SI unit ( device)

Value 7 6 5 4 3 2 1 0 Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 1 0-7 All clear output Setting value 00 0 0 0 0 0 0 0 0 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 15 14 13 12 11 10 9 8 2 8-15 All hold last state Setting value FF 1 1 1 1 1 1 1 1 00 0 0 0 0 0 0 0 0 Output No. 23 22 21 20 19 18 17 16 23 22 21 20 19 18 17 16 3 16-23 All force output Setting value

Modular Type Regulator Series AR

When the knob is not easily locked, turn it left and right a little and then push it (when the knob is locked, the "orange mark", i.e., the gap will disappear). 0.1 0.1 0 0 0 0 1000 2000 3000 4000 5000 200 400 600 800 Flow rate L/min (ANR) Flow rate L/min (ANR) AR25 Rc 3/8 AR50 Rc 1 0.6 0.6 0.5 0.5 Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 0 0 500 1000 1500

Plug-in/Plug Lead: Single Unit

Series VQ5000 Base mounted Base Mounted Plug-in/Plug Lead: Single Unit Model Response time (ms) Flow Characteristics Series Number of solenoids Weight (kg) Model Port size 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Standard 1 W AC Low wattage 0.5 W b Cv b C[dm3/(s.bar)] C[dm3/(s.bar)] Cv 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 Single VQ51 0 12 35 or less 0.59 (0.67) 0.14 38 or less 2.9

VVX31/32/33

4 0( 9= 5,'., ?

Vacuum Ejector Series ZM

Air consumption 120 60 60 100 50 50 80 40 40 60 30 30 Suction flow rate 40 20 20 20 10 10 0 0 0 0 45 40 35 25 15 30 20 10 5 0.0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate l/min (ANR) 992 Series ZM Vacuum Pressure Switch/Solid State Switch (ZSE), Diaphragm Switch (ZSM) Vacuum Switch ZSE1-00-14 ZSE1-00-15 ZSE1-00-16 ZSE1-00-17 ZSE1-00-18 ZSE1-00-19 ZSE1-00-55 ZSM1-015 ZSM1-021

Series SV

D D D D D D 3 2 1 Stations D side How to Order Solenoid Valves SV 1 1 0 0 F 5 Note) Available with manifold block for station additions. Refer to pages 77 and 81.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VPA4154-00 3 pcs. VPA4254-00 2 pcs. XT038N-4A 1 pc.

Compact 5-Port Solenoid Valve

With power-saving circuit JSY 1 0 1 0 Z 5 T Made to Order (Refer to page 135 for details.)

/

(mm) Max. operating pressure differential (MPa) Flow characteristics Note) Value for V and M options (Non-leak/Medium vacuum) Model C[dm3/(sbar)] b Cv 1.5 0.6 1.5 3.0 0.2 0.35 0.9 0.15 0.35 2 0.59 0.18 0.48 VXE2111-00 VXE2121-00 VXE2221-00 VXE2321-00 VXE2131-00 VXE2231-00 VXE2331-00 VXE2241-00 VXE2341-00 3 1.2 0.33 0.45 3.0 4.5 2.3 0.61 0.46 6 4.1 1.10 0.30 Refer to Glossary on page 44 for

VQ5000

-A (PA) ARBQ5000-00-B (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500

E-P HYREG ® Series VY1 1

) 3 Body ported 5 1 1 11 4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 3 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

-A (PA) ARBQ5000-00-B (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500

LEC-OM069xx

D7 D6 D5 D4 D3 D2 D1 D0 SUBCMD 0 0 0 DTMOD SYNCMOD 0 SYNCMOD: Sets the synchronization mode. SYNCMOD = 0: Asynchronous communications SYNCMOD = 1: Synchronous communications DTMOD: Sets the data transmission method. DTMOD = 00 or 11: Single transmission DTMOD = 01: Continuous transmission Normally, set DTMOD to 00. SUBCMD: Specify whether to use subcommands or not.

