Manifold Specifications

D M5 M5 x 0.8 Nil Rc Rc 1/8 VZ344(A), 2(B) port F G 20 20 stations 1(P) port M5 x 0.8 N NPT VZ35Rc 1/8 Z NPTE Applicable blanking plate assembly DXT192-13-1A Applicable individual EXH spacer assembly DXT192-21-1A Applicable individual SUP spacer assembly (Except VV5Z3-40 type) DXT192-40-1A Applicable interface regulator ARBZ3000-00-P How to Order Type 42 VV5Z3 05 C6 42 1 Stations 4(A),

VFS

x 0.8) Pilot EXH port M5 x 0.8 1 8 ( ): Rc Grommet terminal: VFS2610-E-01 02 DIN terminal: VFS2610-D Y-01 02 Lead wire O.D.

SZ3000

Note Mounting position Without power supply terminals With power supply terminals 1: Vertical connector 2: Horizontal connector P: Positive common N: Negative common 1 2 1 2 P N D side SZ3000-40-2A-D For D-sub connector SZ3000-40-1A-D 1 2 1 2 P N D side SZ3000-40-4A-D For flat cable 26 pins SZ3000-40-3A-D Note) The assembly part numbers with power supply terminals are 24VDC specifications

0.55

Applicable manifold base model VP300-25-1A VV3P3 Blanking plate assembly (With a gasket and two mounting bolts) VP500-25-1A VV3P5 VP700-25-1A VV3P7 VV3P3-41-051-02 VV3P5-42-053-03 How to Order Manifold Assembly (Example) Ordering example (VV3P3-41) VP344-5GZ1-B VP344-5GZ1-A VP300-25-1A Stations 3 2 1 D side U side VV3P3-41-051-02 1 set (Type 41, 5-station manifold base part no.)

smcmaintenancepartslist

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

M5 C4 C6 1 Includes 3pcs. of bushing assembly (SY3000-52-1A) SY360-Valve Ports P, R: With 8 One-touch fitting Includes 3pcs. of bushing assembly (SY3000-52-1A) 2 SY3000-55-1A Supply/Exhaust block assembly 3 SY3000-56-1A End block assembly For D side (bushing assembly: SY3000-52-1A not included) 4 SY3000-56-1B End block assembly For U side (bushing assembly: SY3000-52-1A not included) 5 SY3000

4/5 Port Air Operated Valve Series SYJA3000

Type 20 (5 Port/Body ported) How to Order Applicable solenoid valve M5 C4 C6 M5 C4 C6 SS5YJ520 05 SYJ520-A, B port M5 x 0.8 SYJ523-Applicable blanking plate assembly SYJ5000-21-1A Applicable individual EXH spacer assembly SYJ5000-17-1A P, R port thread type Number of stations -+ -+ P port 1/8 02 2 stations R R P Nil 00F 00N 00T Rc G NPT NPTF : : 20 20 stations R port 1/8 SV SZ Type 40 (5

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

DZ/Y/YZ VFS1320-D/DZ/Y/YZ VFS1420-D/DZ/Y/YZ VFS1520-D/DZ/Y/YZ Lead wire O.D.

Base Mounted Metal Seal/Rubber Seal Series VQ

C3, C4, C6, M5 C6 T1 U side D side Stations 3 2 1 Terminal no.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

12.7 11 3 28.1 [35.1] P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 21 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors L plug connector (L): 10-SYJ5 23-L-M5 3 4 5 M plug connector (M): 10-SYJ5 23-M-M5 3 4 5 DIN terminal (D, Y): 10-SYJ5 23-M5 M8 connector (WO): 10-SYJ5 23-WO-M5 3 4 5 3 4 5 D Y Approx. 300 (Lead wire length) Applicable

42

106 47 96.2 For U side mounting (TO) 9 71.7 For D side mounting (TD) 27 37.6 X 12 X 12 n U SIDE 4B 4A 4 B A 3B 3A 3 8 2B 2A 2 1B 1A 1 2 4 NO.

