A

5.5 20 25 39 28 3.2 35.8 42 16 28 47.6 35 93 114 25 ~300 19.5 22 45.5 10 14 2 12 12 31 5 8 M10x1.25 29 18 69 11 10 -0.025 -0.047 10 5.5 25 30 43 33 3.2 39.8 42 20 28 53 40 98 119 32 ~300 19.5 22 54 12 18 2 12 11 38 5.5 10 M10x1.25 36 18 71 10 12 -0.032 -0.059 10 6.6 32 35 54.5 40 4.5 49.4 48 22 28 67.7 40 101 125 40 ~300 27 30 63.5 16 25 2 13 12 47 6 14 M14x1.5 44 18 78 10 14 -0.032 -0.059

CV/MVGQ

26 0 0.033 32 0 0.039 10 10 45 30 14 9 22 13 5.5 9 19.5 17 6 63.5 33.5 M10 x 1.25 15 30 M26 x 1.5 12 10 45 30 14 9 22 13 5.5 9 19.5 17 6 68 37.5 M10 x 1.25 15 34.5 M26 x 1.5 14 15 50 39 18 10 24 16 7 11 22 8 76 46.5 M14 x 1.5 21.5 42.5 M32 x 2 21 Dimensions by Stroke Single Acting/Spring Extend Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) HX Q QY Bore size (mm

CV/MVGQ

10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/CVS1K 40, 50 63, 80 100 J Standard 10-15-67 Double acting DNonrotating rod 40, 50 63 10-15-78 -X Series MVGQ 2012, 16 20, 25 32, 40 50, 63 80, 100 Data 10-16-1 Double acting 10-15-1 2 Series CV Valve Mounted Cylinder

Made to Order

10 12 12 16 16 26 30 36 42 48 54 64 78 19 19 30 30 38 38 60 60 5 5 6 6 10 10 12 12 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 18 22 24 30 34 40 46 58 7 7 9 9 9 9 10 10 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 13 15 18 21 24 27 32 39 29 33 37 37.5 37.5 44 44 49 8 10 12 16 20 20 25 25 7.5 8 8.5 9 9 10 11 13.5 M4 M4 M5 M5 M6 M6 M8 M10 90 42 46 53 53.5 59.5 66 72 77 6 8 10 12 16

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Series D 10-SY3000 SY3000-52-6A A 10-SY5000 SY5000-52-4A L Dimensions 10-SY7000 SY7000-70-2A EXH block disc Model A L D 16 18 20.5 22 24 16 18 20.5 22 Applicable fitting size d 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 10-KQP-04 10-KQP-06 10-KQP-08 10-KQP-10 10-KQP-12 10-KQP-03 10-KQP-07 10-KQP-09 10-KQP-11 6 8 10 12 14 6 8.5 10 11.5 32 35 39 43 45.5 32 35 39 43 By installing an EXH block disk in

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

st 10 st 10 st 10 st 5 st 5 st 5st 5 st 5 st M4 x 0.7 6 6 9 10 12 5 60.5 27 54.5 13.5 24 50.5 22 44.5 8.5 19 4 7 14 5 10 M4 x 0.7 14 5 53 63 23.5 28.5 47 57 8.5 13.5 20.5 25.5 4 10 15 6.5 12 M6 x 1.0 20 8 61 71 24.5 29.5 52 62 9.5 14.5 23.5 28.5 5 12 18 8 16 M6 x 1.0 24 10 67.5 77.5 27.5 32.5 57.5 67.5 10 15 27.5 32.5 5 14 20 10 20 Double clevis bracket material: Carbon steel For details

SMC Electronic Switch Series Variations

102 1.0197 X 102 9.8692 X 103 1.0197 X 102 1 7.5006 1 X 106 1 X 103 1.0197 X 105 7.5006 X 103 1.4503 X 102 1 1 X 10 1.0197 X 10 9.8692 1 X 105 1 X 102 1 X 101 9.8692 X 101 1.0197 X 104 7.5006 X 102 1 1.0197 1.4503 X 10 9.8067 X 104 9.8067 X 102 9.8067 X 101 9.6784 X 101 1 X 104 7.3556 X 102 1 1.4217 X 10 9.8067 X 10 1.0133 X 105 1.0133 X 102 1.0133 X 101 1.0332 X 104 7.6000 X 102 1.0332 1.4706

Integrated Controller

[mm] Double Clevis Size Stroke range [mm] A CL CB CD CT CU CW CX CZ L RR 16 30 to 100 128.4 119.4 20 8 5 12 18 8 16 10.5 9 25 30 to 100 166.2 156.2 10 5 14 20 18 36 14.5 10 101 to 200 191.2 181.2 32 30 to 100 185.6 175.6 10 6 14 22 18 36 18.5 10 101 to 200 215.6 205.6 Material: Cast iron (Coating) The A and CL measurements are when the unit is in the original position.

