Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

SY3000-54-2C(-Q) SY3000-54-1C(-Q) SY5000-54-1C(-Q) SY7000-54-1C(-Q) Assembly part no.

2/3 Port Valve

226.3.S. gP(P2+0.1013) l/min (ANR) In sonic region P1+0.1013>1.8941(P2+0.1013) Q=109.6.S.

Made to Order

CA2 series GB Stroke A Stroke B (mm) Q S ZZ GB Bore size 40 50 63 80 100 29 53 167 269 ZZ + Stroke (A + B) S + Stroke (A + B) Q 33 59 179 295 33 61 195 311 41 73 231 373 41 79 251 395 L CBA2 series B port D port C port A port (mm) L Q S ZZ GC Bore size (mm) 40 50 63 80 100 42 12 66 180 282 Q GC Stroke B Stroke A 48 14 74 194 310 48 14 76 210 326 S + Stroke (A + B) 58 16 90 248 390 ZZ + Stroke

Table of Contents

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

ZP3

q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.

Battery-less

5 r t w q y !6 !

CV/MVGQ

Z S RHC T MK(2) CVM3 L 32 100 T 1 L Z Without auto switch RS Q G L 32 100 T 1 L Z H7BW CDVM3 RS H A With auto switch RZQ Built-in magnet Number of auto switches Piping MI W S 2 pcs. 1 pc. n pcs.

CV/MVGQ

A RZQ MI W S CEP1 CE1 CE2 DIN terminal ML2B Component Parts C J G5-S Note Material No. @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 Description No. q w e r t y u i o !

Compact 5-Port Solenoid Valve

Cylinder speed [mm/s] Cylinder speed [mm/s] Refer to pages 9 to 12 for detailed conditions regarding the above cylinder speeds.

REA/REB

RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-2-69 69 Series REBR Construction: 15, 25, 32 !6 !9 i !2 !1 !0 @1 r t e u y @0 q @2 @4 @8 @9 !3 !8 !7 #0 @6 o @3 w @7 !5 @5 !

REA/REB

1 Sine Rodless Cylinder Series REA/REB (Maximum speed: 300 mm/s) (Maximum speed: 600 mm/s) RE A B REC CX CY MQQ M RHC MK(2) RS Q G RS H A RZQ MI W S CEP1 CE1 Series REA CE2 Series REB ML2B C J G5-S CV MVGQ CC RB J Series REA (300 mm/s) Series REB (600 mm/s) DGuide type Model Page Guide type Model Page -X Direct mount type REBR 10-2-63 Basic type REA 10-2-6 20High precision guide type (Single

High Vacuum Angle Valve

Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, Q(L)S shown as above, and the ultimate pressure of the pump itself. In the case of very low pressure, the exhaust characteristics of the actual pump can be the limiting factor.

ZP

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

SQ1000/2000

plate assembly u F kit L kit T kit S kit P (J) kit q !

Modular F.R.L. Unit

Nil A B C D q w e q w q w w q e q w The number inside indicates the combination order counted from the inlet side.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) E (g6) F (h9) A B C D G H K L M N P Q Model CRB2BWU10-S 4 9 29 15 19.5 14 3 3 9 0.5 10 25 24 M3 x 0.5 depth 5 CRB2BWU15-S CRB2BWU15-D CRB2BWU20-S CRB2BWU20-D CRB2BWU30-S CRB2BWU30-D 5 12 34 20 21.2 18 4 3.2 10 0.5 15 25 29 M3 x 0.5 depth 5 6 14 42 29 25 20 4.5 4 10 0.5 20 25 36 M4 x 0.7 depth 7 8 16 50 40 29 22 5 4.5 12 1 30 25 43 M5 x 0.8 depth 10 R Model 90 180 270 100 CRB2BWU10-S

Table of Contents

(mm) E (g6) F (h9) A B C D G H K L M N P Q Model CRB2BWU10-S 4 9 29 15 19.5 14 3 3 9 0.5 10 25 24 M3 x 0.5 depth 5 CRB2BWU15-S CRB2BWU15-D CRB2BWU20-S CRB2BWU20-D CRB2BWU30-S CRB2BWU30-D 5 12 34 20 21.2 18 4 3.2 10 0.5 15 25 29 M3 x 0.5 depth 5 6 14 42 29 25 20 4.5 4 10 0.5 20 25 36 M4 x 0.7 depth 7 8 16 50 40 29 22 5 4.5 12 1 30 25 43 M5 x 0.8 depth 10 R Model 90 180 270 100 CRB2BWU10-S

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) E (g6) F (h9) A B C D G H K L M N P Q Model CRB2BWU10-S 4 9 29 15 19.5 14 3 3 9 0.5 10 25 24 M3 x 0.5 depth 5 CRB2BWU15-S CRB2BWU15-D CRB2BWU20-S CRB2BWU20-D CRB2BWU30-S CRB2BWU30-D 5 12 34 20 21.2 18 4 3.2 10 0.5 15 25 29 M3 x 0.5 depth 5 6 14 42 29 25 20 4.5 4 10 0.5 20 25 36 M4 x 0.7 depth 7 8 16 50 40 29 22 5 4.5 12 1 30 25 43 M5 x 0.8 depth 10 R Model 90 180 270 100 CRB2BWU10-S

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

-20(-Q) 10-SS5YJ5-20P(-Q) Applicable manifold base 10-SS5YJ5-40(-Q) 10-SS5YJ5-41(-Q) 10-SS5YJ5-42(-Q) 10-SS5YJ5-43(-Q) 10-SS5YJ5-41P(-Q) 10-SS5YJ5-43P(-Q) Applicable manifold base Type 10-SS5YJ5-41(-Q) Type 10-SS5YJ5-42(-Q) Type 10-SS5YJ5-43(-Q) Type 10-SS5YJ5-41P(-Q) Type 10-SS5YJ5-43P(-Q) Caution Mounting screw tightening torque M2.5: 0.45 Nm Use caution to the assembly orientation

Modular F.R.L. Units

C B IN OUT OUT IN Q V R F Plate thickness AR10-A: Max. 3.5 T N S M U D J Bracket (Option) AR20(K)-B to AR40(K)-06-B 2 x P1 Panel mounting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S