0.4

Built-in silencer, direct exhaust (-S) Special wiring specifications (-K) C6 L6 P.43 P.44 P.45 P.52 D-sub connector Terminal no.

0.4

When ordering a double check block, order the DIN rail mounting [-D]. 1 station 16 16 stations VVQ1000-FPG-06...6-station manifold VQ1000-FPGC4M5-D, 3 sets VQ1000-FPGC6M5-D, 3 sets Bracket Assembly Double check block Part no.

Basic type / Direct mount type Series CY3B/CY3R

Note 4) D-Z7 and D-Y types cannot be mounted. 25 to 63 (mm) Auto switch model D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W A B C D D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-A9 D-M9 D-M9W D-A9 D-M9 D-M9W D-M9 D-M9W D-A9 D-M9 D-M9W D-A9 Bore size (mm) 25 32 40 50 63 19 23 18 98 94 99 42 38 43 75 79 74 22.5 26.5 21.5 107.5 103.5 108.5 45.5 41.5 46.5 84.5 88.5 83.5

V100

) (D, Y) VS N.C.

High Purity Chemical Valve

Dimensions LLCmA-mm-C Stations 4 x Mounting hole for W Y A K D L3 L2 L1 (Max.

SQ1000/2000

Refer to w. r Option Nil 02 to 24 B None DIN rail length specified Note 2) 1 to 12 (24) Note 1) D side P All stations with back pressure check valve Special specification wiring Note 3) (except for double wiring) 1 to 9 (18) K J T D side D side D side U side D side U side D side U side 1 to 8 (16) 1 to 10 (16) Labeling plate (only for valves with side port specification) External pilot specification

Sine Cylinder Series REC

Auto Switch Mounting Height (mm) Auto Switch model D-B5 D-B64 D-B59W D-G5NTL D-H7C D-C7 D-C80 D-H7 D-H7W D-H7NF D-H7BAL D-G39 D-K39 D-A33 D-A34 D-A9 D-M9 D-M9W D-C73C D-C80C D-A44 Bore size (mm) Hs Hs Hs Hs Hs Hs 20 24.5 27 62 72 24 27.5 25 27 29.5 64.5 74.5 26.5 30 32 30.5 33 68 78 30 33.5 40 35 37.5 72.5 82.5 34.5 38 REA REB REC CY CX MQ RHC RZQ D-X Individual -X 1039 Series REC Operating

Sine Cylinder Series REC

Auto Switch Mounting Height (mm) Auto Switch model D-B5 D-B64 D-B59W D-G5NTL D-H7C D-C7 D-C80 D-H7 D-H7W D-H7NF D-H7BAL D-G39 D-K39 D-A33 D-A34 D-A9 D-M9 D-M9W D-C73C D-C80C D-A44 Bore size (mm) Hs Hs Hs Hs Hs Hs 20 24.5 27 62 72 24 27.5 25 27 29.5 64.5 74.5 26.5 30 32 30.5 33 68 78 30 33.5 40 35 37.5 72.5 82.5 34.5 38 REA REB REC CY CX MQ RHC RZQ D-X Individual -X 1039 Series REC Operating

Sine Cylinder Series REC

Auto Switch Mounting Height (mm) Auto Switch model D-B5 D-B64 D-B59W D-G5NTL D-H7C D-C7 D-C80 D-H7 D-H7W D-H7NF D-H7BAL D-G39 D-K39 D-A33 D-A34 D-A9 D-M9 D-M9W D-C73C D-C80C D-A44 Bore size (mm) Hs Hs Hs Hs Hs Hs 20 24.5 27 62 72 24 27.5 25 27 29.5 64.5 74.5 26.5 30 32 30.5 33 68 78 30 33.5 40 35 37.5 72.5 82.5 34.5 38 REA REB REC CY CX MQ RHC RZQ D-X Individual -X 1039 Series REC Operating

Proposals for Energy Saving

KNL (mm) Model Nozzle size D Outside diameter L1 1.5 2 2 2.5 2.5 3 1.5 2 2 2.5 2.5 3 6 6 8 8 10 10 6 6 8 8 10 10 300 300 300 300 300 300 600 600 600 600 600 600 KNL3-06-150 KNL3-06-200 KNL3-08-200 KNL3-08-250 KNL3-10-250 KNL3-10-300 KNL6-06-150 KNL6-06-200 KNL6-08-200 KNL6-08-250 KNL6-10-250 KNL6-10-300 O.D.

13

06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 (Mounting hole) Applicable tubing diameter M I J K L M N O P Model ZH05BS-06-06 ZH05BL-06-06 ZH07BS-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 60 12.8 3.2 26 5.8 2 32 60 12.8 3.2 26 5.8 2 32 75 15.3 4.2 28 7.5 3

Table of Contents

C D E F Dimensions Part no.

One-touch Fittings

Size, Connection Thread: M, R, Rc Oval Type Dimensions Plug: KQ2P Applicable fitting size d Model D L A Weight [g] 2 KJP-02 3 17 5.1 0.1 3.2 KQ2P-23 5 31.5 18.2 1 4 KQ2P-04 6 32 18.7 1 6 KQ2P-06 8 35 21.7 1 8 KQ2P-08 10 39 24.8 2 10 KQ2P-10 12 43 27.4 3.5 12 KQ2P-12 14 45.5 28.5 5 16 KQ2P-16 20.9 47 26.4 8 A L D d Applicable fitting size d Adapter: KQ2N (Gasket seal) Applicable fitting size

•

as standard " > ~;M3 xO.5 E:MsxO.6 ;K ,L y , Model 'PI>; ; B ~t D.

Prevents Micro-Bubbles

Dimensions LLCA--C Stations 4-Mounting hole for W Y A K D L3 L2 L1 (Max.

AR20-B to AR60-B

mounting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J M D U 75 Regulator AR10-A Series Regulator AR20-B to AR60-B Series Regulator with

JIS Standard Hydraulic Cylinder

Auto switch model Cylinder model Bore size (mm) 80 63 50 40 32 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V Note 2) BA7-063 BA7-063 BA7-080 BS5-160 BS5-180 CH2E/H/F D-F5/J59 D-F5W/J59W D-F5BA/F59F/F5NT D-A5/A6/A59W BT-06 BT-06 BT-06 BT-08 BT-16 BT-18 The figure shows how auto switch models, D-M9(V), M9W(V), and M9A(V) are mounted.

AC Servo Motor Driver (Pulse input type/Positioning type ）

H T E d W T D L Max.

Modular Type Air Filter Series AF

Note 3) Bowl assembly for AF30 to 60 models comes with a bowl guard (steel band material). 26 AF10 to 60 Dimensions L AF10, 20 AF50, 60 A G D Bracket (Option) L Bracket (Option) F D M G K K F M J J B E E B H OUT IN C OUT IN H C Port size OUT OUT Port size o s AF10: 25 AF20: 40 Drain A P Min. clearance for maintenance AF30, 40, 40-06 L Bracket (Option) A D G F M K J B E Drain Min. clearance

5 Port Solenoid Valve Series VQZ1000/2000/3000

KQ2P-08 KQ2P-10 L A Dimensions (mm) Applicable fitting size d Model A L D D KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 3.2 6 8 10 12 31.5 32 35 39 43 3.2 4 6 8 10 16 16 18 20.5 22 Silencer (for manifold EXH port) Silencer is installed in the manifold EXH port. 63 38 22 13 Silencer part no.