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(2) (2) Compressed air Fluid Range of operating conditions Inlet air pressure (MPa) 0.3 to 0.85 0.3 to 1.0 Inlet air temperature (C) 5 to 55(3) (3) 5 to 50 Ambient temperature (C) 5 to 50 5 to 55 5 to 50 5 to 50 Outlet air atmospheric pressure dew point (C) Inlet air flow rate (l/min (ANR)) (4) Standard performance 20 62 125 250 375 625 900 1190 725 31 Outlet air flow rate (l/min (ANR))

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(4) Weight (kg) 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Port size Type of actuation C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv (B) (A) 4 2 (B) (A) 4 2 Plug-in Non plug-in 2 position 3 position 4.73 (4.56) VFR611 VFR610 40 0.12 9.1 41 0.15 9.6 2 Single 3 4 100 or less (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 2 100 or less 4.78 (4.61) 40 0.14 9.2 41 0.17 9.7 VFR621 VFR620 3 4 Double Double Exhaust

ZP

A a a A a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 4.8 6 7 9 C 2 x 1.8 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y Model ZP2-R4030W--A5 ZP2-R5030W--A5 ZP2-R6030W--A5 ZP2-R8030W--A5 ZP2-R3507W--A5 ZP2-R4010W--A5 ZP2-R5010W--A5 ZP2-R6010W--A5 ZP2-R4020W--A5 ZP2-R5020W--A5 ZP2-R6020W--A5 ZP2-R8020W--A5 2 x 1.5 0.5 0.5

Smooth Cylinder/Low Speed Cylinder

(n=2, 3, 4, 5) (n-2) 2 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) D-M9V 5 35 20 (n=2, 3, 4, 5) (n-2) 2 25 + 35 (n-2) 15 + 35 (n=2, 4, 6) Note 3) D-A9V 5 25 15 (n=2, 3, 4, 5) (n-2) 2 D-M9WV D-M9AV 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) 10 35 20 (n=2, 3, 4, 5) (n-2) 2 50 + 45 (n-2) D-C7 D-C80 15 + 45 (n=2, 4, 6) Note 3) 10 50 15 (n=2, 3, 4, 5) D-H7 D-H7W D-H7NF (n-2) 2 60 + 45 (n-2) 15 +

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2, !3, !4, !5.

Air Slide Table

A A1 B C D E F G M (Fine pitch) P*2 H Extension stroke end Retraction stroke end Single metal stopper with bumper*1 MXQ8(A, C) MXQA-CS8 MXQA-CT8 MXQA-A887 30 2 8 3 5 18 5.8 8.3 M6 x 0.75 M3 x 6 MXQ12(A, C) MXQA-CS12 MXQA-CT12 MXQA-A1287 35 2.8 10 4 6.5 24 7.1 10.4 M8 x 1 M4 x 8 MXQ16(A) MXQA-CS16 MXQA-CT16 MXQA-A1687 40 3.6 12 5 8 29.4 9.2 12.6 M10 x 1 M5 x 10 MXQ20(A) MXQA-CS20 MXQA-CT20

5

2, 3, 4, 5) D-A9 5 15 30 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) D-M9V 5 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-A9V 5 15 25 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) D-M9WV D-M9AV 10 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-C7 D-C80 5 15 50 15 + 45

Hydraulic

5.5 through 4-9 counter bore depth 7 36 36 8 20 2-Rc 1/8 (port size) 20 57 + Stroke 5 5 + Stroke 67 + 2 strokes C X L C X L + Stroke 47 32 to 100 2-P (port size) Approx.

