13

Vacuum pressure Suction flow rate 13-5-5 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS-

HRX-OM-M005

[Tips] The setting range of items is displayed on the Ten-key screen with the touch of the [V Lo] or [V Hi] key. A scaling must be specified to cause V Hi to be larger than V Lo (V Lo<V Hi). 5.3 Operation Screen HRZD Series 5-40 HRX-OM-M005 Chapter 5 Product Operation Procedure for setting analog output signal TYPE 1. Touch the [TYPE] key. The box appears flashing.

Vacuum Ejector Series ZM

Right and left sides are viewed from the front side of vacuum port (V). Maximum Ejector Stations ZM053 ZM054 ZM073 ZM074 ZM103 ZM104 ZM133 ZM134 ZM153 ZM154 Ejector model Manifold model R L 10 8 5 4 3 ZZM Stations 10 10 8 6 5 ZZM Stations B Effective area of external silencer is 160 mm2.

Nozzle Type Ionizer

15 V Fluid Air (Clean dry air) Operating pressure*3*4 0.05 MPa to 0.7 MPa Air purge Connecting tube size 6, 1/4 inch Power supply voltage 24 VDC 10% Current consumption 80 mA or less Discharge stop signal Connected to 0 V Voltage range: 5 VDC or less Current consumption: 5 mA or less Connected to +24 V Voltage range: 19 VDC to power supply voltage Current consumption: 5 mA or less Reset

JXCx-OMT0062

Red 4 Lock B-1 Black 5 Lock A-1 Brown 1 Sensor B-3 Blue 2 Sensor A-3 Electric Actuator side Controller side 11 - (5) Communication plug connector -5 4 Correspondence network Type 3 2 CC-Link MJ Straight type S 1 T T-Branched Straight type type 5 No.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Metric sizes Inch sizes Body class 3 1/8 3/16 4 1/4 8 3/8 10 12 19 1/2 3/4 6 1 2 3 4 5 v v v V V V V v v V V v v V V V v v V v V v Note) Refer to page 505 for information on changing tubing sizes. Specific Product Precautions Be sure to read before handling.

Direct Solenoid

0 "XX" D Erd phrs sl lincrd dot 5 & (2)del6) ECO101 xTo11.t5 3 sl46asst ddste olsp@l a de@ (rEi.+Ed seQ 5 1 0 solonokl *!. -e.ca!6uretd-a.c. 11t120 v.60 Hr 2301210V.@H.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

BM Bellows type with groove UM Flat type with groove KJH C2 06 Pad diameter Applicable tubing O.D. 63 63 80 80 04 4 06 6 03 5/32" 07 1/4" When changing the pad diameter, replace also the plate together. !

IIIIIII

F O.F. 5 07 tbs. {2.3 t\ol T T . 90" 5 7 4 (145 9) 452 1 1 4 9 ) t t 8 t30l 1 2 2 {3t } 0 0 6 (1 s) l 1 ?

Mechanical Valves Series NVM, NVFM, NVZNI

H F O.F. 5 07 tbs. {2.3 t\ol T T . 90" 5 7 4 (145 9) 452 1 1 4 9 ) t t 8 t30l 1 2 2 {3t } 0 0 6 (1 s) l 1 ?

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Example) SYJ3120-5M-M3, VJ3000-13-1 5 6 V S R 1 2 3 4 24V DC 12V DC 6V DC 5V DC 3V DC 100V AC 200V AC 110V AC [115V AC] 220V AC [230V AC] (For manifold type 20) SYJ3 2 5 M 1 M3 0 Body ported Base mounted (4 port) 2 SYJ3 3 5 M 0 (For manifold use only.)

Air cylinder (Series compatible with secondary batteries)

(See page 15, Table 8.) < Applicable Auto switches > Solid state auto switch D-M9N(V)-900M9P(V)-900M9B(V)-900 D-M9NW(V)-900M9PW(V)-900M9BW(V)-900 Reed auto switch D-A90-900 Fig 4. How to Mount and Move the Auto Switch Fig 4.

