Body Size: Applicable AC Size: AC30, Handle Operation: Single Action, Thread Type: G, Port Size: 1/4, Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: Black, Handle Material: Metal, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: Applicable AC Size: AC30, Handle Operation: Single Action, Thread Type: G, Port Size: 3/8, Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: Black, Handle Material: Metal, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: 30 (Applicable AC Size: AC30), Handle Operation: Single Action, Thread Type: Rc, Port Size: 02 (1/4), Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: K (Black), Handle Material: M (Metal), Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: 30 (Applicable AC Size: AC30), Handle Operation: Single Action, Thread Type: F (G), Port Size: 02 (1/4), Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: K (Black), Handle Material: M (Metal), Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: 30 (Applicable AC Size: AC30), Handle Operation: Single Action, Thread Type: F (G), Port Size: 03 (3/8), Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: K (Black), Handle Material: M (Metal), Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Clean Regulator/Fluororesin Type

Insert bushing Insert bushing LQ-2B07 Nut LQ-2B03 Nut LQ-2N07 LQ-2N03 Tubing Collar Tubing O.D. 1/4" LQ-2U07 (Basic size) Tubing O.D. 1/8" LQ-2U03 (Reducer type) How to order fitting parts Tubing LQ 2 U 03 Type U is recommended when changing the tubing size. Tubing size Symbol Tubing O.D.

Fluoropolymer Tubing Variations

KM P.502 P.503 KF M H/DL L/LL KC KK KK130 FEP Tubing (Fluoropolymer) TH/TIH Series Soft Fluoropolymer Tubing TD/TID Series DM Modified PTFE Material FEP Material KDM KB Flexibility improved by approx. 20% (Compared with SMC TL/TIL Series) Suitable for applications which require flexibility. This has better resistance in chemical environments.

15

D-M9PA(V) D-M9BA(V) 7 13 38 63 D-M9NA(V) 8 14 41 68 Auto switch model 0.5 m (Nil) 1 m (M) 3 m (L) 5 m (Z) Lead wire length Dimensions (mm) D-M9A Indicator light Slotted set screw (flat point) Mounting screw M2.5 x 4 L Stainless steel 2 24 2.8 500(1000)(3000)(5000) 0.2 3 4 6 Most sensitive position 2.6 D-M9NAV/D-M9PAV D-M9BAV 500(1000)(3000)(5000) Mounting screw M2.5 x 4 L Stainless steel

Series VQ Base Mounted Metal Seal/Rubber Seal

Write sequentially from the 1st station on the D side.

Body Size: 30 (Applicable AC Size: AC30), Handle Operation: Single Action, Thread Type: F (G), Port Size: 03 (3/8), Mounting: without Mounting Option, Silencer: S (w/Built-in Silencer, EXH Port), Handle Color: K (Black), Handle Material: M (Metal), Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

KPQ/KPG

Order KP H 06 KP P 08 Q 01 KQ2 Applicable fitting size Clean One-touch fittings Made to Order KQB2 04 06 08 10 12 4 6 8 10 12 Specifications X53 With pipe tape Grease-free Symbol Q G KS KX Specifications (metal part materials) Brass (electroless nickel plated) Stainless steel 304 Rubber material: EPDM (Fluorine-coated) X193 Note 1) Gasket: M-5G3 (Stainless steel 316, Special FKM) Note 2) KM

Environment

LEF D-M9NAV D-M9NA D-M9BA D-M9BAV D-M9PAV D-M9PA Auto switch model In-line Perpendicular In-line Perpendicular In-line Perpendicular Electrical entry direction LEJ 3-wire 2-wire Wiring type NPN PNP Output type LEL 24 VDC relay, PLC IC circuit, Relay, PLC Applicable load 5, 12, 24 VDC (4.5 to 28 V) Power supply voltage LEM 10 mA or less Current consumption 24 VDC (10 to 28 VDC) Load voltage

TABLE OF CONTENTS

Listed and CSA Certified for Hazardous LocationsClass I, Div 1, Group C and D Class II, Div 1, Groups E, F, and G; Div 2 Groups A,B,C,D,E,F, AND G. Mtg.

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25

CJ5-S

Applicable bore size (mm) D B1 C d H1 Part no.

CJ5-S

Applicable bore size (mm) D B1 C d H1 Part no.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

from the D side.

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

area (mm2) 2.1 4.0 Model L B D E F MS-5H-4 MS-5H-6 15.5 16.5 7 8 1.8 2.5 7 8 6.5 8.5 Width across flats B Hose Elbow: MS-5HLH-4/6 Weight (g) 4.2 6.2 Effective area (mm2) 1.4 2.5 B Model L A C D E F M N Width across flats 7 MS-5HLH-4 MS-5HLH-6 15.8 17.8 12 13.5 7 8 8.5 9.5 1.8 2.5 7 8 6.5 8.5 15 16 5.5 6 Universal Elbow: MS-5UL Universal Tee: MS-5UT Width across flats 7 Width across flats

Body Size: Applicable AC Size: AC30, Handle Operation: Single Action, Thread Type: Rc, Port Size: 3/8, Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: Red, Handle Material: Resin, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: 30 (Applicable AC Size: AC30), Handle Operation: Single Action, Thread Type: Rc, Port Size: 03 (3/8), Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: Red, Handle Material: Resin, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa