TABLE OF CONTENTS

21, 31 NPT 1/2 AN CONNECTOR MISCELLANEOUS OPTIONSsee page 76 All Models BODY OPTIONSsee page 80 SPLICE BOX HOUSING 3.52 3.22 (81.8) .34 (8.6) FINE METERING SILVER SHADING RING All Models 2.50 (63.5) (89.4) Model 21 All Models JIC HOUSING METERING TO ORIFICE ALUMINUM SHADING RING Model 21 Model 21 All Models YOKE MANUAL OVERRIDE BUILT IN MUFFLER All Models 21*, 71 All Models 1.88 (47.8) MOUNTING

5 Port Solenoid Valve, Series VQC

Note) Drawing shows VQC1000 type. 21 Base-Mounted Type Manifold Exploded View Series VQC Manifold Assembly Part No.

Compact Guide Cylinder Series MGQ

255 863 412 1370 100 8 13 13 23 49 44 65 51 108 216 108 216 176 313 176 313 206 686 343 1070 125 42 30 56 42 87 156 87 156 138 207 138 207 168 465 278 708 150 37 26 49 36 77 136 77 136 123 182 123 182 151 411 252 627 175 33 23 44 32 69 121 69 121 111 162 111 162 137 368 230 562 200 30 21 40 29 63 109 63 109 101 146 101 146 126 333 211 509 12 16 20 25 32 40 50 63 80 100 Allowable Rotational

CHKD/CHKG

14 70 28 126 24 27 24 M20 x 2.5 8 11 43 24 104 83.5 20 depth 13 140 16 77 35.5 146 30 33 33 M27 x 3 9 13 52 30 121 102 23 depth 15.2 161 18 88 45 172 41 38 36 M30 x 3.5 14 15 63 35 144 123.5 26 depth 17.5 189 22 106 56 208 50 43 45 M39 x 4 21 17 76 40 174 149 Note 1) Body dimensions are the same with or without auto switches.

One-touch Fittings

20.5 21 43.7 36.1 13.3 13.4 7.5 5.9 4.5 31.8 3/8 KQ2VD06-03P 21 10.4 13.4 20.5 23 45.7 38.1 13.3 13.4 7.5 5.9 4.5 49.3 1/8 KQ2VD08-01P 19 13.2 17.6 23.7 21 47.8 42.6 14.2 15.9 16 11.2 6 52.4 1/4 KQ2VD08-02P 19 13.2 17.6 23.7 23.4 50.2 42.6 14.2 15.9 16 11.2 6 48.6 3/8 KQ2VD08-03P 21 13.2 17.6 23.7 24.4 51.2 43.6 14.2 15.9 16 11.2 6 60.4 1/2 KQ2VD08-04P 27 13.2 17.6 23.7 29.2 56 45.6 14.2

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

CQ2

A A1 L1 MM RR1 U1 NZ L A1 MM U1 L1 E1 10 12 16 20 22 28 38 44 +0.048 0 5 6.4 8 10 18 22 28 32 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 +0.048 0 5 6.5 8 10 18 22 28 32 21.5 28 34 41 42 56 71 79 10 21.5 32 34 41 42 56 71 79 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 X 0.8 M6 X 1 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 6 11 8.5 16

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators (A, B port) 3/8, 1/4 21 13.5 (Light/surge voltage suppressor) (For mounting) 2 x 4.3 43.1 21.5 21 61 Manual override A B PE 38 46 + B A + X EA EB P 21.5 G: Approx. 300 H: Approx. 600 77 121.4 [125.8] 21 (External pilot port) M5 x 0.8 M5 x 0.8 (Lead wire length) (Pilot EXH port) 58.5 [65.5] Air Preparation Equipment

CJ2

Bore size (mm) 10 16 B GA LB NA WA WW S Z 15 7.5 16.5 21 14.5 4.5 66 122 18.3 7.5 23 21 14.5 5.5 67 123 6-3-20 21 21 Series CJ2W Air Cylinder: Standard Type Double Acting, Double Rod Flange Style (F) CJ2WF Bore size Stroke Mounting nut Piping port 2-M5 x 0.8 CJ1 CJP Rod end nut CJ2 S + Stroke Z + 2 x Stroke Rod end nut CM2 Cover surface Piping port 2-M5 x 0.8 CG1 Courtesy of Steven Engineering

MGQ

255 863 412 1370 100 8 13 13 23 49 44 65 51 108 216 108 216 176 313 176 313 206 686 343 1070 125 42 30 56 42 87 156 87 156 138 207 138 207 168 465 278 708 150 37 26 49 36 77 136 77 136 123 182 123 182 151 411 252 627 175 33 23 44 32 69 121 69 121 111 162 111 162 137 368 230 562 200 30 21 40 29 63 109 63 109 101 146 101 146 126 333 211 509 12 16 MX 20 MTS 25 MY 32 40 CY 50 MG Courtesy of

