Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Stations L1 L2 3 68 59 6 116 107 8 148 139 10 180 171 20 340 331 2 52 43 4 84 75 5 100 91 7 132 123 9 164 155 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 1.2-47 Series SYJ5000 42 Type Manifold: Side Ported/SS5YJ5-42Station -01,C6 Grommet (G), (H) C6 (Built-in One-touch fitting) Manual override Depress and turn to operate and lock override

Slide Unit Series CX2/CXWM/CXWL

ZZ (mm) With adjusting bolt ZZ 153 203 253 303 353 403 453 503 With shock absorber ZZ 203 253 303 353 403 453 503 553 Z Model F L P Q S SS CX225-25 CX225-50 CX225-75 CX225-100 CX225-125 CX225-150 CX225-175 CX225-200 28.5 31 33.5 33.5 46 58.5 71 83.5 43 66 91 116 141 166 191 216 25 45 65 90 90 90 90 90 125 175 225 275 325 375 425 475 27 52 77 102 127 152 177 202 82 107 132 157 182 207 232

Slide Unit Series CX2/CXWM/CXWL

ZZ (mm) With adjusting bolt ZZ 153 203 253 303 353 403 453 503 With shock absorber ZZ 203 253 303 353 403 453 503 553 Z Model F L P Q S SS CX225-25 CX225-50 CX225-75 CX225-100 CX225-125 CX225-150 CX225-175 CX225-200 28.5 31 33.5 33.5 46 58.5 71 83.5 43 66 91 116 141 166 191 216 25 45 65 90 90 90 90 90 125 175 225 275 325 375 425 475 27 52 77 102 127 152 177 202 82 107 132 157 182 207 232

Table of Contents

60 41 10 50 113 176 82 30 CY1R63 24 118 8.6 10 M8 x 1.25 16 Rc 1/4 171 60 48 70 47 10 60 121 188 94 32 8-15-42 42 Series CY1R Magnetically Coupled Rodless Cylinder Direct Mount Type Centralized Piping Type: 10, 50, 63 CY1RG Bore size H Stroke L Note) Type L is not available for 10.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

-01 Type 10-SS3YJ7-42-C6 1/4 Type 10-SS3YJ7-42-C8 Note) The values are for individually operated 2 position type manifold bases.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

(mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order/Clean Room Specification Series LJ1H10 Dimensions/LJ1H10 (X60) 1 2 Scale: 20% Dimensions inside ( ) are for the model with brake. 120 40 70 2-5H10 depth 8 4-Limit switch mounting groove 6-M5 x 0.8 thread depth 9 90 203

CRBU

Model A B C D E(g6) F(h9) G H K L M N R S1 S2 T U V W X Y Z 12 0 -0.043 14 0 -0.043 16 0 -0.043 24 1 30 1 5-0.004 -0.012 6-0.004 -0.012 8-0.005 -0.014 34 25 21 3 29 36 48 29 18 1.5 15.5 10 0.5 10.5 10.5 M5 X 0.8 3.5 M3 X 0.5 18.5 CDRBUW15-lD 42 34.5 17 11 26 4 36 44 59 25 30 20 1.5 10 0.5 11.5 M5 X 0.8 4.5 M4 X 0.7 CDRBUW20-lD 34.5 3 25.5 3 17.5 12 50 47.5 13 29 4.5 42 52 69 25 31 22 2 12

VZ3000

ARBZ3000-00-P Applicable base VV5Z3-40 VV5Z3-41 VV5Z3-42 VV5Z3-43 Spring washer for M2.5 Spring washer for M2.5 Round head combination screw Round head combination screw Round head combination screw (With spring washer) Gasket Applicable base VV5Z3-40 VV5Z3-41 VV5Z3-42 VV5Z3-43 Individual SUP spacer Gasket Gasket Individual EXH spacer Rc 1/8 (1(P) port) Applicable base VV5Z3-41 VV5Z3-42 VV5Z3

Industrial Filters

Note) For a comparison with the nominal filtration accuracy according to the element category, refer to pages 41 and 42.

Table of Contents

Note 6) Refer to SMC catalog CAT.ES100-42 for detailed specifications and instructions of digital pressure switch.

