MHZ

20 25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

1

82 100 108 139 153 8 8 10 10 12 12 16 16 58 64 83 93 112 120 148 162 7.5 8 8.5 9 9 10 11 13.5 29 33 37 37.5 37.5 44 44 49 6 6 8 8 8 8 9 9 11 11 10.5 11.5 12.5 14 14 16.5 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 -X M5 x 0.8 M5 x 0.8 2-Rc 3/8 20M6 x 1.0 GC GA GB FA FB 6H7 depth XL 32 40 50 63 M8 x 1.25 PB 16 2-Rc 3/

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

F G N NPT Valve stations T NPTF Note Stations Symbol 04 4 stations A, B port size Double wiring Note 1) M5 M5 x 0.8 08 8 stations C4 4 One-touch fitting 04 4 stations N3 5/32 One-touch fitting Specified layout Note 2) (Up to 16 solenoids) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 16 SI unit part no. 16 stations Includes

AC

AL Model Port size A B C D M N P R B B E F G H J K L M5 X 0.8 38.5 50 70.5 70.5 88 88 108 108 108 16 23 26 26 33 36 40 40 40 105 147.5 4.5 5.5 7 7 9 9 12 12 12 50 80 80 80 105 105 105 105 105 91 140 181 181 238 253 300 310 315 5 5 7 7 7 7 10 10 10 7.5 8.5 11 11 13 13 16 16 16 25.5 38 38 38 41 40.5 48 48 48 84.5 124.5 153 153 188 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25

5

) 1 80 85 90 95 100 D-M9lA n 80 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 90 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 95 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 100 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface) 1 55 60 65 70 75 D-M9lAV n 55 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 60 + 30 (n 4) 2 (n = 4, 8, 12, 16

SX

Port size M5 x 0.8 SX3000 SX3000-39-2A SX5000 SX5000-39-16 A SX7000 SX7000-39-16 A Series Assembly part no. Port size M5 x 0.8 SX3000 SX3000-38-2A SX5000 SX5000-38-16 A SX7000 SX7000-38-16 A Bolt and gasket part no. 1 8 1 4 Note) The SUP port may be either on the lead wire side or on the end plate side.

SYJ3000/5000/7000

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

CJ2

NTJ-010A 10 16 M4 x 0.7 7 8 3.2 4 8.1 9.2 NTJ-015A M5 x 0.8 Bore size (mm) 10 16 NA MM H GB GA ZZ Z D U CZ S CX C A CD (cd) NB R B M4 x 0.7 28 18 8 93 82 4 8 12 46 3.2 14 15 5 12 3.3 12.5 22.5 M5 x 0.8 28 23 8 99 85 5 10 18.3 47 6.5 20 15 8 18.3 5 12.5 27.5 T-bracket Dimensions TY TX TW TV TH TC Bore size (mm) 10 16 12 32 22 40 29 4.5 16 38 28 48 35 5.5 With Air Cushion/Dimensions other than

Table of Contents

M5 (18) M5 (10) 5.5 (16.5) 0 0.043 0.005 0.014 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11-2-15 15 Series CRB2 Dimensions: 40 Single vane type/Double vane type CRB2BW40-S/D M5 x 0.8 depth 10 3-M5 x 0.8 depth 10 56 3-M5 x 0.8 depth 16 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

C85

30 4.5 22 26 11 12.8 25 3.2 16 12.8 4.5 23.8 35 3.2 5 10 13 38 26 4 20 6 40 30 4.5 22 26 11 12.8 25 3.2 16 12.8 4.5 23.8 35 3.2 5 12 18 58 38 6 25 8 52 40 5.5 30 33 14 18 32 4 20 18 5.5 32 42 4 6 16 18 58 38 6 25 8 52 40 5.5 30 33 14 18 32 4 20 18 5.5 32 42 4 6 20 20 66 46 6 32 8 66 50 6.6 40 42 17 19 40 5 25 19 6.6 36 54 5 8 25 24 66 46 6 32 8 66 50 6.6 40 42 17 23 40 5 25 23 6.6 40 54

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014 0 0.043 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11-2-15 15 Series CRB2 Dimensions: 40 Single vane type/Double vane type CRB2BW40-S/D M5 x 0.8 depth 10 3-M5 x 0.8 depth 10 56 3-M5 x 0.8 depth 16 25 25 M5 x 0.8 depth 16 5.5 depth A port B port 11.5 10 g6 -0.005 -0.014 2 20 0 -0.030 4 6.5 10 30 45 Body B (mm) (90) h Keyway

