Vacuum Inlet Dimensions ZP3-T08UM;J -B5 ZP3-T08UM;K -B5 Barb fitting One-touch fitting M5 x 0.8 7 ZP3-T04UM; -02 ZP3-T06UM; -02 ZP3-T08UM; -02 ZP3-T04UM; -U2 ZP3-T06UM; -U2 ZP3-T08UM; -U2 Width across flat 6 Width across flat 10 0.8 4 0.9 Width across flat 7 2 2 D (8.7) (13.9) A B (6.5) M8 x 0.75 Width across flat 7 Width across flat 7 6 M-5AU-2 [Weight: 1.5 g] 2 KJH02-M5 [Weight: 1.9 g]
Vacuum Inlet Dimensions ZP3-T08UM;J -B5 ZP3-T08UM;K -B5 Barb fitting One-touch fitting M5 x 0.8 7 ZP3-T04UM; -02 ZP3-T06UM; -02 ZP3-T08UM; -02 ZP3-T04UM; -U2 ZP3-T06UM; -U2 ZP3-T08UM; -U2 Width across flat 6 Width across flat 10 0.8 4 0.9 Width across flat 7 2 2 D (8.7) (13.9) A B (6.5) M8 x 0.75 Width across flat 7 Width across flat 7 6 M-5AU-2 [Weight: 1.5 g] 2 KJH02-M5 [Weight: 1.9 g]
3(R) port 24 18 67 2 x 6.2 (For mounting) NO 2A NC 53 66 12 3R NC 1P 1/8 12(PA) port 11.5 16 115.1 24 96.5 95.5 32.5 M5 x 0.8 (Breathing hole) 16 X 40 80 3/8, 1/2 1(P) port 1568 3 Port/Air Operated Valve Manifold Common Exhaust Type 41 / Individual Exhaust Type 42 VPA300/500/700 Series SYA How to Order Manifold SYJA VZA VV3PA 3 1 41 04 02 Type 41/Common exhaust VFA VFRA Series 3 5 7 Thread
T NPTF F G In the case of alone Sub-plate Port size Terminal block 1/4 02 02 PW VQ2000 Dimensions 4 89.4 Sub-plate Single Unit (43.8) 2 x 4.5 (Mounting hole) 10.5 (A port) 10.5 (B port) Manual override Indicator light VQ210 0 1-1-02 37 5 45 121 <127.9> 22.4 15.5 77.2 Clamp screw Manifold Optional Parts M5 x 0.8 External pilot port 72.7 <76.7> 70.7 3 R2 R1 5 Safety Instructions Specific Product
) (M5) Effective area mm2 Model L D M TPH TPS A Connection thread R M D Applicable tubing Applicable tubing O.D. mm H (width across flats) Weight g KPGH04-M5 KPGH04-01 KPGH04-02 KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04
Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 6, 8 3.2, 4 8, 10 3.2, 4, 6 Metric size 6 4 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" Inch size 5/32" 3/16" 7 12 Air flow (l/min (ANR)) 38 Controlled flow 0.1 0.2 Effective area (mm2) 0.6 230 180 460 100 Flow rate (l/min (ANR)) 260 390
size (mm) Part no. l J P H A B C D d K L E 32 40 50 63 80 100 40 50 63 80 100 YH2-03B YH2-04B YH2-05B YH2-06B YH2-08B YH2-10B YH2-03B YH2-05C YH2-06C YH2-06B YH2-10C M5 x 0.8 M6 x 1.0 25 76 60 41 32 +0.07 0 16 12.5 20 M16 x 1.5 16 M5 x 0.8 M6 x 1.0 25 76 60 41 32 +0.07 0 16 12.5 20 M20 x 1.5 16 l +0.084 0 M5 x 0.8 M6 x 1.0 31.5 90 70 50 40 20 16 20 M24 x 1.5 20 C B-series +0.1 0 M6 x 1.0
Outlet pressure MPa Existing model New Conditions AR20-02-A AR20-02-A AR20-02 New New 0.3 Inlet pressure: 0.5 MPa Outlet pressure: 0.3 MPa Flow rate: 500 L/min (ANR) New New AR20-02-A AR20-02 500 Flow rate L/min (ANR) Replacement in hand!