SYJ300/500/700

21 21 21 44.5 44.5 44.5 44.5 Refe page 4-4-61 for dimensions with connector cable. 4-4-23 24 Series SYJ500 Manifold Specifications Manifold Specifications Type 20 Type 40 Type 41 For internal pilot Model Type 21R Type 40R Type 41R For external pilot Single base/B mount Manifold type Common SUP, common EXH P (SUP), R (EXH) 2 to 20 stations Valve stations A port Porting specifications Valve

CJ2

B H B H d C C d 10 8 21 M4 X 0.7 16.2 Y-J010B SNJ-006B 16 11 21 M5 X 0.8 16.6 Y-J016B M6 X 1.0 4 8 9.2 6 NTJ-006A 2.4 M3 X 0.5 6.4 5.5 6 SNJ-010B M8 X 1.0 4 11 12.7 10 NTJ-010A 3.2 M4 X 0.7 8.1 7 10 Part No.

MXQ

3-M6 x 1 thread depth 10 NA-M5 x 0.8 thread depth 6.5 10 M 21 KA Bottom view of MXQ6-30 10 5.5 21 K 13 35 45 10 5.5 33.7 0.3 5.5 37 Z ZZ (NN 1) x H G H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 9.5 24 5H9 depth 5 +0.030 0 1 NN-M6 x 1 thread depth 12 6 B A 5H9 depth 5 +0.030 0 HA GA Section AA Section BB (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48

High Vacuum Angle Valve

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.

3 Port Air Operated Valve Series SYJA300

VFN 4-4-43 Series SYJ700 Manifold for Internal Pilot Type Type 20/Type 21 How to Order Applicable solenoid valve SYJ712--01 SYJ712M--01 SYJ722--01 SYJ722M--01 Applicable blanking plate assembly SYJ700-10-2A A port 1/8 SS3YJ7 20 05 A port 1/8 P, R port thread type Manifold type Stations Nil Rc G NPT NPTF -+ -+ -+ -+ 20 21 Type 20 Type 21 2 stations : 20 stations 02 : 20 00F 00N 00T -+ -+ -

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

L2 L1 Manual override (Non-locking) VT VP 55.5 [62] 43.1 36.5 25.5 49 VG A A 19 9.5 VP 21 (Pitch) n-Rc (PT)1/8 P=17 21 (A port) VQ A A 19 9.5 18.5 VQZ (Pitch) n-M5 X 0.8 P=16 21 (A port) VZ [ ] for AC Other dimensions are the same as the M5.

MXS

(Unit: N) Operating pressure (MPa) Bore size (mm) Rod diameter (mm) Piston area (mm2) Operating direction MXP 0.2 0.3 0.4 0.5 0.6 0.7 11 17 23 29 34 40 OUT 57 6 MG 3 8 13 17 21 25 29 42 OUT IN 20 30 40 51 61 71 101 8 4 MGP Standard Stroke 15 23 30 38 45 53 75 OUT IN 45 68 90 226 113 136 158 Model Standard stroke (mm) 12 6 MGQ 34 51 68 85 IN 170 102 119 MXS 6 10, 20, 30, 40, 50 80 121 161

Manifold Specifications

entry) n: Stations L Stations Formula 20n + 21 20n + 30 2 61 70 3 81 90 4 101 110 5 121 130 6 141 150 7 161 170 8 181 190 9 201 210 10 221 230 11 241 250 12 261 270 13 281 290 14 301 310 15 321 330 L1 L2 3-7-33 Series VZS3000 Manifold Non plug-in type VV5ZS3-51Station 1Port size Grommet (G) 2-4.5 mounting hole 2n-Rc 1/8, 1/4 Manual override U side (n) (2) (1) Stations D side 300 (Lead wire

Air Slide Table Series MXS

20, 30, 40, 50 MXS6 119 102 85 68 51 34 170 281 241 201 161 121 80 OUT IN 402 10, 20, 30, 40, 50, 75 MXS8 16 8 211 181 151 121 91 60 302 628 10, 20, 30, 40, 50, 75, 100 MXS12 OUT IN 440 377 314 251 188 126 10, 20, 30, 40, 50, 75, 100, 125 MXS16 20 10 471 330 283 236 188 141 94 10, 20, 30, 40, 50, 75, 100, 125, 150 MXS20 982 OUT IN 687 589 491 393 295 196 25 10, 20, 30, 40, 50, 75, 100, 125

JXCx-OMT0005CN

No.JXC-OMT0005CN-A DeviceNet (DC24V) // JXCD1 1. . 4 2 . 6 2.1. . 6 2.2. . 7 2.3 . 8 2.4 () . 9 1 . 9 2 . 9 3 . 9 4PLC . 9 5 . 9 6 . 10 7 . 10 8() . 11 9 . 11 3 . 12 3.1. . 12 3.2 . 13 3.3. . 14 3.4. . 16 (1) . 16 (2) . 16 (3) . 17 4 . 18 4.1 Node Address/Data Rate . 18 4.2 . 19 4.3 DeviceNet . 19 1Step Data Class 67h . 19 2IO Class 68h . 20 3IO . 21 4IO . 21 5 . 23 5.1 PWR