 50 55 65 70 IDU22C1, 37C1 40 45 50 55 60 IDU55C, 75C Ambient temperature (C) Outlet air pressure dew point (C) 15 10 5 15 10 5 15 10 5 15 5 10 5 15 10 1.35 1.35 0.60 1.35 1.35 0.60 1.35 1.35 0.60 1.35 0.60 1.35 0.60 1.35 1.35 25 1.35 1.05 0.50 1.35 1.05 0.50 1.35 1.10 0.50 1.35 0.60 1.20 0.55 1.35 1.25 30 1.25 0.95 0.45 1.25 0.95