5 Port Air Operated Valve Series SYA3000/5000/7000 1

EX) Base: 6 stations, common EXH, A & B port Rc 1/2 VVPA450-061-04 1 pc. VPA4154-00 3 pcs. VPA4254-00 2 pcs. XT038N-4A 1 pc.

Plug-in/Plug Lead: Single Unit

00-B-1 P ARBQ5000-00-P-1 ARBQ5000-00-P (P B) A ARBQ5000-00-A-5 0.7 0.6 VQ55 (Plug lead type) B ARBQ5000-00-B-5 Outlet pressure (MPa) 0.5 P ARBQ5000-00-P-5 0.4 0.3 Dimensions 0.2 0.1 00 2500 2000 1500 1000 500 3000 Flow rate (l/min (ANR)) SMC Pressure Characteristics 64 181 Conditions Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate: 20 l/min(ANR) 2 B SMC 68.5 D P 1 X 12 5 R1 3

Modular Type Regulator Series AR

MPa 0.2 0.2 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure MPa Inlet pressure MPa AR30 AR60 0.25 0.25 Outlet pressure MPa Outlet pressure MPa Set point Set point 0.2 0.2 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure MPa Inlet pressure MPa 38 AR10 to 60 Construction AR10 AR20, 25 t t

Plug-in/Plug Lead: Single Unit

00-B-1 P ARBQ5000-00-P-1 ARBQ5000-00-P (P B) A ARBQ5000-00-A-5 0.7 0.6 VQ55 (Plug lead type) B ARBQ5000-00-B-5 Outlet pressure (MPa) 0.5 P ARBQ5000-00-P-5 0.4 0.3 Dimensions 0.2 0.1 00 2500 2000 1500 1000 500 3000 Flow rate (l/min (ANR)) SMC Pressure Characteristics 64 181 Conditions Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate: 20 l/min(ANR) 2 B SMC 68.5 D P 1 X 12 5 R1 3

VXA21/22

8 1/4 1/8 1/4 VXA31m5-00 n X 100+50 VXA32m5-00 n X 160+70 Model/Valve Specifications Flow rate Orifice size (mm) Max. operating pressure differential (MPa) (1) Proof pressure (MPa) Weight (g) Max. system pressure (MPa) Cv Effective area (mm2) Model VXA3115-00 VXA3125-00 VXA3225-00 VXA3135-00 1.0 1.5 1.5 0.08 1.4 1.0 0.5 1.0 0.3 150 0.16 2.8 0.19 3.4 2.2 230 0.24 0.6 0.33 6 VXA3235-00 150

Self-seal Fittings Series KC

Nylon Urethane Effective orifice(mm 2) Weight (g) T (M) L Mounting hole M1 M2 KCE04-00 KCE06-00 KCE08-00 KCE10-00 KCE12-00 4 6 8 10 12 M12 1 M14 1 M16 1 M20 1 M22 1 14 42 13 15 17 21 23 18 19 21.5 24 25.5 16 17 18.5 21 22 21 30 39 84 115 2.6 6.8 13.1 20.4 30.4 2.6 6.8 16.2 25.6 35.4 17 19 24 27 45.5 52.5 59.5 63.2 Bulkhead female union: KCE Thread Rc (PT) 4 6 8 10 12 Effective orifice(mm

SY

SS5Y34, #1 (#1 + #5 + #6 + #7 + #17) SS5Y3-45FU-B .

Process Valve Series VNA

VO307 00 Q CE compliant VO301 00 X302 Coil rated voltage 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Component Parts No.

E-P HYREG

/Component Parts/Working Principle VY1100 1, VY1200 1, VY1300 1, VY1400 1 (Pilot valve: VY1D00-00) VY1500 1, VY1700 1, VY1900 1 (Pilot valve: VY1B00-00) Working principle The pair of poppet valves u close due to the balance between actuating forces F1 and F2.

