-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35

-NORYL - $0.50 F-2815-031-B80-NORYL - $1.35 F-2815-031-B85-NORYL - $1.35 .004 Purple F-2815-041-NORYL - $0.50 F-2815-041-B80-NORYL - $1.35 F-2815-041-B85-NORYL - $1.35 .005 White F-2815-050-NORYL - $0.50 F-2815-050-B80-NORYL - $1.35 F-2815-050-B85-NORYL - $1.35

EXxx-OMN0029CN

BOOL () BOOL 0=OFF(Clear) 1=ON(Force ON) 84h SI / () 85h UINT / 0=(Hold) 1= (Clear Force ON) SI / / 86h BOOL () BOOL 0=OFF(Clear) 1=ON(Force ON) 87h SI / Get/Set 01h0Ah 64h83h () 1 2 88h UINT / 0=None 1=2 value average 2=4 value average 3=8 value average 89h / USINT 0=-10+10 V () 1=-5+5 V () 2-20..+20 mA () 3=010 V 4=05 V 5=15 V 6=020 mA 7=420 mA 8Ah // USINT 101h0Ah 09 264h83h 031

Micro Mechanical Valve Series VM1000

Model Applicable tubing Number of ports Piping Weight (g) Note T0425 TU0425/T0403 3 port 2 port Actuator VM1000-4N-00 VM1100-4N-00 VM1010-4N-00 VM1110-4N-00 VM1000-4N-01 VM1100-4N-01 VM1010-4N-01 VM1110-4N-01 VM1000-4N-02 VM1100-4N-02 VM1010-4N-02 VM1110-4N-02 VM1000-4N-08 VM1100-4N-08 VM1010-4N-08 VM1110-4N-08 VM1000-4N-32R VM1100-4N-32R VM1010-4N-32R VM1110-4N-32R VM1000-4N-32B VM1100-4N

Table of Contents

-01-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

VM

Application 2 port 3 port 2 port 3 port VM120-01-00 VM121-01-00 VM130-01-00 VM131-01-00 VM122-M5-00 VM123-M5-00 VM132-M5-00 VM133-M5-00 Basic Mechanical operation Manual operation Roller lever VM121-01-01 VM121-01-01S VM131-01-01 VM131-01-01S VM123-M5-01 VM123-M5-01S VM133-M5-01 VM133-M5-01S Polyacetal roller Hard steel roller VM121-01-02 VM121-01-02S VM131-01-02 VM131-01-02S VM123-M5-

1

VM230U-02-08A VM-08A 110 g Red VM220-02-30RA VM230-02-30RA VM220U-02-30RA VM230U-02-30RA VM-30AR 58 g Black VM220-02-30BA VM230-02-30BA VM220U-02-30BA VM230U-02-30BA VM-30AB Green VM220-02-30GA VM230-02-30GA VM220U-02-30GA VM230U-02-30GA VM-30AG Yellow VM220-02-30YA VM230-02-30YA VM220U-02-30YA VM230U-02-30YA VM-30AY Push button (Mushroom) Red VM220-02-32RA VM230-02-32RA VM220U-02-32RA VM230U

VM

Application 2 port 3 port 2 port 3 port VM120-01-00 VM121-01-00 VM130-01-00 VM131-01-00 VM122-M5-00 VM123-M5-00 VM132-M5-00 VM133-M5-00 Basic Mechanical operation Manual operation Roller lever VM121-01-01 VM121-01-01S VM131-01-01 VM131-01-01S VM123-M5-01 VM123-M5-01S VM133-M5-01 VM133-M5-01S Polyacetal roller Hard steel roller VM121-01-02 VM121-01-02S VM131-01-02 VM131-01-02S VM123-M5-

2

Thread type Nil R N NPT G G Port size 01 1/8 02 1/4 03 3/8 04 1/2 INDEX 474 Series AS-FG Needle Valve/Flow-rate Characteristics AS1201FG-M5, AS1211FG-M5 AS1301FG-M5, AS1311FG-M5 AS2201FG-01, AS2211FG-01 AS2301FG-01, AS2311FG-01 AS2201FG-02, AS2211FG-02 AS2301FG-02, AS2311FG-02 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 01, 23, 03, 04, 06, 07 01, 23

VM

Roller Lever/VM220-02-01, VM230-02-01 VM220-02-01S, VM230-02-01S JIS Symbol 2 port 3 port 24N F.O.F. 0.5MPa supply 6.5mm P.T. 4.5mm O.T. 11mm T.T. One Way Roller Lever/VM220-02-02, VM230-02-02 VM220-02-02S, VM230-02-02S JIS Symbol 2 port 3 port 22N F.O.F. 0.5MPa supply 7mm P.T. 5mm O.T. 12mm T.T.