Stations: 08 Stations, Port Size: w/ø8 One-touch Fitting, SI Unit: Device Net, End Plate: 2 [Power Supply w/M12 Connector (Max. supplied Current 2 A)], SI Unit Common: -COM, I/O Unit Stations: None, Option 1: w/DIN Rail, Rail Length Standard, DIN Rail Length: None, Option 2: P and R Ports Included on Both Sides of the U Side

Stations: 10 Stations, Port Size: w/ø6 One-touch Fitting, SI Unit: Device Net, End Plate: 2 [Power Supply w/M12 Connector (Max. supplied Current 2 A)], SI Unit Common: -COM, I/O Unit Stations: None, Option 1: w/DIN Rail, Rail Length Standard, DIN Rail Length: None, Option 2: P and R Ports Included on Both Sides of the U Side

Stations: 8 Stations, Port Size: ø6 One-touch Fitting, S Kit: PROFINET - 32 Outputs - Connector M12, SI Unit Polarity: Positive Common, Option 1: DIN Rail, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: P & R Ports Included on Both Sides of the U Side

Stations: 08 Stations, Port Size: C8 (w/ø8 One-touch Fitting), SI Unit: Q (Device Net), End Plate: 2 [Power Supply w/M12 Connector (Max. supplied Current 2 A)], SI Unit Common: N (-COM), I/O Unit Stations: None, Option 1: D (w/DIN Rail, Rail Length Standard), DIN Rail Length: None, Option 2: T (P and R Ports Included on Both Sides of the U Side)

Stations: 10 Stations, Port Size: C6 (w/ø6 One-touch Fitting), SI Unit: Q (Device Net), End Plate: 2 [Power Supply w/M12 Connector (Max. supplied Current 2 A)], SI Unit Common: N (-COM), I/O Unit Stations: None, Option 1: D (w/DIN Rail, Rail Length Standard), DIN Rail Length: None, Option 2: T (P and R Ports Included on Both Sides of the U Side)

Digital Flow Switch (Manifold type)

5 V Analogue 1 to 5 V With temp. sensor 2T 1 Analogue 4 to 20 mA Analogue 4 to 20 mA A NPN NPN B PNP PNP C NPN Analogue 1 to 5 V D NPN Analogue 4 to 20 mA None E PNP Analogue 1 to 5 V F PNP Analogue 4 to 20 mA G 1 NPN External input 2 Integrated display type H 1 PNP External input 2 AT NPN (NPN) 3 NPN BT PNP (PNP) 3 PNP CT NPN (Analogue 1 to 5 V) 3 Analogue 1 to 5 V With temp. sensor DT

DOC1003077

Jun T AT BT CT DT ET FT . When dispose the product, contact an industrial waste disposal company for disposal of the product. To minimize the risk, drain the fluid from the product when it is scrapped. If the fluid is left inside, an accident and damage can result during transportation. Jul U AU BU CU DU EU FU .

HEC-OM-Y008

May S yS ZS AS BS CS DS . 3.3.2 Heating Capacity Jun T yT ZT AT BT CT DT . Caution If instructions are not followed there is a possibility of injury or equipment damage. Jul U yU ZU AU BU CU DU .

CG1-SMV13_en

confirmed. 2) When the product is to be removed, confirm that the safety measures as mentioned above are implemented and the power from any appropriate source is cut, and read and understand the specific product precautions of all relevant products carefully. 3) Before machinery/equipment is restarted, take measures to prevent unexpected operation and malfunction. 100 42.2 Jun T TT UT VT DT

MU

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 Bore (mm) 25 32 40 50 63 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 DZ 8 10 10 14 16 CZ 8 10 10 14 16 DY 9 11 13 16 16 CX 9 11 13 16 16 DX 18 22 26 32 32 CT 9.5 11 14 17 20 DT 9.5 11 14 17 20 CR 5.3 6.4 8.4 10.5 13 DR 5.3 6.4 8.4 10.5 13 CL 26 42 54 64 72 DL 26 42 54 64 72 Applicable pin CD-MU02 CD-MU03 CD-MU04

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

MGF Z DA DDH10 (Hole) W1 B DF DH DS DT DR DO DC DU DE DL DX CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 40 50 63 80 100 165 10 57 60 52 40 8 17 9 10 85 15 65 11 35 10 +0.058 0 CY1 183 10 57 70 52 40 8 17 9 10 85 18 65 11 35 12 +0.070 0 196 10 67 85 66 50 10 22 11 12.5 105 25 80 13.5 40 16 +0.070 0 MY1 235 12 93 102 90 65 12 24 13.5 15 130 31.5 100 16.5 60 20 +0.084 0 256 12 93 116 90 65 12 24

A

0 CA1-SO6 63 100 70 15 130 110 150 20 11 22 14 55 73 90 10 107 18+0.070 0 80 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 129 25+0.084 0 CA1-SO8 100 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 135 25+0.084 0 D I M E N S I O N S O F FS E T M O U N T I N G B R A C K E T Applicable bore size A B A+B+90 40 ~ 100 12 60 162 Applicable bore size (mm) Part No DA DL DU DC DX DE DO DR DT

MNB

Bore size (mm) Bore size (mm) B DA DB DL DU DC DX DE DO DR DT DS DH DD A B A+ B+ 90 Z H10 (Aperture) 32 40 50 63 80 100 54 42 32 22 44 14 62 9 6.6 7 33 224 10 15 + 0.058 0 10 32, 40 MB-B03 45 25 160 63 42 32 22 44 14 62 9 6.6 7 33 235 10 15 + 0.058 0 10 75 53 43 30 60 20 81 10.5 9 8 45 271 11.5 18 + 0.070 0 14 50, 63 MB-B05 60 40 190 90 53 43 30 60 20 81 10.5 9 8 45 285 11.5 18 + 0.084 0

CC

GA GB GL KA KB KL M CC CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G 186 64 86 88 53 121.8 98 151.5 35 18 35 104 45 86 45 83 60 3/8 1/2 104 RB 223 92 116 123 61 121.8 98 156.5 35 18 35 109 65 86 45 88 65 1/2 1/2 139 259 92 116 123 61 133.8 134 185.5 40 24 50 140 65 116 66 112 85 1/2 3/4 139 J 319.5 144 180 183 60 133.8 134 181.5 40 24 50 136 93 116 66 108 81 3/4 3/4 202.5 L Dimension (mm) DT

Plate Cylinder

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 Size 25 32 40 50 63 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 8 10 10 14 14 CL 26 42 54 64 72 CR 5.3 6.4 8.4 10.5 13 CT 9.5 11 14 17 20 CX 9 11 13 16 16 CZ 8 10 10 14 16 DL 26 42 54 64 72 DR 5.3 6.4 8.4 10.5 13 DX 18 22 26 32 32 DY 9 11 13 16 16 DZ 8 10 10 14 16 DT 9.5 11 14 17 20 Applicable pin

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 03 (3/8), Output Specification/Temperature Sensor: DT (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature:

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: DT (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: DT (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: DT (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: F (Instantaneous Flow: gal/min, Accumulated Flow: gal, Temperature

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: DT (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: F (Instantaneous Flow: gal/min, Accumulated Flow: gal, Temperature