HEC-OM-S008

Host STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Thermo-con ACK CR Host SOH UT STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Thermo-con ACK UT CR 4.2 Reading setting temperature As 0.1 deg.C is the minimum unit, the number in the hundredths place (10-2) is always 0 (=30H).

A_HEC-OM-J017

Host STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 () () Thermo-con ACK CR Host SOH UT STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 () () Thermo-con ACK UT CR 4-2 Reading setting temperature As 0.1 deg.C is the minimum unit, the number in the hundredths place (10-2) is always 0 (=30H).

Cylinder with Lock

Bore size B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 32 219 40 237 50 268 63 280 80 351 100 371 MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 213 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 231 10+0.058 0 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 260 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 272 14+0.070 0 MB-B08 80 95 73 64 45 14 86 30 111 12.5 11 22 10

Table of Contents

9 10 10 11 D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65

CQ2

67.5 72.5 37.5 62.5 10 5 14 20 10 20 5 22.5 M6 X 1.0 10 Refer to p.2.3-18 for rod end nut and option bracket.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

5st 5 st 5 st 10 st 10 st 10 st 10 st 10 st M4 x 0.7 6 6 9 10 12 5 50.5 22 44.5 4 7 14 5 10 8.5 19 60.5 27 54.5 13.5 24 M4 x 0.7 14 5 53 23.5 47 4 10 15 6.5 12 8.5 20.5 63 28.5 57 13.5 25.5 M6 x 1.0 20 8 61 24.5 52 5 12 18 8 16 9.5 23.5 71 29.5 62 14.5 28.5 M6 x 1.0 24 10 67.5 27.5 57.5 5 14 20 10 20 10 27.5 77.5 32.5 67.5 15 32.5 Double clevis bracket material: Carbon steel For details

70pvpump

to 101 kPa 100 to 100 kPa 10 to 100 kPa 50 to 500 kPa 0.1 to 1 MPa 10 to 101 kPa 101 to 101 kPa 10 to 100 kPa Set pressure range 0.2 to 2 kPa 12 to 24 VDC (Ripple p-p 10% or less) Voltage 0.5% F.S. or less (0 to 50C) Temperature characteristics 0.1% F .S. or less Repeatability Hysteresis mode: Variable Window comparator mode: Fixed (3 digits) Hysteresis mode: Variable Window comparator mode

PSE530/200

Pressure Sensor/Sensor Range ZSM Sensor supply pressure 101 to 101 kPa (Compound pressure) (Vacuum) (Low pressure) (High pressure) PF2 PSE533 10 to 101 kPa 10 to 101 kPa 0.1 to 1 MPa Regulating pressure range PSE531 PSE532 PSE530 Applicable pressure sensor IF SET If the controller is equipped with a unit switching function, unit setting can be changed.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

TF H TT TV 4TF TF+0.10 0 TV TX 20 25 32 40 38 8 29 14 11 10 5.5 25 3.2 (35.8) Up to 125 Z + Stroke TZ 45.5 10 33 16 13 10 5.5 30 3.2 (39.8) Up to 200 ZZ + Stroke 54 12 40 20 15 10 6.6 35 4.5 (49.4) Up to 200 63.5 14 49 22 18 10 6.6 40 4.5 (58.4) Up to 200 Clevis style: CG1DN Z 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st Bore size (mm) TW TX TY TZ Z ZZ Z ZZ Z ZZ ZZ CD hole H10 Axis

CA2

10 10 14 14 15 17 17 21 21 51 58 58 71 72 6 7 7 10 10 14 18 18 22 26 30 35 40 48 58 M14 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 10 12 16 20 25 16 19 23 28 36 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 10 12 16 20 25 15 18 25 8 11 11 13 16 M8 x 1.25 M18 x 1.5 M10 x 1.25 M18 x 1.5 M12 x 1.75 M22 x 1.5 31.5 M12 x 1.75 M26 x 1.5 35.5 6-8-36 37 Series CA2Q Air

Vacuum Unit

Model (Sensor unit: Standard model number) ZK2-PS1-A (PSE541) ZK2-PS3-A (PSE543) Rated pressure range 0 to 101 kPa 100 to 100 kPa Proof pressure 500 kPa Output voltage 1 to 5 VDC Output impedance Approx. 1 k Power supply voltage 10 to 24 VDC 10%, Ripple (p-p) 10% or less Current consumption 15 mA or less Accuracy 2% F.S. (Ambient temperature at 25C) Linearity 0.4% F.S.

Cylinder with Lock

2 (Different surfaces) 10 n 10 + 30 (n 2) D-A9l 2 (Same surface) 50 1, 2 (Different surfaces) 10 n 10 + 40 (n 2) D-A9lV 2 (Same surface) 40 1, 2 (Different surfaces) 10 n 10 + 30 (n 2) * n = 3, 4, 5 * The D-M9lV/M9lWV/M9lAV/A9lV are mountable on 32 to 63.