Electric Actuator/Slider Type

Weight [g] Auto switch model D-M9N(V) D-M9P(V) D-M9B(V) 0.5 8 8 7 Precautions Caution 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.

High Vacuum Angle Valve, XL Series

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

Valve Single Unit

41-05-C6 One-touch fitting (Inch size) Symbol Port size Applicable series One-touch fitting for 5/32" N3 SX3000 One-touch fitting for 1/4" N7 SS5X3-41-05-C6 1 set (Type 41, 5-station manifold base part no.)

Electric Actuator

LEY25 LEY32 M4 x 0.7 M5 x 0.8 M6 x 1.0 1.1 2.2 3.8 7 8 10 Workpiece/Plate mounting 0.05 mm or less Excluding LEYmD Workpiece fixed/Plate tapped style Max. tightening torque (lbfft) M5 x 0.8 M6 x 1.0 M6 x 1.0 Max. screw-in depth (mm) 2.2 3.8 3.8 Model Bolt LEYG16M L LEYG25M L LEYG32M L 8 11 12 Tap (4 locations) 36 Series LEY/LEYG Electric Actuator/ Specific Product Precautions

AC Servo Motor Driver (Pulse input type/Positioning type ）

) (Note 11) (Note 11) PD44 38 I (Note 11) (Note 11) (Note 11) PD46 39 40 41 I DI1 DI1 DI1 PD14 42 I EM2 EM2 EM2 43 I LSP LSP LSP PD18 44 I LSN LSN LSN PD20 45 I DOG DOG SIG PD22 46 DOCOM DOCOM DOCOM 47 DOCOM DOCOM DOCOM 48 O ALM ALM ALM 49 O RD RD RD PD28 50 16 19 16.

KR

(mm) <M5, M6> <M5, M6> A Weight (g) D P M L Model Urethane 2-applicable tubing KAU23-M5 38 9.6 15.5 34.5 9 M5 x 0.8 M6 x 1 2.2 2.2 10 38.5 3.4 2.9 11 1 8 KAU23-M6 KAU23-U01 11 3.2 9.6 KAU04-M5 39.5 M5 x 0.8 M6 x 1 4 2.2 2.2 KAU04-M6 10 11 10.4 16 36 10.4 40 4 1 8 KAU04-U01 11 4.2 4.2 K 1 4 KAU04-U02 42 16 14 KAU06-M5 42.5 M5 x 0.8 M6 x 1 39 2.2 2.2 12 KAU06-M6 43 13 M Connection thread 17

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

11 11 12 13 13 M5 x 0.8 M6 x 0.75 M8 x 1.0 M10 x 1.25 M12 x 1.25 M14 x 1.5 106 111 113 130(139) 150(162) 150(162) 5 6 6 8 11 11 M4 x 0.7 depth 7 24 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 69 69 71 78(87) 90(102) 90(102) 11 11 10 10(12) 12(13) 12(13) 26 31 38 47 58 72 19.5 16.5 11 M5 x 0.8 depth 7.5 29 19.5 20 12 M5 x 0.8 depth 8 35.5 Up to 300(500) 27 26 16 M6 x 1 depth

V

Y P E 41 S I D E P O R T E D M A N I F O L D.

High Vacuum Angle Valve

65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

1.0 0.68 1.0 0.43 0.52 0.36 0.49 0.37 0.35 0.27 0.13 0.21 0.25 0.20 0.26 0.17 0.25 0.74 0.81 0.92 0.80 0.96 1.0 1.0 0.32 0.28 0.24 0.23 0.25 0.25 0.30 0.19 0.20 0.22 0.19 0.24 0.24 0.26 M5 x 0.8 1/8 1/8 1/8 1/8 1/8 Type 10-SS3YJ5-40-M5 Type 10-SS3YJ5-40-01 Base mounted for internal pilot C4 1/8 1/8 M5 x 0.8 1/8 Type 10-SS3YJ5-41-M5 10-SYJ54M Type 10-SS3YJ5-41-01 Type 10-SS3YJ5-41-C4 Type

Vacuum Pad

MB Dimensions: With Adapter ZP2-TB04MB-A3 ZP2-TB06MB-H5 ZP2-TB08MB-H5 ZP2-TB10MB-H5 11 M5 x 0.8 M5 x 0.8 M5 x 0.8 1.5 2.5 1.5 Width across flat 5 (Hexagon) M3 x 0.5 3.5 1.5 3.5 3.5 (13) Width across flat 3 (Hexagon) 2.5 2.5 8 8 Width across flat 1.5 (Hexagon) Width across flat 1.5 (Hexagon) (14) (14) 1.5 (11) 9.5 9 9 8.4 9.6 10.8 4.6 6 4 4 2.5 3 10 4.7 3.3 1.2 11 8 6 4.1 7 9 4.8 ZP2-TB15MB-H5

