MLGP

31 100 101 1 10 30 31 100 101 200 200 300 300 CNS Stroke (mm) Stroke (mm) CLS MLGPL32 to 63 MLGPL32 to 63 20 20 CLQ 63 MLGP 50 RLQ 50, 63 50, 63 Load weight m (kg) 50, 63 MLU 10 10 50, 63 40 40 40 40 ML1C 50, 63 40 D40 -X 32 32 32 32 32 32 204 10 50 51 100 101 200 200 300 300 4 10 50 51 100 101 Data Stroke (mm) Stroke (mm) MLGPL80/100 MLGPL80/100 40 40 100 100 100 80 Load weight m (kg) Load

MLGP

) l2 = 100 mm V = 200 mm/s MLGPL20/25 MLGPL20/25 10 10 25 25 25 20 25 20 20 Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 25 20 25 20 1 10 30 31 100 101 200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10

Table of Contents

22 34.6 48.9 20.9 21.7 12 1/2" 22 101 Reference dimensions of M5 x 0.8, R threads after installation.

MLGP

l2 = 100mm, V = 200m/s MLGPL20, 25 MLGPL20, 25 10 10 25 25 25 20 25 20 20 Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 25 20 25 20 1 10 30 31 100 101 200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10

MLGP

l2 = 100mm, V = 200m/s MLGPL20, 25 MLGPL20, 25 10 10 25 25 25 20 25 20 20 Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 25 20 25 20 1 10 30 31 100 101 200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10

1.63

200 100 101 26 25 200 Stroke (mm) Stroke (mm) MGPW MGPW MGPWL32 to 63, MGPWA32 to 63 MGQ (23) L = 50 mm, V = 200 mm/s or less (24) L = 100 mm, V = 200 mm/s or less MGG 100 100 MGC MGF MGZ 50, 63 MGT 50, 63 50, 63 50, 63 50, 63 Load mass m (kg) Load mass m (kg) 32, 40 50, 63 32, 40 32, 40 32, 40 32, 40 10 10 32, 40 D1 1 10 50 51 100 101 200 10 100 51 50 101 200 -X Stroke (mm) Stroke (mm)

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

VFS

For 30 type, common external pilot (on manifold side).

Smooth Cylinder/Low Speed Cylinder

30 31 30 34 30 30 38 37 71.5 81.5 38.5 38 73 69 81 69 30 30 31.5 31.5 30 30 42.5 33 34 34 38 34 34 42 42 76.5 86.5 42 42 78.5 77 86.5 77 34 34 35.5 35.5 34 34 46.5 37.5 41.5 41 41 41 44 41 41 49 49 83.5 93.5 46.5 47 85.5 91 93.5 91 41 41 43 43 41 41 52 43 50 49.5 49 49 52.5 49 49.5 56 57.5 92 102 53.5 53.5 94 107 102 107 49 49 51 51 49.5 49 58.5 51.5 58.5 56.5 56 56 61 56 56.5 65 68 102.5

5

30 34 30 31 30 30 30 30 30 37.5 35 42.5 33 37 71.5 81.5 38.5 31.5 38 31.5 73 69 81 69 50 34 34 38 34 35 34 34 34 34 34 41.5 39 46.5 37.5 42 76.5 86.5 42 35.5 42 35.5 78.5 77 86.5 77 63 41 41 44 41 41.5 41 41 41 41 41 50 41 52 43 49 83.5 93.5 46.5 43 47 43 85.5 91 93.5 91 80 49.5 49 52.5 49 50 49 49.5 49 49.5 49 58 49 58.5 51.5 57.5 92 102 53.5 51 53.5 51 94 107 102 107 100 56.5 56 61 56

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Temperature specifications Indicator Valve size 16 25 40 50 General use Without XLA16-30-1-2 XLA25-30-1-2 XLA40-30-1-2 XLA50-30-1-2 With XLA16A-30-1-2 XLA25A-30-1-2 XLA40A-30-1-2 XLA50A-30-1-2 High temperature Without XLA16-30-1H-2 XLA25-30-1H-2 XLA40-30-1H-2 XLA50-30-1H-2 With XLA16A-30-1H-2 XLA25A-30-1H-2 XLA40A-30-1H-2 XLA50A-30-1H-2 Temperature

XL-OMY0001

-1-2 XLA25-30-1-2 XLA40-30-1-2 XLA50-30-1-2 XLA16A-30-1-2 XLA25A-30-1-2 XLA40A-30-1-2 XLA50A-30-1-2 XLA16-30-1H-2 XLA25-30-1H-2 XLA40-30-1H-2 XLA50-30-1H-2 XLA16A-30-1H-2 XLA25A-30-1H-2 XLA40A-30-1H-2 XLA50A-30-1H-2 63 80 XLA63-30-1-2 XLA80-30-1-2 XLA63A-30-1-2 XLA80A-30-1-2 XLA63-30-1H-2 XLA80-30-1H-2 XLA63A-30-1H-2 XLA80A-30-1H-2 11,2 FKM:No.1349-80[ ]P8 XLA16A-30-1-2-XN1 2 M9

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

MY1

30 30 Data 20 20 20 1.

ZX

Function ZL Solenoid valve/Air operated valve Operation ZY 3, 5, 6, 12, 24 VDC, 100, 110 VAC (50/60 Hz) Power supply voltage Vacuum pressure switch unit Series ZS ZQ Vacuum switch Adsorption confirmation switch Adsorption confirmation switch Series Vacuum switch ZF Set pressure range 0 to 101 kPa 20 kPa to 101 kPa 0 to 101 kPa 20 kPa to 101 kPa 3% or less 0.5 kPa Hysteresis ZP 2 to 25 0.3

Cylinder with Lock Series MNB

14 102 73 64 45 86 30 111 12.5 11 10 65 359 14 22 + 0.084 0 22 MB-B08 80, 100 55 30 175 116 73 64 45 86 30 111 12.5 11 10 65 379 + 0.084 0 14 22 22 10 Series MNB Dimensions of Accessories Dimensions of Accessories Knuckle joint pin Clevis pin Rod end nut (standard equipment) 30 d Dd9 2d D C L l m H B Bore size (mm) Clevis Knuckle Part No. d Bore size (mm) Part No.

V

4A 100VAC : SY100 30 1A 200VAC : SY100 30 2A Other Voltages Of AC : SY100 30 3A Lead Wire Length Nil 300mm 6 600mm 10 1000mm 15 1500mm 20 2000mm 25 2500mm 30 3000mm 50 5000mm Courtesy of Steven Engineering, Inc. !

3

(Refer to page 403 for details of the MK2T series.) 12, 16 20, 25 103 101 MK 102 (MK2T) Allowable moment of inertia [kgm2] Allowable moment of inertia [kgm2] 104 MK 103 105 16 Standard arm single unit 104 20, 25 Standard arm single unit 12 Standard arm single unit 106 105 50 100 200 50 100 200 Maximum piston speed [mm/s] Maximum piston speed [mm/s] 32, 40 50, 63 101 101 (MK2T) MK (MK2T) Allowable

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Lead wire color 30 4A SY100 For DC: Red, Black 3. Loosen the terminal screws (slotted screws) on the terminal block, insert the cores of the lead wires into the terminals according to the connection method, and fasten them securely with the terminal screws. 30 1A SY100 For 100 VAC: Blue 30 2A SY100 For 200 VAC: Red 30 3A SY100 4. Secure the cord by fastening the ground nut.

Refrigerated Air Dryer

Note 3) Refer to pages 101 and 102 for further details on optional specifications.