2 x 6.5 Mounting hole 35 53 Manual override 53 35 Bottom ported drawing 1/2" 1(P), 4(A), 2(B) port M5 x 0.8 ground screw SMC 4(A), 2(B) port 98 50 41 37 31.5 18 G1/2 Electrical entry PE X 26.5 P R1 R2 18.4 16 1/8" PE. port 41 41 27.5 27.5 1/8" External pilot port 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 3-position double check: VQC560 0 1 2-position double: VQC520 0 1 3-position closed center
(mm) Connection threads Model Connection threads Model M5 x 0.8 KGH04-M5 -01 -02 KGH06-M5 -01 -02 -03 KGH08-01 -02 -03 KGH10-01 -02 -03 -04 KGH12-02 -03 -04 KGH16-03 -04 M5 x 0.8 KGL04-M5 -01 -02 KGL06-M5 -01 -02 -03 KGL08-01 -02 -03 KGL10-01 -02 -03 -04 KGL12-02 -03 -04 KGL16-03 -04 4 4 R 1/8 R 1/4 R 1/8 R 1/4 M5 x 0.8 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2
Port size Symbol Size 01 1/8" 05 3/16" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Symbol Size M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 00*1 Same diameter tubing 1 Only for Bulkhead union. Spare Parts Use the part number below to order the gasket for M5 thread.
(mm) Connection threads Model Connection threads Model M5 x 0.8 KGH04-M5 -01 -02 KGH06-M5 -01 -02 -03 KGH08-01 -02 -03 KGH10-01 -02 -03 -04 KGH12-02 -03 -04 KGH16-03 -04 M5 x 0.8 KGL04-M5 -01 -02 KGL06-M5 -01 -02 -03 KGL08-01 -02 -03 KGL10-01 -02 -03 -04 KGL12-02 -03 -04 KGL16-03 -04 4 4 R 1/8 R 1/4 R 1/8 R 1/4 M5 x 0.8 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2
side: Orange B side: Green (External pilot port) 56 17.9 (Light/Surge voltage suppressor) M5 x 0.8 (L=300 to 5000) 121.1 115.5 M12 waterproof connector 51 22 9.5 18 18 Rc 1/4 28 (Piping port) 445 Series SV Dimensions: Series SV3000 2 position single/double [M12 waterproof connector type] SV300(R)-W-02, 03 21 22.5 13.5 86.2 M5 x 0.8 71.9 (External pilot port) 10.4 M5 x 0.8 2 x 4.3 21 21.5
Note 2) Except VQZ1000 VQD Cylinder port N1 N3 N7 N9 N11 M5 02 Symbol 1/8" 5/32" 1/4" 5/16" 3/8" 1/4 thread M5 thread Applicable tubing O.D.
M8 x 1.25 11 11 11 12 13 13 11 M5 x 0.8 106(114) 16 15(16) 30 30 25 20 20 20 20 20 20 25 32 40 50 63 80 100 23 Up to 200 201 to 350 69(77) M5 x 0.8 29 19.5 16.5 10(12) 40 31 M5 x 0.8 depth 7.5 5.5 M10 x 1.25 11 M6 x 0.75 111(119) 16 15(16) 25 Up to 300 301 to 400 71(79) Rc 1/8 35.5 19.5 20 10(12) 40 38 M5 x 0.8 depth 8 5.5 M10 x 1.25 10(11) M8 x 1.0 113(121) 16 15(16) 28.5 Up to 300 301
Port size ISA2 R 1/8 (With M5 female thread) R 1/4 (With M5 female thread) Rc 1/8 NPT 1/8 (With M5 female thread) NPT 1/4 (With M5 female thread) URJ 1/4 TSJ 1/4 01 02 C01 N01 N02 A2 B2 IS Option/Part No. Output specifications Part no. Note Connector for PSE200 Description ZS-26-E-4 ZSM Voltage output type 1 to 5 V Current output type 4 to 20 mA Nil 28 1 pc. ZS-28-C 1 pc.
D 02 1.2 M4 x 0.7 4 04 1.6 06 08 2.5 28.4 N S U F GN GS B4 M5 x 0.8 19.5 04 06 ZP R U 02 1.2 M5 x 0.8 5 04 1.6 06 08 2.5 B5 A2 Dimensions Per Vacuum Inlet Construction p. 115 Model Adapter Assembly p. 122 D E F Fitting part min. hole size Vacuum inlet direction q Pad dia.
-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.
Applicable cylinder bore size (mm) Metric sizes Elbow type Universal type Port size Inch sizes 3.2 4 6 8 10 12 1/8 5/32 3/16 1/4 5/16 3/8 1/2 AS131F-M5 AS121F-M5 6, 10, 16, 20 M5 x 0.8 AS231F-01 AS221F-01 20, 25, 32 R 1/8 AS231F-02 AS221F-02 R 1/4 20, 25, 32, 40 AS331F-02 AS321F-02 R 1/4 40, 50, 63 AS331F-03 AS321F-03 R 3/8 40, 50, 63 AS431F-04 AS421F-04 R 1/2 63, 80, 100 AS121F-U10/32 AS131F-U10