5 Port Solenoid Valve Series SY3000/5000/7000/9000

Grommet (G) With External Pilot Specifications (Pitch) P=24 22.3 24.3 18.3 11 3/5 R 3/5 R 18.8 18.8 18 4 A 4 A 4 A 4 A 4 A 3/5 R 3/5 R 4 A 4 A 4 A 4 A 4 A 39.3 39.3 40.1 63.3 79.8 1 P 1 P 2 B 2 B 2 B 2 B 2 B : 12 : 10, 3/8" Applicable tubing O.D.: 8, 5/16" [4(A), 2(B) port] One-touch fitting [1(P), 3/5(R) port] Plug 1 P 2 B P 1 2 B 2 B 2 B 2 B Applicable tubing O.D.: 12, 3/8" [1(P), 3/5(R

Air Cylinder Series CM2

) 6 (4) 9.5 (7) 0 () 10.5 (8) 0.5 () 3 (1) 4 (2) 6 (4) 7 (5) CJ2 25 7.5 (5) 6.5 (4) 1 (0) 2 (0) 2.5 (0.5) 3.5 (1.5) 6 (4) 7 (5) 10.5 (8) 0.5 (0) 11.5 (9) 1.5 (0) 4 (2) 5 (3) 7 (5) 8 (6) CM2 32 40 11.5 6 7 13.5 7.5 8.5 11 12 15.5 5.5 17.5 6.5 9 10 12 13 CG1 ( ): Setting position for the auto switch with an air cushion.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

(With 2 input blocks) With External Pilot Specifications 46.5 (Pitch) Ground terminal 16.5 13.5 P=10.5 14.1 8.4 18.3 2 x M12 8.6 10 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 17.7 24.6 23 59.5 3 PWR 3 3 3 3 5 E 5 3 E 3 5 E 5 3 E 42.7 PWR 43 T T 56.5 2 2 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P 1 P 1 P 1 1 1 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 5/16" BUS

Table of Contents

4 P. 17-5-117 Elbow LQ2L 5 VXA 2 VN 3 Female LVC 4 P. 17-5-118 5 LVA 2 LVH 3 Male LVD 4 P. 17-5-119 Run tee LQ2R 5 LVQ 2 LQ 3 Female LVN 4 P. 17-5-120 5 TI/ TIL 2 PA 3 Male PAX 4 P. 17-5-121 Branch tee LQ2B 5 PB 2 3 Female 4 P. 17-5-122 5 2 3 Union elbow LQ2E 4 P. 17-5-123 5 2 3 Union tee LQ2T 4 P. 17-5-123 5 Note) Basic size With reducer 17-5-95 24 Series LQ 1 2, LVN, TL/TIL Port size Tubing

Compact Hydraulic Cylinder

5 !8 !9 !6 !7 @9 !2 @2 @4 t e !0 Series CH2G !3 @3 r @5 !

Table of Contents

2 4 2 1 1 1 5 3 3 5 3 5 Regulating port B Regulating port P Regulating port A Caution Part No.

NCQ2/CQ2

Reed auto switch 12 V 2-wire Connector 5 V, 12 V 12 V 5 V, 12 V 12 V 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire Diagnostic indication (2-color indication) Relay, PLC IC circuit 24 V Yes Grommet Water resistant (2-color indication) IC circuit M9PAV M9PA M9BAV M9BA With diagnostic output (2-color indication) F79F IC circuit 5 V, 12 V 4-wire 3-wire A96V A96 5 V

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

2!6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

ZP

across flat 14 Width across flat 14 Width across flat 14 5 5 5 2 2 7 2 2 2 2 12 18 18 12 18 12 Vertical M12 x 1 M12 x 1 M12 x 1 Vertical 30 30 30 Width across flat 14 Width across flat 14 Width across flat 14 With Buffer: Vacuum Inlet With Buffer: Vacuum Inlet 5 5 5 7 7 Lateral Lateral With Adapter: Vacuum Inlet With Adapter: Vacuum Inlet 1.8 1.8 1 1.8 1.2 1.2 10 13 16 11 14 17 Lateral With

Electric Actuators

Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12 With

Base Mounted Metal Seal/Rubber Seal Series VQ

EX121-SMB1(-XP) (5) EX121-STA1(-XP) (5) EX121-SSH1(-XP) (5) EX121-SPA1 EX121-SUW1(-XP) (5) VQC EX121-SAB1(-XP) (5) SQ EX120-SUH1(-XP) (5) q EX121-SSL1(-XP) (5) EX121-SSL2(-XP) (5) VQ0 EX121-SFU1(-XP) (5) EX121-SDN1 EX121-SCS1(-XP) (5) VQ4 EX121-SCS2(-XP) (5) VQ5 EX120-SMJ1(-XP) (5) AXT100-2-P (2) U S w e r t U S U S AXT100-2-F (2) U S VQZ AXT100-2-TB1 (4) AXT100-2-TB2 (4) VQD Note 1) A

Electric Actuator

4 @5 !2 !1 @6 @7 @1 !5 !9 !6 !8 @2 @4 @0 !0 u !3 @3 !2 i e !7 r t w q y o In-line motor type/LEY 16 25D 32 #0 @9 @8 #6 #5 #1 #2 When rod end male thread selected #3#4 !0 Component Parts No. Description Material Note 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 No.

JXCx-OMX0009

Safety Instructions . 5 2.

Fieldbus system EtherNet/IP TM compatible SI Unit

each unit (When the power supply is applied). 5 Reserved 6 System error occurred. 7 Hardware error occurred. 0 There is an error in unit 0. 1 There is an error in unit 1. 2 There is an error in unit 2. 3 There is an error in unit 3. 2 4 There is an error in unit 4. 5 There is an error in unit 5. 6 There is an error in unit 6. 7 There is an error in unit 7. 0 There is an error in unit 8.

HRX-OM-W002

2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 34 24 14 2B 1B 2A 3A 1A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 1 23 2 22 25 26 27 1 22 2 2 7 7 6 2 7 5 (CN5) 1 37 2 38 4 39 3 40 32 3 20 2 20

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

Diagnostic content 0 There is an error in unit 0. 1 There is an error in unit 1. 2 There is an error in unit 2. 3 There is an error in unit 3. 4 There is an error in unit 4. 5 There is an error in unit 5. 6 There is an error in unit 6. 7 There is an error in unit 7. RWr(n+1) 8 There is an error in unit 8. 9 There is an error in unit 9.

Compact Rotary Actuator Series CRQ2

2 @1 @3 e u o t @2 !8 @0 @0 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 @3 w i !5 y q r q w r y !5 !

HRX-OM-X037

1-5 1.7 Waste Disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil . 1-5 1.7.2 Disposal of product . 1-5 1.7.3 Battery . 1-6 1.8 Safety Data SheetSDS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.2 Name and Function of Parts . 2-3 2.2.1 HRL-A-40 (Air-cooled type) . 2-3 2.2.1 HRL-W-40 (Water-cooled type) . 2-3 2.3 Function of Parts . 2-5 Chapter

Electric Actuator

The chamber is placed in an ISO Class 5 equivalent clean bench.

EXxx-OMY0004

General diagnostics 2 Table 9-3 General diagnostics 2 Bit Description Explanation 0 Module 1 error 0: No error or not connected, 1: Module 1 has an error 1 Module 2 error 0: No error or not connected, 1: Module 2 has an error 2 Module 3 error 0: No error or not connected, 1: Module 3 has an error 3 Module 4 error 0: No error or not connected, 1: Module 4 has an error 4 Module 5 error 0: No