MU

MM NC 7.5Depth4.5 9Depth5.5 10.5Depth6.5 13.5Depth8.5 17Depth10.5 NS 43 45 44 54 53 Model MUB25 MUB32 MUB40 MUB50 MUB63 KA 10 12 14 18 18 N 14 15.5 16 21.5 21.5 ND M5 X 0.8 M6 X 1 M8 X 1.25 M10 X 1.5 NE 4.3 5.1 6.9 8.7 10.5 S 55 58 60 74 75 ZZ 69 72 75 92 96 M10 X 1.25 M8 X 1.25Depth13 M12 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M8 X 1.25Depth13 M10 X 1.5Depth15 M10 X 1.5Depth15 M12 X 1.75 2.4

MXU

34 45 35 8-3-7 8 Series MXU Dimensions: MXU16 (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 65.5 66 52 24 24 20 65.5 66 52 24 24 20 75.5 76 62 34 35 30 75.5 76 62 34 35 30 85.5 86 72 40 45 40 90.5 91 77 40 50 45 8-3-8 9 Compact Slide Series MXU Construction MXU6 (6) MXU10 (10) MX MTS MY CY MG CX MXU16 (16) D-X With auto switch 20Data Component Parts No. q Note Hard anodized No. !

EX120/121/122

M12, 5 pins, plug) Power supply connector (M12, 5 pins, plug, reverse key) Power supply connector (M12, 5 pins, plug, reverse key) BUS BUS 59.8 59.8 59.8 PWR PWR PWR Ground terminal 63 Ground terminal Ground terminal 63 63 EX250-SCA1A (CANopen) EX250-SEN1 (EtherNet/IP) EX250-SCN1 (ControlNet) Position indicator LED Position indicator LED Position indicator LED SI UNIT PWR CAN PWR(V) PWR NS

e

humidity range Storage temperature range Storage humidity range Withstand voltage Insulation resistance Noise resistance 35 to 85%RH (No condensation) 10 to 60C (No condensation and freezing) 35 to 85%RH (No condensation) Between all of external terminals and the case: 500 VAC for 1 minute Between all of external terminals and the case: 50 M(500 VDC) 1000 Vp-p Pulse width 1 s, Rise time 1 ns

EX260-SDN_eng

MS status Description NS status Installation Green On Green On On-line state, The device has connections in the established state.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

(de-energized) 980 m/s2 in X, Y, Z directions 3 times each (de-energized) 500 Vp-p, Pulse width 1 s, Rise time 1 ns Connection Material Weight Power supply / Output connection: 8P connector, Sensor connection: 4P connector (e-con) Housing: PBT, Display: PET, Backside rubber: CR 60 g (Except for any accessories that are shipped together.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

St a nd a rd Spe cifi ca t io ns Fluid V9L9P",3!t9 lMin. operating pressurellq ?sr_(9q9q!

Wireless System

No wireless slaves connected (Non-restorable error in wireless communication) 4 W-NS Red/Green Wireless communication connection is under construction. (Pairing) Orange LED is ON.

Stations: 6 Stations, Port Size: C6 (ø6 One-touch Fitting), Thread Type: Rc

Stations: 6 Stations, Port Size: C6 (ø6 One-touch Fitting)

Stations: 6 Stations, Port Size: ø6 One-touch Fitting, Option 1: -, Option 2: -

Stations: 6 Stations, Port Size: ø6 One-touch Fitting, Thread Type: Rc, Option: -

Stations: 12 Stations, Port Size: N9 (ø5/16" One-touch Fitting), S Kit: SKA (IO-Link - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: NS (N + S)

Stations: 11 Stations, Port Size: N9 (ø5/16" One-touch Fitting), S Kit: SKA (IO-Link - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: NS (N + S)

Stations: 9 Stations, Port Size: N9 (ø5/16" One-touch Fitting), S Kit: SKA (IO-Link - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: NS (N + S)

Stations: 10 Stations, Port Size: N9 (ø5/16" One-touch Fitting), S Kit: SKA (IO-Link - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: NS (N + S)

Stations: 4 Stations, Port Size: N3 (ø5/32" One-touch Fitting), S Kit: SD0 (w/o SI Unit), SI Unit Polarity: Positive Common, Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: NS (N + S)

Stations: 8 Stations, Port Size: N3 (ø5/32" One-touch Fitting), S Kit: SD0 (w/o SI Unit), SI Unit Polarity: Positive Common, Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: NS (N + S)

Stations: 12 Stations, Port Size: C8 (ø8 One-touch Fitting), S Kit: SD0 (w/o SI Unit), SI Unit Polarity: Positive Common, Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: NS (N + S)

Stations: 12 Stations, Port Size: N3 (ø5/32" One-touch Fitting), S Kit: SD0 (w/o SI Unit), SI Unit Polarity: Positive Common, Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: NS (N + S)