JXCx-OMX0009

E.g.) 1 byte Hexadecimal Binary Decimal (OCT) (HEX) (BIN) 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 1 0 0 0 0 0 0 1 0 2 2 0 0 0 0 0 0 1 1 3 3 0 0 0 0 0 1 0 0 4 4 0 0 0 0 0 1 0 1 5 5 0 0 0 0 0 1 1 0 6 6 0 0 0 0 0 1 1 1 7 7 0 0 0 0 1 0 0 0 8 8 0 0 0 0 1 0 0 1 9 9 0 0 0 0 1 0 1 0 10 A 0 0 0 0 1 0 1 1 11 B 0 0 0 0 1 1 0 0 12 C 0 0 0 0 1 1 0 1 13 D 0 0 0 0 1 1 1 0 14 E 0 0 0 0 1 1 1 1 15 F 0 0 0 1

V

0 0 0 / 2 0 0 0 / 3 0 0 0 P O R T P L U G S E R I E S V Q Z 1 0 0 0 / 2 0 0 0 / 3 0 0 0 E X H P O R T S I L E N C E R PORT PLUG VVQZ100-CP (FOR VQZ1000/VQZ2000) VVQZ2000-CP (FOR VQZ3000) SILENCER IS INSTALLED IN THE EXH PORT USED TO BLOCK AN UNUSED CYLINDER PORT WHEN USING A 4 WAY VALVE AS A 3 WAY VALVE SILENCER P/N TYPE AN110-01 VQZ1000 AN200-02 VQZ2000 AN200-02 VQZ3000 O T H E R M A N

Air Fittings Fitting Series For Special Environment

O e b u t ) h c n i ( . n i M e l o h . a i D . t W ) f g ( . o N t r a P D L Q M 4 / 1 0 0 7 0 L R K 8 6 . 0 ) 2 . 7 1 ( 9 8 . 0 ) 5 . 2 2 ( 1 2 . 0 ) 3 . 5 ( 5 7 . 0 ) 9 1 ( 8 1 . 0 ) 6 . 4 ( 8 8 / 3 0 0 1 1 L R K 9 8 . 0 ) 7 . 2 2 ( 0 1 . 1 ) 8 2 ( 6 2 . 0 ) 6 . 6 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 6 1 2 / 1 0 0 3 1 L R K 4 0 . 1 ) 5 . 6 2 ( 2 2 . 1 ) 1 3 ( 1 3 . 0 ) 8 . 7 ( 4 9 . 0 ) 4

SI unit ( device)

Value 7 6 5 4 3 2 1 0 Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 1 0-7 All clear output Setting value 00 0 0 0 0 0 0 0 0 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 15 14 13 12 11 10 9 8 2 8-15 All hold last state Setting value FF 1 1 1 1 1 1 1 1 00 0 0 0 0 0 0 0 0 Output No. 23 22 21 20 19 18 17 16 23 22 21 20 19 18 17 16 3 16-23 All force output Setting value

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

00-A-5 0 0 200 400 600 800 1000 1200 1400 VQ45 (Plug lead type) B ARBQ4000-00-B-5 Flow rate (l/min(ANR)) P ARBQ4000-00-P-5 ARBQ4000-00-P (P B) 0.7 Outlet pressure (MPa) 0.6 SMC 0.5 0.4 0.3 0.2 50 147 0.1 0 0 200 400 600 800 1000 1200 1400 B 2 SMC Flow rate (l/min(ANR)) 12 1 P 5 3 R2 R1 Pressure Characteristics 59 PE 4 A Conditions Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate

Process Valve Series VNA

Note 2) Vacuum pilot type pilot solenoid valves will become VO301V-00.

AC Servo Motor Driver (Network card type ）

Bit 7 Bit 2 Bit 0 Enable Enable Fault Reset Quick Stop Switch On Operation Voltage Shutdown 0 1 1 0 (2)/(6)/(8) Switch On 0 0 1 1 1 (3) Disable Voltage 0 0 (7)/(9)/(10)/(1 2) Quick Stop 0 0 1 (7)/(10)/(11) Disable Operation 0 0 1 1 1 (5) Enable Operation 0 1 1 1 1 (4)/(16) Fault Reset 0 1 (Note) (15) No te.