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

M5 (18) M5 (10) 5.5 (16.5) 0 0.043 0.005 0.014 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11-2-15 15 Series CRB2 Dimensions: 40 Single vane type/Double vane type CRB2BW40-S/D M5 x 0.8 depth 10 3-M5 x 0.8 depth 10 56 3-M5 x 0.8 depth 16 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

A

84 66 30 36 21 16 112 23 19 224 55.5 56.5 62 M14 x 2 28 M14 x 2 3/8 40 Bore size Q R S T TA TB V W X YY YL Z 12 14 48 22 56 2 5 40 5 50 M4 x 0.7 7 12 16 16 52 25 62 2.5 5.5 42 7 54 M5 x 0.8 8 13 20 18 60 30 72 2 4 52 10 64 M5 x 0.8 8 13 25 26 70 38 86 2 2 62 10 76 M6 x 1.0 9 14 D I M E N S I O N S MGQ A C T U AT O R 32 30 96 48 112 2 1 80 5 100 M8 x 1.25 11 16 40 30 106 48 122 2 1 90 10 110

CQS

Model C D 30 35 30 35 35 40 40 45 Mounting bolt M3 x 30l x 35l M3 x 30l x 35l M5 x 35l x 40l M5 x 40l 45l CDQSB12-5S -10S CDQSB16-5S -10S CDQSB20-5S -10S CDQSB25-5S -10S Example) Bolt M3 x 30l 4 pcs. 6.5 Single acting, Spring return Single acting, Spring extend 6.5 Mounting bolt 6.5 Mounting bolt 8.5 Single Acting, Spring Extend D 30 35 30 35 35 40 40 45 Model C Mounting bolt M3 x 30l x 35l

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

16) 12 14 18 25 30 32 40 50 24 M5 x 0.8 69(77) 20 25 32 40 50 63 80 100 23 Up to 200 201 to 350 C76 30 19.5 16.5 10(12) 40 31 M5 x 0.8 depth 7.5 5.5 M10 x 1.25 11 M6 x 0.75 111(119) 16 15(16) 29 M5 x 0.8 69(77) 25 Up to 300 301 to 400 25 19.5 20 10(12) 40 38 M5 x 0.8 depth 8 5.5 M10 x 1.25 10(11) M8 x 1.0 113(121) 16 15(16) 35.5 Rc 1/8 71(79) 28.5 Up to 300 301 to 450 20 C85 27 26 10(13)

Micro Mechanical Valve Series VM1000

5, Width across flats 17 OFF ON R port (3 port only) (72.7) 42.7 30 24 16 Symbol 2 port (A) 2 12 10 1 (P) 3 port (A) 2 17 44 25.4 10.5 12 10 2 x 4.6 mounting hole 1 (P) 3 (R) Panel mounting hole 8.5 14 2 x M5 x 0.8 depth 4 * 0.5 MPa supply F .O.F .* 13 N T.T. 60 Max. 6 Push button (Mushroom) VM122-M5-30 (R, B, G, Y) A VM132-M5-30 (R, B, G, Y) A 40 T.T. (81.6) (52.1) 29.5 22.1 3 30 10.5 1.5

MG

(Except D-P5DW) Cylinder stroke (mm) Bore size Refer to Standard Stroke on page 8-19-9. 40 50 63 80 100 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 12 mm 16 mm 20 mm 25 mm 32 mm Thread type M5 x 0.8 Rc NPT G N TF Nil For bore sizes 12 and 16, M5 x 0.8 is only available. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Hydraulic

x 1.5 16 M5 x 0.8 M6 x 1.0 25 76 60 41 32 +0.07 0 16 12.5 20 M20 x 1.5 16 l +0.084 0 M5 x 0.8 M6 x 1.0 31.5 90 70 50 40 20 16 20 M24 x 1.5 20 C B-series +0.1 0 M6 x 1.0 M8 x 1.25 40 145 115 75 60 E 30 20 24 M30 x 1.5 31.5 dH10 L L +0.1 0 M6 x 1.0 M8 x 1.25 40 145 115 75 60 30 20 24 M39 x 1.5 31.5 +0.1 0 M8 x 1.25 M10 x 1.5 50 185 145 95 80 40 25 26 M48 x 1.5 40 H +0.4 +0.1 D +0.07 0 M5 x

Electric Actuators

Motor side 16 pulse End side 1 A Parameter no.

MXS

ZZ 87 87 87 97 112 162 210 260 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 KA NA 2 2 2 2 2 4 4 4 G 16 16 16 16 21 26 39 19 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 GA 16 16 16 16 51 61 109 159 MXS16-10 MXS16-20 MXS16-30 MXS16-40 MXS16-50 MXS16