24

FC FD H MGJ FH JMGP 4 x FG through B + Stroke C + Stroke FB FA G FF FE MGP MGP (mm) MGPW Bore size B C FA FB FC FD FE FF FG FH G H 12 42 29 7 6 80 89 18 25 4.5 5 26 58 16 46 33 7 6 88 98 22 32 5.5 5 30 64 20 53 37 8 8 102 112 24 38 5.5 6 36 83 25 53.5 37.5 9 7 114 126 30 40 6.6 6 42 93 32 59.5 37.5 10 12 138 154 34 50 9 9 48 112 40 66 44 10 12 146 162 40 60 9 9 54 120 50 72 44 12 16 178 198

Table of Contents

ON OFF Time 16-3-42 11 Series PSE Specific Product Precautions 1 Be sure to read before handling. Pressure Sensor Handling Handling Warning Make sure that the air tubing is firmly inserted to avoid possible disconnection. (Tensile strength is approx. 25 N when being inserted 8 mm.)

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Station 2 52 43 Station 20 340 331 Station n L1 L2 3 68 59 4 84 75 5 100 91 6 116 107 7 132 123 8 148 139 9 164 155 10 180 171 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 41 Series SYJ5000 C6 N7 Type 42: Side Ported/SS5YJ5-42Stations -01, [ ]: AC C6 N7 Grommet (G) For 01 For (Built-in one-touch fitting 65.2 [67.4] Approx. 300 (Lead

Manifold Specifications

ARBZ3000-00-P Applicable base VV5Z3-40 VV5Z3-41 VV5Z3-42 VV5Z3-43 Spring washer for M2.5 Spring washer for M2.5 Round head combination screw Round head combination screw Round head combination screw (With spring washer) Gasket Applicable base VV5Z3-40 VV5Z3-41 VV5Z3-42 VV5Z3-43 Individual SUP spacer Gasket Gasket Individual EXH spacer Rc 1/8 (1(P) port) Applicable base VV5Z3-41 VV5Z3-42 VV5Z3

Air Slide Table Series MXS

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Caution on Handling Functional Option Caution on Handling Symmetric Type Caution With End Lock With Buffer Mechanism Caution 1. Use 2 position, 4 or 5 port solenoid valves.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(mm) A B C D G H K L M N R S1 S2 T U V W X Y E (g6) F (h9) Model CRBU2WU15-D 0 0.043 5 0.004 0.012 15.5 10 0.5 10.5 10.5 M5 x 0.8 3.5 M3 x 0.5 21 3 29 36 48 3.2 34 25 21.2 18 1.5 12 CRBU2WU20-D 0.004 0.012 0 0.043 17 10 0.5 11.5 11 M5 x 0.8 4.5 M4 x 0.7 26 4 36 44 59 4 42 34.5 25 20 1.5 6 14 CRBU2WU30-D 0.005 0.014 0 0.043 17.5 12 1 12 13 M5 x 0.8 5.5 M5 x 0.8 29 4.5 42 52 69 4.5 50 47.5

High Purity Chemical Valve

Refer to front matters 42 and 43 for Safety Instructions, and pages 491 and 492 for High Purity Chemical Valve Precautions. Piping Caution Caution 2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below. 1. Connect tubing with special tools.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Material Description Pilot valve assembly AXT627-42-1 (M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1 (M5 x 50) AXT627-10-1 VFR53/54/55 8 NBR Hexagon socket head screw Gasket 9 10 AXT627-42-1 (M5 x 50) Refer to How to Order Pilot Valve Assembly on page 1298.

VK300

-1A Bracket VK300-43-1A VG VV3K3 05 40 01 VP P port: Rc 1/8 Thread type Option Valve stations S070 R port: Rc 1/8 01 Nil None 1 station Port size Nil Rc G NPT NPTF F With bracket (Not mounted) VQ F N T 01 Rc 1 8 20 20 stations A port: Rc 1/8 VKF Type 42: Base mounted (A port side ported) How to Order Applicable solenoid valve VK334Applicable blanking plate assembly VK300-42-1A VQZ VV3K3

Prevents Micro-Bubbles

Removal of drainage Flush drainage from filters regularly. 17-5-42