SYJ300/500/700

1.4 (PE port) L plug connector (L): SYJ52-L-M5 (-F) M plug connector (M): SYJ52-M-M5 (-F) DIN terminal (D): SYJ52-D-M5 (-F) M8 connector (MO): SYJ52-WO-M5 (-F) Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 60.9 28.1 [35.1] 53.4 Max. 10 74.6 42.1 12.7 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 65.5 [67.7] 75.5 55.7 [57.9] 64.6 57.2 50.7 34.7 8 9 8 9 8

Table of Contents

ribs F: M5 x 0.8 F: M6 x 1 F: M8 x 1.25 F: Rc Y 1 8 Model A 1.2 2.6 4.8 7 9 ZPT20 U C ZPT25 U C ZPT32 U C 1.6 0.8 20 23 1.7 14 23 6 8 6.2 23 29 29 4 28 5 8 8 12 12 25 1.8 M4 x 0.7 1 14.5 23.5 23.5 29.5 29.5 4.5 32 35 2.3 Deep 2.5 M5 x 0.8 1 8 B C D E G D E G D E G D E G F: M5 x 0.8 F: M6 x 1 F: M8 x 1.25 F: Rc Y Model A ZPT25D 25 28 20 5 29 8 6 29 8 8 35 12 6.2 35 12 10 b c d e Y Elliptic

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

-59-2A 10-SV1000 16 SX3000-77-1A SX3000-77-1A 10 SV2000-59-1A SV2000-59-2A 10-SV2000 16 SV2000-59-3A SV2000-59-3A 10 SV3000-59-1A SV3000-59-1A 10-SV3000 10 SY9000-57-1A SY9000-57-1A 10-SV4000 261 Manifold Option 10-SV Manifold Option Circular connector / Cable assembly (26 pins) D-sub connector / Cable assembly (25 pins) AXT100 MC26 AXT100 DS25 Directional Control Valves Air Grippers

VZ100/300/500

Refer to dimensions of this catalog and use caution to the mounting direction. 4-6-8 9 3 Port Solenoid Valve Rubber Seal, Body Ported Series VZ100 Type 01 How to Order Applicable solenoid valve VZ110--M5 VZ120--M5 Applicable blanking plate assembly DXT170-25-1A Individual EXH spacer assembly DXT170-48-1A Individual SUP spacer assembly DXT170-44-1A Stations Option VV3Z1 05 01 1 02 2 stations

Series SV

-59-2A SV1000-59-1A 10 SV1000 A L D Applicable fitting size d Model SX3000-77-1A SX3000-77-1A 16 KQ2P-04 16 32 6 4 SV2000-59-2A SV2000-59-1A 10 SV2000 KQ2P-06 18 35 8 6 SV2000-59-3A SV2000-59-3A 16 KQ2P-08 20.5 39 10 8 SV3000-59-1A SV3000-59-1A 10 SV3000 KQ2P-10 22 43 12 10 SY9000-61-2A SY9000-61-2A 10 SV4000 KQ2P-12 24 44.5 14 12 1mm2 = 1in = 25.4mm KQ2P-01 16 31.5 5 1/8" Manifold Specification

VZ1000

VK Applicable solenoid valve Type 25 (Non plug-in type) How to Order D 25 05 00C VV4Z1 VZ 4(A), 2(B) port G L M D G L M D VZ1120-M5 Stations VF VZ110-M5 (3 port valve) 02 2 stations 1(P), 3(R) port One-touch fitting for 6 VFR Applicable blanking plate assembly VZ1000-10-2A 20 20 stations SUP/EXH block mounting position VP4 DIN rail length specified B D U Both sides: 2 to 20 stations D side

High Vacuum Angle Valve

D-G

Table of Contents

A and D.

o

M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.