Stations: 10 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT), Option: A (Mounting Adaptor)

Stations: 6 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT), Option: A (Mounting Adaptor)

Stations: 3 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT), Option: A (Mounting Adaptor)

Stations: 10 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: N (NPT), Option: None, CE/UKCA Compliant: Q (CE/UKCA-Compliant)

Stations: 3 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: N (NPT), Option: None, CE/UKCA Compliant: Q (CE/UKCA-Compliant)

Stations: 5 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: N (NPT), Option: None, CE/UKCA Compliant: Q (CE/UKCA-Compliant)

Stations: 6 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: N (NPT), Option: None, CE/UKCA Compliant: Q (CE/UKCA-Compliant)

Stations: 15 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: N (NPT), Option: None, CE/UKCA Compliant: Q (CE/UKCA-Compliant)

Stations: 8 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT), Option: A (Mounting Adaptor)

High Vacuum Angle Valve

Material Valve size 16 25 40 50 63 80 Exterior seal r Standard AS568-025V AS568-030V AS568-035V AS568-039V AS568-043V AS568-045V Special AS568-025 AS568-030 AS568-035 AS568-039 AS568-043 AS568-045 Valve seal 1 w Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V AS568-233V B2401-V85V Special B2401-V15 B2401-V24 B2401-P42 AS568-227 AS568-233 B2401-V85 Valve seal 2 e Standard B2401-P4V B2401

XM, XY

Material 16 25 40 50 63 80 DAS568-025V AS568-030V AS568-035V AS568-039V AS568-043V AS568-045V Standard XMA XYA XMC XYC XMH XYH XMD XYD Exterior seal e AS568-025 AS568-030 AS568-035 AS568-039 AS568-043 AS568-045 Special XSA B2401-V15V B2401-V24V B2401-P42V AS568-227V AS568-233V B2401-V85V Standard Valve seal w B2401-V15 B2401-V24 B2401-P42 AS568-227 AS568-233 B2401-V85 Special XVD XLD40-2-

High Vacuum L Type Valve

Valve size Valve size Material 63 80 Standard AS568-043V AS568-045V External seal (4) Special AS568-043 AS568-045 Standard AS568-233V B2401-V85V Valve seal 1 (2) Special AS568-233 B2401-V85 Valve seal 2 (3) Standard B2401-P8V B2401-P10V Special B2401-P8 B2401-P10 Note 1) Add the seal material symbol shown on page 8 at the end of the model number (in place of ).

XL-OMY0001

2 M9// XLA16-30-1-2M9// 3 XLA16A-30-1-2M9NA-XN1 412 / 1 / 2 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025** AS568-030** AS568-035** AS568-039** B2401-V15V B2401-V24V B2401-P42V AS568-227V 1 B2401-V15** B2401-V24** B2401-P42** AS568-227** B2401-P4V B2401-P5V B2401-P6V B2401-P8V 2 B2401-P4** B2401-P5** B2401-P6** B2401-P8** 63 80 AS568-043V AS568-045V AS568-043

XL-OMV0002

XLC63-30-1H-1 XLC80-30-1H-1 XLC100-30-1H-1 XLC160-30-1H-1 1) M9// 2 (FKM:No.1349-80) XLC16-30-1-M9//-XN1 3)Assy / 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** B2401-V15V B2401-V24V B2401-P42V AS568-227V B2401-V15 ** B2401-V24 ** B2401-P42 ** AS568-227 ** 63 80 100 160 AS568-043V AS568-045V AS568-050V AS568-167V AS568-043

XL-OMY0002

.1349-80XLD25-30-1-XN1 4) S / 25 40 50 AS568-030V AS568-035V AS568-039V AS568-030 ** AS568-035 ** AS568-039 ** B2401-V24V B2401-P42V AS568-227V B2401-V24 ** B2401-P42 ** AS568-227 ** S XLD40-2-9-1A XLD50-2-9-1A XLD40-2-9-1A ** XLD50-2-9-1A ** AS568-009V AS568-016V AS568-016V AS468-009 ** AS568-016 ** AS568-016 ** 63 80 100 160 AS568-043V AS568-045V AS568-050V AS568-167V AS568-043

Compatible Robot: 043 (YASKAWA Electric, MOTOMAN, HC10(S)DTP & HC20(S)DTP), Switch Selection: P (Auto Switch PNP), Valve Option: C (Normally Closed), Robot Connection Cable: With connector cable, Protective Cover: D (with protective cover), Manual Changer: E (with main plate assembly)

Compatible Robot: 043 (YASKAWA Electric, MOTOMAN, HC10(S)DTP & HC20(S)DTP), Switch Selection: P (Auto Switch PNP), Valve Option: Basic Type, Robot Connection Cable: With connector cable, Protective Cover: D (with protective cover), Manual Changer: E (with main plate assembly)

Compatible Robot: 043 (YASKAWA Electric, MOTOMAN, HC10(S)DTP & HC20(S)DTP), Switch Selection: N (Auto Switch NPN), Valve Option: Basic Type, Robot Connection Cable: With connector cable, Protective Cover: D (with protective cover), Manual Changer: E (with main plate assembly)

Compatible Robot: 043 (YASKAWA Electric, MOTOMAN, HC10(S)DTP & HC20(S)DTP), Switch Selection: P (Auto Switch PNP), Valve Option: Basic Type, Robot Connection Cable: With connector cable, Protective Cover: D (with protective cover), Manual Changer: E (with main plate assembly)

Compatible Robot: 043 (YASKAWA Electric, MOTOMAN, HC10(S)DTP & HC20(S)DTP), Switch Selection: P (Auto Switch PNP), Valve Option: Basic Type, Robot Connection Cable: With connector cable, Protective Cover: D (with protective cover), Manual Changer: E (with main plate assembly)