AC Servo Motor Driver

10 10 10 Note.

Electric Actuator/Slider Type

20 30 40 0 5 10 15 20 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 1,000 1,000 1,000 Mey Horizontal m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500

Magnetically Coupled Rodless Cylinder

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

V

M5x0.8 (SY3000 Type 41 Only) 01 Rc(PT)1/8 (SY5000 Type 41 & SY3000 Type 42 Only) 02 RC(PT)1/4 (SY5000 Type 42 Only) C4 One Touch Fittings for 4 (SY3000 Only) C6 One Touch Fittings for 6 (SY3000 & SY5000 Only) C8 One Touch Fittings for 8 (SY5000 Only) C10 One Touch Fittings for 10 (SY7000 Only) Imperial (Inch) M5T 10~32Nom (SY3000 Type41 Only) 01T 1/8NPTF (SY5000 Type 41 & SY3000 Type 42

XL

-6 Port A pressure Pa 1.3 x 10 -9 {1 x 10 -8} at ordinary temperatures, excluding gas permeation Internal External 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s {Torr l/s} VCR 1.3 x 10 -11 {1 x 10 -10} Fitting Swagelok 1.3 x 10 -10 {1 x 10 -9} VCR/SWJ (Swagelok) Piping connection system 3/8B Connection size 1/4B 5 to 40C (41 to 104F) Operating

Valve Single Unit

41-05-C6 One-touch fitting (Inch size) Symbol Port size Applicable series One-touch fitting for 5/32" N3 SX3000 One-touch fitting for 1/4" N7 SS5X3-41-05-C6 1 set (Type 41, 5-station manifold base part no.)

Electric Actuator

[mm] Step motor Servo motor Stroke range (mm) C B D EH EV H J K L M O1 R S T U Size A 10 to 100 166.3 167 92 16 16 34 34.3 M5 x 0.8 18 14 10.5 25.5 M4 x 0.7 7 35 35.5 0.5 10 101 to 300 186.3 187 112 15 to 100 195.4 191.6 115.5 25 M8 x 1.25 M5 x 0.8 20 44 45.5 24 17 14.5 34 8 45 46.5 1.5 13 101 to 400 220.4 216.6 140.5 20 to 100 216.9 128 32 M8 x 1.25 M6 x 1 25 51 56.5 31 22 18.5 40 10 60

High Vacuum Angle Valve, XL Series

In the case of oxygen at room temperature and 10-6Torr, one atomic layer impinges in a few seconds. O After a few seconds at 10-6Torr 41

Valve Single Unit

Purchasing order is available in units of 10 pieces.

Free Mount Cylinder Series CU

depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 Without auto switch With auto switch DBore size (mm) 5 st 38 41 35 41 45 47 S 15 st 48 56 50 56 60 62 Z S Z 15 st 61 72 66 75 83 89 10 st 43 46 40 46 50 52 5 st 51 57 51 60 68 74 5 st 38 41 45 51 55 57 10 st 56 62 56 65 73 79 10 st 43 46 50 56 60 62 15 st 48 56 60 66 70 72 5 st 51 57 61 70 78 84 10 st 56 62 66 75 83 89 15 st 61 72

5 Port Solenoid Valve

, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

Rotary Actuator

(Example) For M5: L1 = 10 Applicable shaft types: S, W, Y Equal dimensions are indicated by the same marker. Shorten the long shaft.

VQ5000

U side entry (LU) 46.8 59.2 9 9 19 R4.5 R4.5 2n-3/8, 1/2 (ports A, B) 2Rc1/8 (external pilot port) n n Manual override 19 Indicator light 6 6 Indicator light 5 5 SMC SMC SMC SMC SMC 2n-3/8, 1/2 (ports A, B) Manual override 4 4 L1 P=41 58.5 L2 L1 P=41 58.5 3 3 2 2 P=41 68.5 34.5 48 68.5 P=41 1 1 Stations Stations 34.5 48 (approx. 261.5 with AMC810-14 installed) Approx. 216 with AMC610-10 installed

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

U side entry (LU) 46.8 59.2 9 9 19 R4.5 R4.5 2n-3/8, 1/2 (ports A, B) 2Rc1/8 (external pilot port) n n Manual override 19 Indicator light 6 6 Indicator light 5 5 SMC SMC SMC SMC SMC 2n-3/8, 1/2 (ports A, B) Manual override 4 4 L1 P=41 58.5 L2 L1 P=41 58.5 3 3 2 2 P=41 68.5 34.5 48 68.5 P=41 1 1 Stations Stations 34.5 48 (approx. 261.5 with AMC810-14 installed) Approx. 216 with AMC610-10 installed

Vacuum Pad

Dimensions: With Adapter ZP2-TB02EU-A5 ZP2-TB04EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 2.5 3.5 (10) (10) 4 4 1.5 1.2 0.5 0.5 4 2 4.8 2.6 ZP2-TB06EU-A5 ZP2-T08EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 3.5 2.5 (10) (10) 4 4 1.5 6 6.7 1.5 0.5 0.5 8 9 ZP2-T15EU-A5 Width across flat 7 (Hexagon

Vacuum Pad

Dimensions: With Adapter ZP2-TB02EU-A5 ZP2-TB04EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 2.5 3.5 (10) (10) 4 4 1.5 1.2 0.5 0.5 4 2 4.8 2.6 ZP2-TB06EU-A5 ZP2-T08EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 3.5 2.5 (10) (10) 4 4 1.5 6 6.7 1.5 0.5 0.5 8 9 ZP2-T15EU-A5 Width across flat 7 (Hexagon

Vacuum Pad

Dimensions: With Adapter ZP2-TB02EU-A5 ZP2-TB04EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 2.5 3.5 (10) (10) 4 4 1.5 1.2 0.5 0.5 4 2 4.8 2.6 ZP2-TB06EU-A5 ZP2-T08EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 3.5 2.5 (10) (10) 4 4 1.5 6 6.7 1.5 0.5 0.5 8 9 ZP2-T15EU-A5 Width across flat 7 (Hexagon

Vacuum Pad

Dimensions: With Adapter ZP2-TB02EU-A5 ZP2-TB04EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 2.5 3.5 (10) (10) 4 4 1.5 1.2 0.5 0.5 4 2 4.8 2.6 ZP2-TB06EU-A5 ZP2-T08EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 3.5 2.5 (10) (10) 4 4 1.5 6 6.7 1.5 0.5 0.5 8 9 ZP2-T15EU-A5 Width across flat 7 (Hexagon

A

36 98 30 24 ANA1-06 3/4 90 110 111 46 36 ANA1-10 1 160 180 132 50 41 ANA1-12 11/4 280 544 200 74 60 ANA1-14 11/2 450 612 230 74 60 ANA1-20 2 610 873 271 86 70 ANB1-01 1/8 15 10 51 22 ANB1-02 1/4 35 22 81 25 18 ANB1-03 3/8 60 35 93 30 21 ANB1-04 1/2 90 94 107 46 24 ANB1-06 3/4 160 175 133 50 41 ANB1-10 1 280 462 190 74 41 ANB1-12 11/4 450 612 230 74 60 ANB1-14 11/2 610 871 271 86 70 D I M

High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.