Process Pump <Fluororesin Type> Series PA3000

1/4 thread G 1/4 thread NPT 1/4 thread NPTF 1/4 thread Rc 1/4 thread G 1/4 thread NPT 1/4 thread NPTF 1/4 thread 0 3 PA331n (Standard assembly) PAP331n (Clean-room assembly) Automatically operated type Air pilot actuation type P11N* P11T* PAP331n (Clean-room assembly) P13 P13F* P13N* P13T* Port sizes marked "*" are optional.

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

V100

Sub-plate gasket VP300-2-1P (Rc 1/8) VP300-2-2P (Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) Mounting Screw Tightening Torques M3: 0.6 Nm M4: 1.4 Nm M5: 2.9 Nm VP300-17-1 VP344 SF4--50 VP500-17-1 VP544 VP700-17-1 VP744 How to Order Sub-plate VP 00 2 1 Series Port size Thread type VP744 3/8 1/2 VP544 1/4 3/8 VP344 1/8 1/4 3 5 7 P F N T VP344 VP544

JXCx-OMT0023

from QD75[pulse/rev] 4000 20 6000 30 AP 1 1 1 1 Minimum command unit 1pulse AL 1 1 1 1 AD75P AM 1 1 1 1 Electronic gear AP 4000 20 6000 30 Minimum command unit 0.1 m AL 1000.0[ m] 1000.0[ m] 1000.0[ m] 1000.0[ m] AM 10 10 10 10 Note.

Modular F.R.L. Units

[MPa] 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure [MPa] 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure [MPa] AR50(K)-B AR60(K)-B 0.25 0.25 Outlet pressure [MPa] Outlet pressure [MPa] Set point Set point 0.2 0.2 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure [MPa] 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure [MPa] 71 Regulator AR10-A Series Regulator AR20

Electric Slide Tables

00 3 6 9 00 2 4 6 00 0.5 1.0 1.5 2.0 Work load m [kg] Work load m [kg] Work load m [kg] 2,000 2,000 1,500 1,250 1,500 1,500 Pitching Mep 1,000 L4 [mm] L4 [mm] L4 [mm] 1,000 750 1,000 500 500 500 250 Mep m 00 0.1 0.2 0.3 0.4 0.5 00 1 2 3 4 5 00 0.5 1.0 1.5 2.0 L4 Vertical Work load m [kg] Work load m [kg] Work load m [kg] 2,000 2,000 1,500 1,250 1,500 1,500 1,000 L5 [mm] L5 [mm] L5 [mm] 750

E-P HYREG ® Series VY1

(Pressure gauge) N (Silencer) 00 M5 00 M5 01 00 01 02 00 02 03 04 Symbol Mounting Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Base mounted 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol Note) A M5 01 02 02 03 04 04 06 10 10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note) 3 Body ported 5 1 1 11 4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be

AC Servo Motor Driver (Pulse input type/Positioning type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 * : J Z j z 1 0 1 1 11 + ; K [ k { 1 1 0 0 12 , < L l | 1 1 0 1 13 = M ] m } 1 1 1 0 14 . > N ^ n 1 1 1 1 15 / ?

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

VQ4000

Note 5) Dust tight/Low jetproof enclosure (IP65) is not available with interface regulator. 0.4 0.3 0.2 0.1 0 0 200 400 600 800 1000 1200 1400 1600 Flow rate (l/min(ANR)) ARBQ4000-00-P (P A) How to Order 0.7 Outlet pressure (MPa) 0.6 0.5 Regulating port Solenoid Valve Interface regulator 0.4 A ARBQ4000-00-A-1 0.3 VQ40 (Plug-in type) B ARBQ4000-00-B-1 0.2 P ARBQ4000-00-P-1 0.1 A ARBQ4000-

CLA

~~ , A 00) 0(0) 0 (2.5) 2(6) 4(7. 5) ~ , 40 D-AG 43.5 49 55.5 3 D-AS 1(0 1(0) 5(1.5 I O{S.5) 8(4 3t 35 42 so 57 .5 ~ Ht A 00) 00) 0(2.5 26 417 .5) D-A3 B !