Stations: 1 Station, AB Port: 1/2, Left, Thread: Rc, Control: None, PR Port: 3/4, Both Sides, PR Thread: -, Silencer: -, Voltage: -

Stations: 10 Stations, AB Port: 1/2, Left, Thread: Rc, Control: None, PR Port: 3/4, Both Sides, PR Thread: -, Silencer: -, Voltage: -

Stations: 3 Stations, AB Port: 1/2, Left, Thread: Rc, Control: None, PR Port: 3/4, Both Sides, PR Thread: -, Silencer: -, Voltage: -

Stations: 4 Stations, AB Port: 1/2, Left, Thread: Rc, Control: None, PR Port: 3/4, Both Sides, PR Thread: -, Silencer: -, Voltage: -

Stations: 5 Stations, AB Port: 1/2, Left, Thread: Rc, Control: None, PR Port: 3/4, Both Sides, PR Thread: -, Silencer: -, Voltage: -

Stations: 6 Stations, AB Port: 1/2, Left, Thread: Rc, Control: None, PR Port: 3/4, Both Sides, PR Thread: -, Silencer: -, Voltage: -

Stations: 7 Stations, AB Port: 1/2, Left, Thread: Rc, Control: None, PR Port: 3/4, Both Sides, PR Thread: -, Silencer: -, Voltage: -

Stations: 8 Stations, AB Port: 1/2, Left, Thread: Rc, Control: None, PR Port: 3/4, Both Sides, PR Thread: -, Silencer: -, Voltage: -

Stations: 9 Stations, AB Port: 1/2, Left, Thread: Rc, Control: None, PR Port: 3/4, Both Sides, PR Thread: -, Silencer: -, Voltage: -

Area: -, Stations: 3 Stations, AB Port: 1/2, Left, Air Release Valve: w/o Air Release Valve, PR Port: 3/4, Both Sides, Silencer: -, Voltage: -, Q: -, Area: North America

Area: -, Stations: 2 Stations, AB Port: 1/2, Left, Air Release Valve: w/o Air Release Valve, PR Port: 3/4, Both Sides, Silencer: -, Voltage: -, Q: -, Area: North America

Area: -, Stations: 5 Stations, AB Port: 1/2, Left, Air Release Valve: w/o Air Release Valve, PR Port: 3/4, Both Sides, Silencer: -, Voltage: -, Q: -, Area: North America

Digital Flow Switch (Remote type monitor unit)

PF2A30 series PF2A31 series 1 to 10 L/min type (PF2A510) 5 to 50 L/min type (PF2A550) [11L]: [21L]: [51L]: 10 to 100 L/min type (PF2A511) 20 to 200 L/min type (PF2A521) 50 to 500 L/min type (PF2A551) [10L]: [50L]: PF2W30 series PF2W33 series [11L]: 10 to 100 L/min type (PF2W511) 0.5 to 4 L/min type (PF2W504) [04L]: [20L]: [40L]: 2 to 16 L/min type (PF2W520) 5 to 40 L/min type (PF2W540) PF2D30

4-channel Flow Monitor (Remote type monitor unit)

PF2A20 series 1 to 5 to 10 L/min type (PF2A510) 50 L/min type (PF2A550) [10L]: [50L]: [11L]: [21L]: [51L]: 10 to 20 to 50 to 100 L/min type (PF2A511) 200 L/min type (PF2A521) 500 L/min type (PF2A551) PF2W20 series 0.5 to 4 L/min type (PF2W504) (PF3W504) [04L]: [20L]: [40L]: [11L]: 2 to 5 to 16 L/min type (PF2W520) (PF3W520) 40 L/min type (PF2W540) (PF3W540) 10 to 100 L/min type (PF2W511)

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R L 4 5 8 10 ZZM Stations 06 6 8 10 10 ZZM Stations 06B R L 4 5 8 10 ZZM Stations 04 6 8 10 10 ZZM Stations 04B Effective area of external silencer is 160 mm2.

Series VS

Symbol Port Thread NIL Rc (PT) F G (PF) N NPT T NPTF Locations and sizes of port 4(A), 2(B) Symbol Port location Applicable ISO size 02 Side 1/4 Size 1 03 Side 3/8 Size 1, 2 04 Side 1/2 Size 1, 2, 3 06 Side 3/4 Size 2, 3 10 Side 1 Size 3 02B Bottom and side 1/4 with plug on side Size 1 03B Bottom and side 3/8 with plug on side Size 1, 2 04B Bottom and side1/2 with plug on side Size 2, 3 06B

Vacuum Ejector Series ZM

Maximum Ejector Stations (Max. operable nos. simultaneously) Ejector model ZMA053 ZMA054 ZMA073 ZMA074 ZMA103 ZMA104 ZMA133 ZMA134 ZMA153 ZMA154 Manifold model R L 10 8 5 4 3 ZZMA Stations 06 10 10 8 6 5 ZZMA Stations 06B R L 10 8 5 4 3 ZZMA Stations 04 10 10 8 6 5 ZZMA Stations 04B Effective area of external silencer is 160 mm2.

Serial Transmission System Series EX250 Series EX500

SV1100-5FU (4 sets) U side SS5V1-W16SA1WD-06B-C6 1 set (manifold part no.)

SMCs VQ7-6/7-8 series valve conforms to ISO standard 5591/I. A choice of metal or rubber seal increases compatibility with various operating and environmental conditions. Manifolds are available with a wide range of interface options to meet a variety of application requirements. The VQ7-6/7-8 has a smaller, space-saving profile and is lighter in weight than the VS7/VP7 series. Manifold

PF2x3.eng

] 1 to 10 L/min type (PF2A510) Indicator LED (OUT1) Set point 1 Set point 2 Hysteresis 1 Hysteresis 1 50% of max. rated flow [n_1] Input of the Set point 1 (OUT1) PF2A31 series [11L] 10 to 100 L/min type (PF2A511) button (SET) ON 50% of max. rated flow [n_2] Input of the Set point 2 (OUT1) [F_1] Input the Set value of instantaneous output PF2W30 series Selection of the connected sensor [04L