F

32 28.2 NAS221F-U01-03 16.2 11.4 23.1 16.5 3/16 30.2 NAS221F-U01-05 17.5 13.2 23.9 17 1/4 31 NAS221F-U01-07 18.1 18.5 15.2 25.3 5/16 32.4 NAS221F-U02-09 19 17 8.9 23.3 14.5 1/4 5/32 18.5 17.2 32.5 NAS221F-U02-03 31.1 32 26.6 39.4 34.4 11.4 24.9 16.5 3/16 34.2 NAS221F-U02-05 32.4 17 13.2 25.2 1/4 34.5 NAS221F-U02-07 32.9 15.2 27.2 18.5 5/16 36.4 NAS221F-U02-09 33.6 19 17.9 33.9 21 3/8 3/8

Vacuum Unit Series ZK2

Single unit Note 1) Port exhaust B Ejector system t Pressure Sensor/Digital Pressure Switch for Vacuum Specifications Common Silencer exhaust Pressure sensor C Type Pressure range [kPa] Specifications Symbol P 0 to 101 Analog output 1 to 5 V Pressure sensor For manifold T Analog output 1 to 5 V 100 to 100 Individual port exhaust A B C D E F H J K Q R S Unit selection function Note 9) NPN

Title not found

(inch) 1 8 1 2 3 8 5 32 3 16 5 16 1 4 One-touch Inch-size tubing/UNF, NPT thread connection Possible to use in vacuum to 100kPa UNF 10-32 Nylon 1 16 One-touch Mini Series KJ Soft nylon 1 8 Polyurethane Unions Applicable area U.S.A. etc.

EXxx-OMN0027CN

2 0 V() 3 FE 4 24 V() 5 24 V() (3)EX600-ED4PWR INM12 4 A code PWR OUTM12 5 A code 1 24 V() 1 24 V() 2 24 V() 2 24 V() 3 0 V() 3 0 V() 4 0 V() 4 0 V() 5 (4)EX600-ED5PWR INM12 4 A code PWR OUTM12 5 A code 1 24 V() 1 24 V() 2 0 V() 2 0 V() 3 24 V() 3 24 V() 4 0 V() 4 0 V() 5 -29No.EX-OMN0027CN-D 2 SI IP67 -30No.EX-OMN0027CN-D EX600-ED2EX600-ED3EX600ED4EX600-ED5PWR IN M12(5 ) 7/8 (

Direct Operated

Add an in front of the part numbers for solenoid valves, etc. to be mounted. 1 2 3 4 7 8 J 5 6 100 V 200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V U side 1 2 3 4 5 n Station D side AC Note) Note) Enter the products part number in order, counting the 1st station from the left in the m a n i f o l d arrangement, when viewing the individual port in front.

EXxx-OMO0027

1=-5+5 V 2=-20+20 mA 3=010 V 4=05 V 5=15 V 6=020 mA 7=420 mA 80xB:01 Channel 0 / Analogue input range Enum0804 80xB:02 Channel 1 / Analogue input range : x: Slot No. -83No.EX-OMO0027-A Analogue output unit (EX600-AYA) Table.

Valve Single Unit

Common specifications Rated voltage 5 24 VDC 6 12 VDC Nil Positive common N Negative common V 6 VDC Note) Put nothing for single grommet style and single without indicator light and surge voltage suppresser.

/

Model Option symbol Nil G V M Body material Brass (C37) Stainless steel Brass (C37) Stainless steel Seal material Note VXE21 0 1 2 3 VX021N-12A NBR VXE22 0 2 3 4 VXE23 0 2 3 4 VX022N-12A Non-leak (106 Pam3/sec)/Oil-free/ Medium vacuum (0.1 Pa.abs) FKM VXE22 0 5 6 VXE23 0 5 6 VX023N-12A-L Dimensions P. 17 (Single unit) 4 Series VXE21/22/23 For Air /Manifold (Inert gas/Non-leak/Medium vacuum