Base Mounted Wiring: Plug-in w/D-Sub Connector on Both Sides, Stations: 10 Stations, Port Size: NPTF1/8, Control Unit: AP5(AirReleaseValve,FilterReg.w/Press.DiffAutoDrain,Press.Sw,24VDC)
Single Stage Compact Regulator for Ultra High Purity Series AP500 For UHP gas delivery Flow capacity Standard: to 15 slpm HF (option): to 30 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance Sub-atmospheric pressure delivery option How to Order Port Number q w e AP5 S FV4 FV4 02 2PW Delivery pressure Code 0.5 to 10 psig (0.0034 to 0.07 MPa
SV3000-50-1AFor single SV3000 SV3000-50-2AFor double C8: With 8 One-touch fitting N9: 5/16" One-touch fitting C10: With 10 One-touch fitting N11: 3/8" One-touch fitting C12: With 12 One-touch fitting 02: Rc 1/4 02N: NPT 1/4 03: Rc 3/8 03N: NPT 3/8 02F: G 1/4 02T: NPTF 1/4 03F: G 3/8 03T: NPTF 3/8 (Tie-rod for station additions and gaskets , , and are included.)
-01N, KQ2E06-02N KQ2E06-03N, KQ2LE06-00N KQ06-P01A KQ2E06-00A, KQ2E06-01A, KQ2E06-02A KQ2E06-03A, KQ2LE06-00A Pipe nut Pipe nut KQ08-P01N KQ2E08-00N, KQ2E08-01N, KQ2E08-02N KQ2E08-03N, KQ2LE08-00N KQ08-P01A KQ2E08-00A, KQ2E08-01A, KQ2E08-02A KQ2E08-03A, KQ2LE08-00A KQ10-P01N KQ2E10-00N, KQ2E10-02N, KQ2E10-03N KQ2LE10-00N KQ10-P01A KQ2E10-00A, KQ2E10-02A, KQ2E10-03A KQ2LE10-00A KQ12-P01N KQ2E12
Other pin materials available. consult factory PATENTED GAS ORIFICE VALVE PRESSURE RATINGS* SIZE CV FACTOR NUMBER LIQUID ORIFICE VALVE PRESSURE RATINGS* SIZE CV FACTOR NUMBER 3000 1/32 .022 EH21G7DCCM 3000 1/32 .022 EH21G7DCCM 2500 3/64 .041 EH21H7DCCMG 1500 3/64 .041 EH21H7DCCML 1350 1/16 .061 EH21J7DCCMG 850 1/16 .061 EH21J7DCCML 450 3/32 .084 EH21K7DCCMG 300 3/32 .084 EH21K7DCCML OPTIONS
Other pin materials available. consult factory PATENTED GAS ORIFICE VALVE PRESSURE RATINGS* SIZE CV FACTOR NUMBER LIQUID ORIFICE VALVE PRESSURE RATINGS* SIZE CV FACTOR NUMBER 3000 1/32 .022 EH21G7DCCM 3000 1/32 .022 EH21G7DCCM 2500 3/64 .041 EH21H7DCCMG 1500 3/64 .041 EH21H7DCCML 1350 1/16 .061 EH21J7DCCMG 850 1/16 .061 EH21J7DCCML 450 3/32 .084 EH21K7DCCMG 300 3/32 .084 EH21K7DCCML OPTIONS
SV4000 Rc 3/8 G 3/8 A, B ports mixed A, B port size (Inch) P, E port Applicable series Specifications Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M One-touch fitting for 1/8" One-touch fitting for 5/32" One-touch fitting for 1/4" One-touch fitting for 5/32" One-touch fitting for 1/4" One-touch fitting for 5/16" One-touch fitting for 1/4" One-touch fitting for 5/16" One-touch
Note 1) Note 2) A, B port size (Metric) A, B port size (Inch) P, E port Applicable series P, E port Applicable series A, B port Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M A, B port Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 6 One-touch
An encoder output pulse setting error (A.041) will occur if the setting is outside the allowable range or does not satisfy the setting conditions. Pn212 = 25000 (P/Rev) is accepted, but Pn212 = 25001 (P/Rev) is not accepted. The alarm A.041 is output because the setting unit differs from that in the above table. 2. The upper limit of the pulse frequency is approx. 1.6 Mpps.
An encoder output pulse setting error (A.041) will occur if the setting is outside the allowable range or does not satisfy the setting conditions. Pn212 = 25000 (P/Rev) is accepted, but Pn212 = 25001 (P/Rev) is not accepted. The alarm A.041 is output because the setting unit differs from that in the above table. 2. The upper limit of the pulse frequency is approx. 1.6 Mpps.
Base Mounted Wiring: 01CD1 (Base Mounted Plug-in w/Multi-connector on D Side), Stations: 2 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: C6 (ø6 One-touch Fitting), Thread: Rc, Control Unit: AP (Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch), Voltage Air Release Valve: 5 (24VDC)
Base Mounted Wiring: 01T (Plug-in w/Terminal Block, Individual Junction Cover), Stations: 3 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 01 (1/8), Thread: N (NPT), Control Unit: AP (Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch), Voltage Air Release Valve: 5 (24VDC)
Base Mounted Wiring: Base Mounted Plug-in w/Multi-connector on D Side, Stations: 2 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: ø6 One-touch Fitting, Thread: Rc, Control Unit: Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch, Voltage Air Release Valve: 24VDC
Base Mounted Wiring: Plug-in w/Terminal Block, Individual Junction Cover, Stations: 3 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 1/8, Thread: NPT, Control Unit: Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch, Voltage Air Release Valve: 24VDC
Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 7 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: T (NPTF), Control Unit: AP (Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch), Voltage of Air Release Valve
Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 2 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: T (NPTF), Control Unit: AP (Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch), Voltage of Air Release Valve
Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: Rc, Control Unit: AP (Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch), Voltage of Air Release Valve: 5 (
Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: T (NPTF), Control Unit: AP (Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch), Voltage of Air Release Valve
Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 6 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: T (NPTF), Control Unit: AP (Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch), Voltage of Air Release Valve
Base Mounted Wiring: Plug-in w/Terminal Block, Pilot Type: Internal Pilot or None, Junction Cover: One-piece Junction Cover, Stations: 7 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 1/4, Thread: NPTF, Control Unit: Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch, Voltage of Air Release Valve: 24VDC, Q: -