Vacuum Pad

MB Dimensions: With Adapter ZP2-TB04MB-A3 ZP2-TB06MB-H5 ZP2-TB08MB-H5 ZP2-TB10MB-H5 11 M5 x 0.8 M5 x 0.8 M5 x 0.8 1.5 2.5 1.5 Width across flat 5 (Hexagon) M3 x 0.5 3.5 1.5 3.5 3.5 (13) Width across flat 3 (Hexagon) 2.5 2.5 8 8 Width across flat 1.5 (Hexagon) Width across flat 1.5 (Hexagon) (14) (14) 1.5 (11) 9.5 9 9 8.4 9.6 10.8 4.6 6 4 4 2.5 3 10 4.7 3.3 1.2 11 8 6 4.1 7 9 4.8 ZP2-TB15MB-H5

Vacuum Pad

MB Dimensions: With Adapter ZP2-TB04MB-A3 ZP2-TB06MB-H5 ZP2-TB08MB-H5 ZP2-TB10MB-H5 11 M5 x 0.8 M5 x 0.8 M5 x 0.8 1.5 2.5 1.5 Width across flat 5 (Hexagon) M3 x 0.5 3.5 1.5 3.5 3.5 (13) Width across flat 3 (Hexagon) 2.5 2.5 8 8 Width across flat 1.5 (Hexagon) Width across flat 1.5 (Hexagon) (14) (14) 1.5 (11) 9.5 9 9 8.4 9.6 10.8 4.6 6 4 4 2.5 3 10 4.7 3.3 1.2 11 8 6 4.1 7 9 4.8 ZP2-TB15MB-H5

Vacuum Pad

MB Dimensions: With Adapter ZP2-TB04MB-A3 ZP2-TB06MB-H5 ZP2-TB08MB-H5 ZP2-TB10MB-H5 11 M5 x 0.8 M5 x 0.8 M5 x 0.8 1.5 2.5 1.5 Width across flat 5 (Hexagon) M3 x 0.5 3.5 1.5 3.5 3.5 (13) Width across flat 3 (Hexagon) 2.5 2.5 8 8 Width across flat 1.5 (Hexagon) Width across flat 1.5 (Hexagon) (14) (14) 1.5 (11) 9.5 9 9 8.4 9.6 10.8 4.6 6 4 4 2.5 3 10 4.7 3.3 1.2 11 8 6 4.1 7 9 4.8 ZP2-TB15MB-H5

CL

6 6 8 15 15 15 15 35 40 40 50 178 193 196 221 38 41 41 41 154 169 23 25 28.5 33 30 30 35 35 11 11 11 12 16 17 17 17 11 11 M5 X 0.8 M6 X 0.75 M8 X 1 M10 X 1.25 55 62 62 70 to 200 to 300 to 300 to 300 0.25 Stroke 105.5 Long stroke/Refer to p.3.1-28 and 3.1-29 for mounting dimensions except table below.

Combination Cylinder

5 5.5 5.5 6 10 14 M8 M10 X 1.25 M10 X 1.25 M14 X 1.5 24 29 35.5 44 8 10 12 16 6 8 ZZ With rod boot W Without rod boot ZZ e f h l Bore (mm) Stroke range H1 P PG PH PL PW S TA TB TC WA WW WB WH H 20 25 32 40 M5 M5 Rc(PT)1/8 Rc(PT)1/8 30 30 25 20 141 151 10 10 20 24 24 24 38 41 41 41 154 169 5 6 6 8 33 38 39 44 19.5 24 24 24 11 11 M5 M6 X 0.75 M8 M10 X 1.25 86 96 97 5.5 7 7 9 15 15 15 15 23

VQ5000

2-3/8 Ports R1, R2 (Port A) 17.5 13.5 (Port B) Indicator light SMC 2 4 T 5 1 3 16 16 13 A 40 53 66 53 66 B A VQ5000 2 4 14 5 1 3 12 Manual override 2-6.5 Mounting hole 17.5 13.5 35 53 35 53 3-1/2 Ports P, A, B Bottom ports 16 M5 ground screw SMC (Ports A, B) 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 0 1 G H 2 position

MY1

M5 x 0.8 GB 16.2 20 G 13.5 12.5 NC 14 17 WW 13 14 VV 10 12.5 PP 7.5 11.5 XX 30 32 QQ 9 10 RR 11 14.5 TT 15 18 UU 14 12 SS 2.5 5 Model MY1M16G MY1M20G "P" indicates cylinder supply ports.

CG1

87 102 102 122 122 12 12 12 13 14 14 20 20 11 11 11 12 13 13 35 40 40 50 58 58 71 71 11 11 11 12 13 13 18 22 22 30 35 35 40 40 12 14 18 25 30 32 40 50 15.5 19.5 19.5 27 32 32 37 37 2 2 2 2 2 2 3 3 8 10 12 16 20 20 25 30 13 17 13 19 27 27 32 41 14 16.5 20 26 32 38 50 60 6 8 10 14 18 18 22 26 M5 Depth 7.5 M10 X 1.25 M5 Depth 8 M10 X 1.25 M14 X 1.5 M6 Depth 12 M8 Depth 16 M18 X 1.5 M10

Modular Design with Uniform Body Style

*11 *11 *11 *11 *1 Set the inlet pressure to at least 0.05 MPa higher than the set pressure. *2 Options B, G, H, and M are not assembled and supplied loose at the time of shipment. *3 The assembly consists of a bracket and set nuts (applicable to the AR20(K)-D to AR40(K)-D).