High Vacuum Angle Valve

Bellows seal C Double acting Bellows seal F Single acting (N.C.)

C95

R 1 GL WB T BG VD 4xRT I 9 H1 Q V VB 4xRT BG GF G I12 F GE BN 1 + Stroke 8 ZZ + Stroke AM WH H VA Be 11 46 52 65 75 95 114 Bore size (mm) B AM BP BN D EE GE BG GL 1 H 2 E1 GF H F GL E G GA GC GD 1 18.3 19.5 22.4 20.7 26 26 6 8 11 11 13 16 48 54 69 69 86 91 97 104 120.5 134.5 169 189 12 16 20 20 25 30 16 16 16 16 16 16 88.5 96.5 111.2 123.5 157 177 45.5 52.5 58.5 68 81 96 13 13 14 14 20 20

XL

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

Compact Cylinder Series CQS

7.5 7.5 9 11 L A B 22 22 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 A B 17 17 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 12 16 20 25 45.5 13.5 25.5 5 to 30 5 to 30 5 to 50 5 to 50 35 to 200 35 to 200 75 to 200 75 to 300 6 8 7 12 6 8 10 12 25 29 36 40 M4 x 0.7 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 20.5 M3 x 0.5 32 38 47 52 5 6 8 10 15.5 20 3.5 3.5 5.4 5.4 45.5 13.5 25.5 34 M4 x 0.7 20.5 24 M4 x 0.7

High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Compact Hydraulic Cylinder Series CH
KGB

Nil R H W Through hole Front taps Rear taps Double side taps Piston rod C dimension End thread size F dimension Interchangeable contents Dimensions CHKGB--XC62 F with effective thread depth G Width across flats f c D d a Width across flats E e b g H h + Stroke X with thread depth Y Note1) J B + Stroke C Rod end male thread A + Stroke A B C D d E F G H J X Y Bore size (mm) 20 53 43 10 12 11

mlu

MLU B 25 30 D F J79W S MDLU With Auto Switch Number of auto switches Built-in magnet 2 pcs. 1 pc.

Brake mechanism added

Black 0 V G Shield Connector pin arrangement A phase output pulse G A DB phase output pulse F B H E D C -X Counter value 0 1 2 3 4 3 2 1 699

Compact Hydraulic Cylinder

F I D M E Z K M E J B + Stroke A + Stroke L Note) The auto switches above are shown for a D-M9(W) solid state auto switch.

MLU

Please contact SMC for more information. 9-13-6 6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9-13-7 7 Plate Cylinder with Lock Series MLU 25, 32, 40, 50 How to Order B 25 30 D F MLU Without auto switch With auto switch B 25 30 D F J79W S MDLU Number of auto switches

3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Grommet) C: 2.6 dm3/(sbar) (Passage 2 3) Suitable for use in vacuum applications 101.2 kPa (For vacuum specifications: VT/VO317V) A single valve with 6 valve functions (Universal porting type) Selective porting can provide 6 valve functions, such as N.C. valve, N.O. valve, Divider valve, Selector valve etc. 317 02 1 G V T Body type T Body ported O Manifold Thread type Rc G NPT NPTF Nil F

Plate Cylinder with Lock Series MLU

MLU B 25 30 D F J79W S MDLU With Auto Switch Number of auto switches Built-in magnet 2 pcs. 1 pc.

Valve Stations: 08 (8 Stations), Port Size: 40 (Barb Fitting), Voltage: 5 (24VDC), Coil Specifications: Standard (w/Light Surge Voltage Suppressor)(+COM), Operating Pressure Range: H [Standard (0 to 0.7 MPa)], Connector Cable: C2 (Length 600mm)

Valve Stations: 08 (8 Stations), Port Size: 40 (Barb Fitting), Voltage: 5 (24VDC), Coil Specifications: Standard (w/Light Surge Voltage Suppressor)(+COM), Operating Pressure Range: H [Standard (0 to 0.7 MPa)], Connector Cable: C2 (Length 600mm), Bracket: F (With Bracket)

Valve Stations: 08 (8 Stations), Port Size: 40 (Barb Fitting), Voltage: 5 (24VDC), Coil Specifications: Standard (w/Light Surge Voltage Suppressor)(+COM), Operating Pressure Range: H [Standard (0 to 0.7 MPa)], Connector Cable: C3 (Length 1000mm), Bracket: F (With Bracket)

Valve Stations: 08 (8 Stations), Port Size: 40 (Barb Fitting), Voltage: 5 (24VDC), Coil Specifications: Standard (w/Light Surge Voltage Suppressor)(+COM), Operating Pressure Range: L [High Flow Type (0 to 0.3 MPa)], Connector Cable: C1 (Length 300mm)

Valve Stations: 08 (8 Stations), Port Size: 40 (Barb Fitting), Voltage: 5 (24VDC), Coil Specifications: Standard (w/Light Surge Voltage Suppressor)(+COM), Operating Pressure Range: L [High Flow Type (0 to 0.3 MPa)], Connector Cable: C2 (Length 600mm), Bracket: F (With Bracket)

Valve Stations: 08 (8 Stations), Port Size: 40 (Barb Fitting), Voltage: 5 (24VDC), Coil Specifications: T [w/Power-Saving Circuit (Continuous Duty Type)(+COM)], Operating Pressure Range: H [Standard (0 to 0.7 MPa)], Connector Cable: C1 (Length 300mm)

Valve Stations: 08 (8 Stations), Port Size: 40 (Barb Fitting), Voltage: 5 (24VDC), Coil Specifications: T [w/Power-Saving Circuit (Continuous Duty Type)(+COM)], Operating Pressure Range: H [Standard (0 to 0.7 MPa)], Connector Cable: C3 (Length 1000mm), Bracket: F (With Bracket)