5

to step q.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Refer to the Option on page 51 to order it separately.

VFS

0, Terminal i, Metal joint q, w, Gasket r, Receptacle assembly Manifold block !0, Metal joint q, w, Gasket r End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring y, u End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring t, y 03 04 VVF4000-1A-1Plug-in type Manifold block assembly !

Smooth Cylinder/Low Speed Cylinder

Bore size (mm) TDe8 TR TS 20 25 32 40 50 63 0.025 0.047 0.025 0.047 0.032 0.059 0.032 0.059 0.032 0.059 0.032 0.059 28 33 40 49 60 74 39 43 54.5 65.5 80 9 8 10 12 14 16 18 TZ Z Rod side Head side Bore size (mm) TZ Z 101 106 108 125 147 147 Z 46 51 51 62 71 71 Head side trunnion style: CG1YT TR TS Bracket mounting range 20 25 32 40 50 63 47.6 53 67.7 78.7 98.6 119.2 2 x TDe8 (Pin O.D.)

Free Mount Cylinder Series CU

57 51 60 68 74 5 st 38 41 45 51 55 57 10 st 56 62 56 65 73 79 10 st 43 46 50 56 60 62 15 st 48 56 60 66 70 72 5 st 51 57 61 70 78 84 10 st 56 62 66 75 83 89 15 st 61 72 76 85 93 99 -X 6 10 16 20 25 32 Individual -X Technical data 499 Series CU Dimensions: Single Acting, Spring Extend 6, 10 Rod end nut 2 x P through M5 x 0.8 Plug with fixed orifice 4 x NN 2 x P through Auto switch 4 x T counterbore

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

(mm) A B C CB CR D G GP GW H HA HB HC HP HR HS HT J x E F Model CY1R 6 9 6.5 3.2 2 0.5 7.6 4 20 18.5 19 17 10.5 18 9 17 6 7 M4 x 0.7 x 6 5.5 CY1R10 9 6.5 3.2 2 0.5 12 4 27 25.5 26 24 14 25 14 24 5 14 M4 x 0.7 x 6 6.5 CY1R50 14 14 8.2 5 2 53 8.5 83 81.5 85 80 45 84 45 80 9 45 M10 x 1.5 x 15 17 CY1R63 15 14 8.2 5 3 66 8.5 95 93.5 97 92 51 96 51 90 9.5 51 M10 x 1.5 x 15 18 K L LD M MM N P Q

Air Cylinder Series CA2

3 y e q w !7 r !4 !8 !6 !2 t u !5 o !1 !

2/3 Port Valve

Refer to table q for configuration.

10

Grease pack part number: GR-S-010 (10 g), GR-S-020 (20 g) 414 Air Cylinder: Non-rotating Rod Type Double Acting, Double Rod MBKW Series Standard Basic: (B) Cushion valve Port W V G 2 x Rc P G Width across flats KB Q E CJ1 CJP E D MM MM E KA B C CJ2 Section Q-Q Q JCM Width across flats B1 H1 A AL F H N MA MB Width across flats B1 ZZ + 2 x Stroke S + Stroke N F H + Stroke A AL H1 CM2 2 x 4

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

C95 Rod Side Trunnion Style 126 to 200 st ZZ Z Bore size (mm) CP95 1 to 50 st 51 to 100 st 101 to 125 st 20 25 32 40 46 131 156 181 NCM 51 136 161 186 211 TV TV ZZ + Stroke 51 138 163 188 213 62 155 180 205 230 NCA Clevis pin and snap ring are shipped together.

CNA

MLGC Taper ring Steel ball CNG P q MNB f CNA R R CNS CLS CLQ MLGP RLQ MLU ML1C Manual override for unlocking DEven if the air supply is blocked or exhausted, lock release is possible. The fail safe mechanism locks again when the manual override is released.

CNA

1 o q $8 y $1 r #5 B A CL CL1 MLGC @3 !4 %0 !3 #9 @8 #6 $0 w #0 $5 $7 $3 $9 %1 $4 @1 @4 !8 @0 !7 !

Vacuum Pad

-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3B-Y2AK3-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK6-B5 P.51 ZP3B-Y2AK15-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK10-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK20-B5

Vacuum Pad

-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3B-Y2AK3-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK6-B5 P.51 ZP3B-Y2AK15-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK10-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK20-B5

Vacuum Pad

-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3B-Y2AK3-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK6-B5 P.51 ZP3B-Y2AK15-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK10-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK20-B5

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

0, Terminal i, Metal joint q, w, Gasket r, Receptacle assembly Manifold block !0, Metal joint q, w, Gasket r End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring y, u End plate (D) !

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

J type J type fitting assembly procedure Pull out the lever pin q. Rotate the lever assembly w to align the holes on the lever assembly w and the base e. Insert the lever pin q into the holes to fix the lever assembly w. 1 !

KR

(mm) 6 3-applicable tubing Weight (g) Model D Note) L2 P L1 Q M FR soft nylon FR double layer KRU06-00 12.8 10 20 24.5 27.5 30 37 12.8 15.2 18.5 20.9 Note) D: Max. diameter 11.7 17 10.4 4.2 8 KRU08-00 15.2 42.5 13.7 18.5 25.6 17.7 12 10 KRU10-00 18.5 48 16.1 21 40 28.4 16 12 KRU12-00 20.9 51 18.1 22 57.4 45.4 23 Plug-in Y: KRU Effective area (mm 2) Applicable tubing O.D.

CNA

MLGC CNA Taper ring Steel ball CB P q f CV/MVG R R CXW CXS CXT MX MXU MXS MXQ Standard manual override lock release MXF MXW Even if air is cut or exhausted, lock release is possible using a wrench. When override is released, lock is engaged again as a fail safe.

Table of Contents

Unit Series AC10A to 40A Dimensions AC10A/20A A N F E P K C G G IN OUT Q Q F.R.L.