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

Battery-less

6 C !9 u C i y @5 q #1 @4 !1 !4 o !8 @6 !3 !2 @0 @1 !7 !5 !0 t @3 Component Parts No.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Connector C Actuator side (Terminal no.) 1 2 5 6 (8) (14) (18) Cable length (L) [m] A1 B1 (13.5) (17.7) (17.7) 1 1.5 3 3 5 5 8 8 A 10 B 15 C 20 1 2 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Controller side (14.2) Connector C (Terminal no.) 1 2 5 6 (5.5) (6.3) Produced upon receipt of order

CQ2

-015A NT-02 NT-03 NT-04 NT-05 NT-08 NT-10 4 5 5 6 8 11 13 16 8 10 13 17 22 27 32 41 9.2 11.5 15.0 19.6 25.4 31.2 37.0 47.3 5 5 8 10 10 14 18 22 0.7 0.7 0.9 1.15 1.15 1.15 1.35 1.35 14.6 16.6 21 25.6 41.6 50.6 64 72 10.2 12.2 16.2 20.2 36.2 44.2 56.2 64.2 1.5 1.5 1.5 1.55 1.55 2.05 2.55 2.55 For axis C shaped 5 For axis C shaped 8 For axis C shaped 10 For axis C shaped 10 For axis C shaped

SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 39.3 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 18 A 4 A 4 3/5 R 3/5 R A 4 A 4 A 4 A 4 39.3 40.1 A 4 A 4 63.3 79.8 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-Plug [1 (P), 3/5 (R) port] 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-One-touch fitting [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 2n1-One-touch fitting [4 (A), 2 (B) port] Applicable

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C U U O O S S L L H H 8 3 11.5 5 L2 dimension Stations 1 2 3 4 5 6 7 8 9 M DIN rail part no.

Series SV

(With 2 input blocks) With external pilot specification 46.5 (Pitch) P = 20.5 23.5 21.3 16.5 18 11 M3 M12 17.7 11.6 13.5 36.1 83.8 5 37.6 3 3 PWR 3 3 42.7 3 5 PWR 3 5 E 3 5 E E 3 5 4 A E 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 2 2 2 2 60.3 76.8 1 1 1 1 BUS 0 BUS 0 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 0 0 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 N11 M8

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Bore size (mm) Stroke range (mm) Th9 Q N M I K L H G F E D C B A 12 16 20 25 5 to 30 12.5 3.5 15.5 32 5.2 3.5 M3 x 0.5 1.5 5 25 6 6 22 25.5 15 0 0.043 5 to 30 13 3.5 20 38 6 3.5 M4 x 0.7 1.5 5.5 29 8 8 23.5 27 20 0 0.052 5 to 50 17 5.5 25.5 47 8 4.5 M5 x 0.8 2 5.5 36 10 7 27.5 32 13 0 0.043 5 to 50 19 5.5 28 52 10 5 M6 x 1.0 2 5.5 40 12 12 30.5 35.5 15 0 0.043 For details about the rod

LJ1H

voltage Cable entry direction Cable length Left entry 100VAC (50/60Hz) 200VAC (50/60Hz) 1 2 Actuator cable Axial Right Left Top Bottom Brake cable Left Axial Axial Axial Axial 2 3 4 5 2m 3m 4m 5m F R L T B Axial entry Right entry Bottom entry Specifications Intermediate strokes 100 5.5 200 6.3 300 7.1 400 7.8 500 8.6 5 to 40 (with no condensation) 5 150 600 mm kg C kg N mm/s mm Standard

7ND9071en

ENCLOSURE All models are IP66 / NEMA 4X enclosure U applicable for 5. sigh F or P: Class I, Division 2, Groups A, B, C, and D; T4/T5/T6 Ex ic IIC T4/T5/T6 Gc Class I, Zone 2 AEx ic IIC T4/T5/T6 Gc Temperature range: T4: -40 to +80 C; T5: < +65 C; T6: < +50 C. No Zener Barrier needed. 1/2 NPT conduit entry.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Common exhaust port for main and pilot valve (VF1000/3000) VFS VS4 VQ7 EVS VFN VF5000 C: 12 dm3/(sbar) {4/2 5/3 (A/B EA/EB)} 32 mm width VF3000 C: 3.1 dm3/(sbar) {4/2 5/3 (A/B EA/EB)} 26.4 mm width VF1000 C: 0.53 dm3/(sbar) {4/2 5/3 (A/B EA/EB)} 26.4 mm width 3-4-1 2 Series VF1000/3000/5000 Many combinations available to fit your needs.

Electric Actuator/Slider Type

5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.