IDX-OM-V020

of the ventilation grille . 5-2 5.2.2 Auto drain maintenance . 5-2 Chapter 6 Troubleshooting . 6-1 6.1 TROUBLESHOOTING . 6-1 6.2 RESET THE THERMAL RELAY AND HIGH PRESSURE SWITCH. 6-4 IDFA60/70/80/90 Series IDX-OM-V020 Contents Chapter 7 Documents . 7-1 7.1 SPECIFICATIONS . 7-1 7.2 REFRIGERANT AND GWP VALUE . 7-2 7.3 DIMENSIONS . 7-3 7.4 ELECTRIC CIRCUIT . 7-4 7.5 AIR/ REFRIGERANT CIRCUIT

IDX-OM-U010

Clean the dustproof filter of the ventilation grille . 5-2 5.2.2 Auto drain maintenance . 5-2 Chapter 6 Troubleshooting . 6-1 6.1 TROUBLESHOOTING . 6-1 6.2 RESET THE THERMAL RELAY AND HIGH PRESSURE SWITCH . 6-4 IDFC60/70/80/90 Series IDX-OM-U010 Contents Chapter 7 Documents. 7-1 7.1 SPECIFICATIONS . 7-1 7.2 REFRIGERANT AND GWP VALUE . 7-2 7.3 DIMENSIONS . 7-3 7.4 ELECTRIC CIRCUIT . 7-4 7.5

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

6 !9 !5 @1 !3 !0 !1 80, 100 80, 100 @2 Component Parts Replacement Parts/Seal Kit (Single rod) Bore size [mm] Kit no. Contents 32 CK95-32 No.

IDX-OM-X011

Troubleshooting . 6-1 6.2 Reset the Thermal relay and High Pressure Switch . 6-3 Chapter 7 Documents . 7-1 7.1 Specifications . 7-1 7.2 Refrigerant and GWP . 7-2 7.3 Dimensions . 7-2 7.4 Electrical circuit diagram . 7-3 7.5 Air and refrigerant circuits and functions . 7-5 Chapter 8 Option C . 8-1 8.1 Specifications . 8-1 8.2 Precautions for installation and handling . 8-1 Chapter 9 Option

IDX-OM-W095

5-1 5.2 . 5-2 5.2.1 . 5-2 5.2.2 . 5-2 6 . 6-1 6.1 . 6-1 6.2 . 6-4 IDFC60/70/80/90 Series IDX-OM-W095 7 . 7-1 7.1 . 7-1 7.2 GWP . 7-2 7.3 . 7-3 7.4 . 7-4 7.5 . 7-5 8 C . 8-1 8.1 . 8-1 8.2 . 8-1 9 L . 9-1 9.1 . 9-1 9.2 . 9-1 9.3 . 9-2 9.4 . 9-2 10 R . 10-1 10.1 . 10-1 10.2 . 10-1 10.3 . 10-2 11 T . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 11.4 . 11-3 11.5

IDX-OM-W094

-1 5.2 . 5-2 5.2.1 . 5-2 5.2.2 . 5-2 6 . 6-1 6.1 . 6-1 6.2 . 6-4 IDFA60/70/80/90 Series IDX-OM-W094 7 . 7-1 7.1 . 7-1 7.2 GWP . 7-2 7.3 . 7-3 7.4 . 7-4 7.5 . 7-5 8 A . 8-1 8.1 . 8-1 8.2 . 8-1 8.3 . 8-1 8.4 . 8-1 8.5 . 8-2 9 C . 9-1 9.1 . 9-1 9.2 . 9-1 10 L . 10-1 10.1 . 10-1 10.2 . 10-1 10.3 . 10-2 10.4 . 10-2 11 R . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 .

ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 13-9-9 10 Series ZQ Manifold Exploded View 6 3 6 4 6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

Vacuum Ejector Series ZM

Stations 1 2 3 4 5 6 7 8 9 10 ZZM-CR-01 ZZM-CR-02 ZZM-CR-03 ZZM-CR-04 ZZM-CR-05 ZZM-CR-06 ZZM-CR-07 ZZM-CR-08 ZZM-CR-09 ZZM-CR-10 SP ZCUK AMJ AMV AEP (2) (3) HEP Note Quantity Adapter A Adapter B Silencer Blanking plate No. 1 2 3 4 5 6 7 8 9 10 11 Model ZZM-SA ZZM-BP ZZM-ADAZZM-ADBZZM-GE ZZM-EPLZZM-GBL ZZM-GBB ZZM-GBR ZZM-EPRZZM-CRDescription 2 1 1 Station: 1 1 1 1 Manifold part no.

