Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: 41 (Common SUP, Common EXH, Side Ported), Stations: 3 Stations, Port Size: M5 (M5X0.8)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: 41 (Common SUP, Common EXH, Side Ported), Stations: 4 Stations, Port Size: M5 (M5X0.8)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: 41 (Common SUP, Common EXH, Side Ported), Stations: 11 Stations, Port Size: M5 (M5X0.8)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: 41 (Common SUP, Common EXH, Side Ported), Stations: 8 Stations, Port Size: M5 (M5X0.8)

Rotary Actuator

(Example) For M5: L1 = 10 Applicable shaft types: S, W, Y Equal dimensions are indicated by the same marker. Shorten the long shaft.

VQ5000

U side entry (LU) 46.8 59.2 9 9 19 R4.5 R4.5 2n-3/8, 1/2 (ports A, B) 2Rc1/8 (external pilot port) n n Manual override 19 Indicator light 6 6 Indicator light 5 5 SMC SMC SMC SMC SMC 2n-3/8, 1/2 (ports A, B) Manual override 4 4 L1 P=41 58.5 L2 L1 P=41 58.5 3 3 2 2 P=41 68.5 34.5 48 68.5 P=41 1 1 Stations Stations 34.5 48 (approx. 261.5 with AMC810-14 installed) Approx. 216 with AMC610-10 installed

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

U side entry (LU) 46.8 59.2 9 9 19 R4.5 R4.5 2n-3/8, 1/2 (ports A, B) 2Rc1/8 (external pilot port) n n Manual override 19 Indicator light 6 6 Indicator light 5 5 SMC SMC SMC SMC SMC 2n-3/8, 1/2 (ports A, B) Manual override 4 4 L1 P=41 58.5 L2 L1 P=41 58.5 3 3 2 2 P=41 68.5 34.5 48 68.5 P=41 1 1 Stations Stations 34.5 48 (approx. 261.5 with AMC810-14 installed) Approx. 216 with AMC610-10 installed

A

36 98 30 24 ANA1-06 3/4 90 110 111 46 36 ANA1-10 1 160 180 132 50 41 ANA1-12 11/4 280 544 200 74 60 ANA1-14 11/2 450 612 230 74 60 ANA1-20 2 610 873 271 86 70 ANB1-01 1/8 15 10 51 22 ANB1-02 1/4 35 22 81 25 18 ANB1-03 3/8 60 35 93 30 21 ANB1-04 1/2 90 94 107 46 24 ANB1-06 3/4 160 175 133 50 41 ANB1-10 1 280 462 190 74 41 ANB1-12 11/4 450 612 230 74 60 ANB1-14 11/2 610 871 271 86 70 D I M

High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

o

M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

o

M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

16) 12 14 18 25 30 32 40 50 24 M5 x 0.8 69(77) 20 25 32 40 50 63 80 100 23 Up to 200 201 to 350 C76 30 19.5 16.5 10(12) 40 31 M5 x 0.8 depth 7.5 5.5 M10 x 1.25 11 M6 x 0.75 111(119) 16 15(16) 29 M5 x 0.8 69(77) 25 Up to 300 301 to 400 25 19.5 20 10(12) 40 38 M5 x 0.8 depth 8 5.5 M10 x 1.25 10(11) M8 x 1.0 113(121) 16 15(16) 35.5 Rc 1/8 71(79) 28.5 Up to 300 301 to 450 20 C85 27 26 10(13)

MY1

side M4 x 0.7 depth 7 4-M3 x 0.5 depth 5 30 50 5.9 5.9 25 26 22 28 17 100 + Stroke 5 Floating bracket mounting thread (2-M3 x 0.5 thread depth 5) 2-5 depth of counter bore 2 25 24 3.5 1 2-M5 x 0.8 (Port) 1 3 3 2.2 6.8 1.7 7.3 SMC SMC 27 20.2 19.5 10 10 10 10 15 15 8.5 12 12 8.5 55 110 + Stroke 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) 10 Mechanically Jointed

Series KP/KPQ/KPG

-02 KPQT06-M5 KPQT06-01 KPQT06-02 KPQT08-01 KPQT08-02 KPQT10-02 KPQT10-03 KPQT12-03 KPQT12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 38 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 4 4 4 D1 18 10.4 20.7 10 D1 8 A L2 6 10 10 19.5 12.8 22.8 D2 H Connection threads 10 (R) 8 26 18 15.2 21.5 26.3 12

Series KP/KPQ/KPG

-02 KPQT06-M5 KPQT06-01 KPQT06-02 KPQT08-01 KPQT08-02 KPQT10-02 KPQT10-03 KPQT12-03 KPQT12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 38 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 4 4 4 D1 18 10.4 20.7 10 D1 8 A L2 6 10 10 19.5 12.8 22.8 D2 H Connection threads 10 (R) 8 26 18 15.2 21.5 26.3 12

VZ100/300/500

Porting specifications Location Direction 1(P), 3(R) port 2(A) port Valve Top M5 x 0.8 Rc 1 8 Port size M5 x 0.8 Note 1) If there are more than 10 stations, exhaust from both sides of manifold.

Modular Design with Uniform Body Style

70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

CL

10 10 10 19 20 21 23 54 62 62 67 3.5 4 4 4 5.5 9 9 11 4 7 7 8 4 7 7 8 26 31 38 47 12 14 18 8 M5 X 0.8 depth7.5 10 12 16 M5 X 0.8 depth8 25 10 14 M6 X 1 depth12 Without rod boot With rod boot Bore (mm) H1 NA P PG PH PL PW S TA TB TC H ZZ e f h l ZZ Stroke range 20 25 32 40 24 29 35.5 44 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/8 M5 X 0.8 M6 X 0.75 M8 X 1 M10 X 1.25 5 6 6 8 11 11 10 10 to 200

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M4: L2 = 8 mm Applicable shaft types: X, Z Q1 = M C1 = C L2 = L2 = D1 = L1 + (3 x P) L1 = C1 Q2 = M Q2 = M Z axis X axis L1 = X = (mm) (mm) (mm) D1 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 L1 max Size 30 50 63 80 100 X 3 to 25 3.5 to 36 3.5 to 41 4 to 50 5 to 60 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q1 M3 M4, M5, M6,