45

CC-LINK System Master unit: AJ61BT11 A1SJ61BT11 AJ61QBT11 A1SJ61QBT11 Uni-wire H System Send unit: SD-H2 SYJ No. of output points, 16 points SX No. of output points, 16 points No. of output points, 16 points a) 2-wire type DG Power supply 24 V 0 V 24 V 0 V D G D G 24 V 0 V Slave unit (S1 unit) Slave unit (S1 unit) Slave unit Master station (S1 unit) FG SG B A FG SG B A FG SG B A SG B

Model: 5 (VP500), Pilot: Internal Pilot, Electrical Entry: D (DIN Terminal), Port Size: 03 (3/8"), Thread: N (NPT), Switch Electrical Entry: M (M12 Connection, OMRON), Check Valve: None, Throttle: 10 (ø1 Fixed Orifice), Max. Operating Pressure: X555 (0.7 MPa)

Model: 5 (VP500), Pilot: Internal Pilot, Electrical Entry: D (DIN Terminal), Port Size: 03 (3/8"), Thread: N (NPT), Switch Electrical Entry: M (M12 Connection, OMRON), Check Valve: None, Throttle: 15 (ø1.5 Fixed Orifice), Max. Operating Pressure: X555 (0.7 MPa)

Model: 5 (VP500), Pilot: Internal Pilot, Electrical Entry: D (DIN Terminal), Port Size: 03 (3/8"), Thread: N (NPT), Switch Electrical Entry: M (M12 Connection, OMRON), Check Valve: None, Throttle: Variable Throttle, Max. Operating Pressure: X555 (0.7 MPa)

Model: 5 (VP500), Pilot: Internal Pilot, Electrical Entry: D (DIN Terminal), Port Size: 03 (3/8"), Thread: F (G), Switch Electrical Entry: M (M12 Connection, OMRON), Check Valve: None, Throttle: Variable Throttle, Max. Operating Pressure: X555 (0.7 MPa)

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] Other, Pipe Port Type: G, Port Size: 3/8, Pressure Rating(MPa): 0.25 to 0.7, Driving Type: Pilot Type Spool

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] Other, Pipe Port Type: NPT, Port Size: 3/8, Pressure Rating(MPa): 0.25 to 0.7, Driving Type: Pilot Type Spool

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] Other, Pipe Port Type: NPT, Port Size: 3/8, Pressure Rating(MPa): 0.25 to 0.7, Driving Type: Pilot Type Spool

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] Other, Pipe Port Type: NPT, Port Size: 3/8, Pressure Rating(MPa): 0.25 to 0.7, Driving Type: Pilot Type Spool

Model: VP500, Pilot: Internal Pilot, Electrical Entry: DIN Terminal, Port Size: 3/8", Thread: NPT, Switch Electrical Entry: M12 Connection, OMRON, Check Valve: None, Throttle: ø1 Fixed Orifice, Max. Operating Pressure: 0.7 MPa

Model: VP500, Pilot: Internal Pilot, Electrical Entry: DIN Terminal, Port Size: 3/8", Thread: NPT, Switch Electrical Entry: M12 Connection, OMRON, Check Valve: None, Throttle: ø1.5 Fixed Orifice, Max. Operating Pressure: 0.7 MPa

AC Servo Motor Driver (Pulse input type/Positioning type ）

This connection example complies with the requirement of ISO/EN ISO 13849-1 category 3 PL d. 24 V EMG S4 S3 KM1 S2 KM1 Fuse K3 +24 V XS0 XS1 Z00 Z10 Z20 KM1 Safety relay module MELSEC (QS90SR2S) Power supply Control circuit KM1 Driver Servo amplifier X0 COM0 24G X1 COM1 Z01 Z11 Z21 CN8 Control circuit STO1 S1 or EMG (Note) EMG STO2 STOCOM K3 TOFB1 TOFCOM 0 V TOFB2 20 S1: STO shut-off switch

High Vacuum Angle Valve

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2018 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printing WY 9520KS Printed in Japan. D-G

0.4

Note 1) 25P Note 1) 26P Top entry 20P Top entry Top entry Connector entry direction Connector entry direction Connector entry direction P. 17 P. 21 P. 25 P. 29 Top entry Side entry Top entry Top entry Side entry Side entry Without cable Without cable Without cable Without cable S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 Note 2) Note 2) Note 2) Note

AC Servo Motor Driver (Network card type ）

This connection example complies with the requirement of ISO/EN ISO 13849-1 category 3 PL d. 24 V EMG S4 S3 KM1 S2 KM1 Fuse K3 +24 V XS0 XS1 Z00 Z10 Z20 KM1 Safety relay module MELSEC (QS90SR2S) Pow er supply Control circuit KM1 Driver Servo amplifier X0 COM0 24G X1 COM1 Z01 Z11 Z21 CN8 Control circuit STO1 S1 or EMG (Note) EMG STO2 STOCOM K3 TOFB1 TOFCOM 0 V TOFB2 20 S1: STO shut-off sw

CATALOG

2.2 0.19 3.4 1 1 VX3324-03 2.2 0.19 3.4 3/8 (10A) 0.3 VX3234-03 3 0.33 6 0.6 VX3334-03 3 0.33 6 0.15 VX3244-03 4 0.5 9 0.3 VX3344-03 4 0.5 9 Courtesy of Steven Engineering, Inc. !

V

2.2 0.19 3.4 1 1 VX3324-03 2.2 0.19 3.4 3/8 (10A) 0.3 VX3234-03 3 0.33 6 0.6 VX3334-03 3 0.33 6 0.15 VX3244-03 4 0.5 9 0.3 VX3344-03 4 0.5 9 Courtesy of Steven Engineering, Inc. !

ITV

(Error number 5) 4 points preset input type Brown Blue S1 White Vs Black S2 Vs: Power supply 24 VDC (Negative common) One of the preset pressures P1 through P4 is selected by the ON/OFF combination of S1 and S2. S1 OFF ON OFF ON S2 OFF OFF ON ON Preset pressure P01 P02 P03 P04 For safety reasons, it is recommended that one of the preset pressures be set to 0 MPa.

20

VMG11-02-X35 VMG11-03-X35 VMG11-N02-X35 VMG11-N03-X35 VMG11-F02-X35 VMG11-F03-X35 Pipe part no. P5670127-100-X33 P5670127-300-X33 P5670127-600-X33 Part No.

20

SMC CORPORATION Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 FAX: 03-5298-5362 1st printing QU printing QU 00 Printed in Spain