Compact Vacuum Ejector Series ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) Dimensions 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 9 Series ZQ Manifold Exploded View 6 3 6 4 6 b b view 4 6 2 a 5 a 5 5 Component Parts No.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

1 !2 !3 !4 !5 !6 !7 !8 !

Rotary Table/Vane Style Series MSU

Adjustment: Max. 10.3 6 2 x M5 x 0.8 2 8 A port 1 +0.030 0 B port 3 x 4H9 long groove depth 3 8g6 0.005 0.014 ( A , B , C ) 16h9 0 0.043 4 x M6 x 1 depth 11 50 0 0.074 53.5h9 48 160 Series MSUA Rotary Table: High Precision Type Vane Style These drawings indicate the condition when the B port is pressurized.

Information

CQS 12 to 25 Can be mounted to an installed double clevis cylinder. 1 Series CQ2/CQS Double Clevis Pivot Bracket Dimensions/Part No. Bore size 12 to 25 Without auto switch, With auto switch CD hole H10 0.4 0.2 CX CL 4 x CN R M CT A + Stroke CW CZ Applicable Cylinders/Double Clevis Pivot Bracket Part No. (mm) Hexagon socket A CN part no.

Large Type Vacuum Unit Series ZR

SMC PRESSURE SWITCH PD PV 57 1 67 1 32.4 109 Approx. 300 Ejector RESET SET Supply valve Release valve V 21.2 Manual override Suction filter 1 2-4.6 (mounting hole) 1 5.6 1 8 1 10.2 123 1 4.6 1 8 SOL. c SOL. a Silencer SOL. b Interface A Light Suction filter Manual override Interface B Digital vacuum pressure switch M5 port PE (pilot valve exhaust port) M5 port PD (vacuum breaking pressure

1

1, !6, !7, !8, !9, @0, @1, @2, @3, @6, @9, #0, #1, #3, #4, #5, #6, #7 20, 25, 32, 40, 50 !9 is type L only. -XC6A r, !0, !5, !6, !7, !8, !9, @0, @1, @3, @4, @7, @8, @9, #1, #2, #3, #4, #5, #9, $0 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. Dr, !1, !7, @0, @1, @2, @3, #1, #5 CQ2 20, 25, 32, 40, 50 #1 is rod side only.

Base Mounted Metal Seal/Rubber Seal Series VQ

SI unit output and coil numbering 1> 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no. SI unit output no.

Electric Actuator/Slider Type

6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

JXCx-OMT0023

setting in auto tuning mode 1 . 14 6.4 2-gain adjustment mode . 15 6.5 Manual mode . 16 6 1 6.

Proposals for Energy Saving

type (without silencer) 10/Rc 1/4 8/Rc 1/8 Threaded Threaded 6/Rc 1/8 6/Rc 1/8 6/Rc 1/8 6/Rc 1/8 10/Rc 1/4 6/Rc 1/8 8/Rc 1/8 10/Rc 1/4 12/Rc 3/8 12/Rc 3/8 8/Rc 1/8 10/Rc 1/4 12/Rc 3/8 12/Rc 3/8 16/Rc 1/2 16/Rc 1/2 Refer to page 3.4-1 of No. 3 for details.

0.4

(Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

LEC-OM02904

PB06 GD2 PB07 PG1 PB08 PG2 PB09 VG2 PB10 VIC 6 9 6 (b) 1 6.2.3 2 (No.PA080003) 3 ( ) 4 5 6 7 8 7.27.3 9 38 10 (c) (VG2PB09) (Hz) 2 ) (1 1 + X2 (VICPB10) (ms) 20003000 ) /(1 /1+ 6 10 6 (PG2PB08) 8 1 4 1 1 + ) (1 (PG1PB07) () 8 1 4 1 1 + ) (1 6 11 6 6.4 X-Y2 (1) (a) No. PB06 GD2 PB08 PG2 PB09 VG2 PB10 VIC (b) No.