V H O W T O O R D E R S E R I E S S X 3 0 0 0 / 5 0 0 0 V A L V E T Y P E S 4 5 F, 4 5 P SX 40 L0Z S E R I E S 3 SX3000 5 SX5000 M A N U A L O V E R R I D E Non Locking Push Type D Push Locking Slotted Type C O N F I G U R AT I O N 1 2 Position Single 2 2 Position Double 3 3 Position Closed Center 4 3 Position Exhaust Center 5 3 Position Pressure Center C O M M O N S P E C I F I C AT I O N
bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12 With brake 274 CE Marking _ Page 282 Made to Order AC servomotor specification _ 288 Low particulate generation specification _ 294 Construction
8 1 9 2 A 3 B 4 C 5 D 6 E 7 F 15 17 15 (RWrn3) () 0050h 0 bit0bitFOFF/ON (OFF/ON) bitF bit0 bit bit 0 8 1 9 2 A 3 B 4 C 5 D 6 E 7 F 0051h 1 bit0bitFOFF/ON (OFF/ON) bitF bit0 bit bit 0 8 7 1 9 8 2 1 A 9 3 2 B 4 3 C 5 4 D 6 5 E 7 6 F 0052h 2 bit0bitFOFF/ON (OFF/ON) bitF bit0 bit bit 0 8 1 9 2 A 3 B Ready 4 C 5 D 6 E 7 F 15 18 15 (RWrn3) () 0081h [h] 0082h ON 00A0h
0 @2 o !2 w i @5 !4 e !7 !1 @4 !5 !6 r t u q @3 !3 @0 !9 !
H thread effective depth C (Also back cover) 2-N through (Port size) Piston rod cross section Width across flats K2 B + Stroke L + Stroke A + 2 (Stroke) 32 2-N through (Port size) 2-H thread effective depth C (Also back cover) Rod End Male Thread Bore size (mm) Stroke range (mm) C1 A1 H1 12 16 20 25 58.2 9 10 12 15 M5 x 0.8 M6 x 1.0 M8 x 1.25 5 to 30 5 to 30 5 to 50 5 to 50 5 to 50 75,100
LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12
5 !8 !9 !6 !7 @9 !2 @2 @4 t e !0 Series CH2G !3 @3 r @5 !
Note 2) Applicable stroke available in 5 mm increments.
(2) (2) Compressed air Fluid Range of operating conditions Inlet air pressure (MPa) 0.3 to 0.85 0.3 to 1.0 Inlet air temperature (C) 5 to 55(3) (3) 5 to 50 Ambient temperature (C) 5 to 50 5 to 55 5 to 50 5 to 50 Outlet air atmospheric pressure dew point (C) Inlet air flow rate (l/min (ANR)) (4) Standard performance 20 62 125 250 375 625 900 1190 725 31 Outlet air flow rate (l/min (ANR))
(4) Weight (kg) 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Port size Type of actuation C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv (B) (A) 4 2 (B) (A) 4 2 Plug-in Non plug-in 2 position 3 position 4.73 (4.56) VFR611 VFR610 40 0.12 9.1 41 0.15 9.6 2 Single 3 4 100 or less (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 2 100 or less 4.78 (4.61) 40 0.14 9.2 41 0.17 9.7 VFR621 VFR620 3 4 Double Double Exhaust
A a a A a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 4.8 6 7 9 C 2 x 1.8 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y Model ZP2-R4030W--A5 ZP2-R5030W--A5 ZP2-R6030W--A5 ZP2-R8030W--A5 ZP2-R3507W--A5 ZP2-R4010W--A5 ZP2-R5010W--A5 ZP2-R6010W--A5 ZP2-R4020W--A5 ZP2-R5020W--A5 ZP2-R6020W--A5 ZP2-R8020W--A5 2 x 1.5 0.5 0.5
(n=2, 3, 4, 5) (n-2) 2 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) D-M9V 5 35 20 (n=2, 3, 4, 5) (n-2) 2 25 + 35 (n-2) 15 + 35 (n=2, 4, 6) Note 3) D-A9V 5 25 15 (n=2, 3, 4, 5) (n-2) 2 D-M9WV D-M9AV 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) 10 35 20 (n=2, 3, 4, 5) (n-2) 2 50 + 45 (n-2) D-C7 D-C80 15 + 45 (n=2, 4, 6) Note 3) 10 50 15 (n=2, 3, 4, 5) D-H7 D-H7W D-H7NF (n-2) 2 60 + 45 (n-2) 15 +
OPTIONS AND PERIPHERAL EQUIPMENT (3) Dimensions (a) EMC filter HF3010A-UN [Unit: mm] 4-5.5 7 3-M4 3-M4 M4 32 2 110 4 85 2 IN Approx. 41 258 4 65 4 273 2 288 4 300 5 HF3030A-UN/HF-3040A-UN [Unit: mm] 6-K 3-L 3-L G 1 E 1 D 2 F 2 M J 2 C 1 C 1 B 2 H 2 A 5 Model Dimensions [mm] A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25 length: 8 M5 M4 HF3040A-UN
R2) J kit 3 position: SQ2 40 3 4 5 3 4 5 3 position: SQ2 41 r e q w T r e q w kit L kit SQ2441 SQ2340 SQ2440 SQ2540 SQ2341 SQ2541 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 S kit (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) Dual 3 port valve: SQ2 41 A B C C Component Parts r e w q kit No
6 7 7 7 8 8 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 (Note 5) (Note 5) 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (Note 8) (Note 2) 150 RDN 8 7 7 8 7 7 8 7 7 8 8 8 (Note 6) Branch connector (Note 6) Branch connector (Note 6) Branch connector Note 1.
A A1 B C D E F G M (Fine pitch) P*2 H Extension stroke end Retraction stroke end Single metal stopper with bumper*1 MXQ8(A, C) MXQA-CS8 MXQA-CT8 MXQA-A887 30 2 8 3 5 18 5.8 8.3 M6 x 0.75 M3 x 6 MXQ12(A, C) MXQA-CS12 MXQA-CT12 MXQA-A1287 35 2.8 10 4 6.5 24 7.1 10.4 M8 x 1 M4 x 8 MXQ16(A) MXQA-CS16 MXQA-CT16 MXQA-A1687 40 3.6 12 5 8 29.4 9.2 12.6 M10 x 1 M5 x 10 MXQ20(A) MXQA-CS20 MXQA-CT20
2, 3, 4, 5) D-A9 5 15 30 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) D-M9V 5 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-A9V 5 15 25 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) D-M9WV D-M9AV 10 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-C7 D-C80 5 15 50 15 + 45
5.5 through 4-9 counter bore depth 7 36 36 8 20 2-Rc 1/8 (port size) 20 57 + Stroke 5 5 + Stroke 67 + 2 strokes C X L C X L + Stroke 47 32 to 100 2-P (port size) Approx.
Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to