XL

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46. 24 High Vacuum Angle Valve Series XLD, XLDV Dimensions (mm) 1in=25.4mm XLDV-25/With solenoid valve 11 C Fn (KF flange) Fb (K flange) C Port R (exhaust port) K K 2.5 41.5 Initial exhaust solenoid valve Main exhaust solenoid valve G A B 8 10.5 Port P (pressure port) A Max 10.5 (except connector

High Vacuum Angle Valve, XL Series

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46. 24 High Vacuum Angle Valve Series XLD, XLDV Dimensions (mm) 1in=25.4mm XLDV-25/With solenoid valve 11 C Fn (KF flange) Fb (K flange) C Port R (exhaust port) K K 2.5 41.5 Initial exhaust solenoid valve Main exhaust solenoid valve G A B 8 10.5 Port P (pressure port) A Max 10.5 (except connector

Secondary Batteries

Note 2) Assembly of a bracket and set nuts (90-AR30 and 90-AR40, 90-AR25(K) to 90-AR40(K)) Including 2 mounting screws for the 90-AR50(K) and 90-AR60(K). Note 3) The only difference from the standard specifications is the adjusting spring for the regulator. It does not restrict the setting of 0.2 MPa or more. Note 4) : For thread type: NPT.

SZ3000

SD RD 24 V OV VCAM FG CAM Vt BS+ BDH BDL BSFG 24 V 0 V 24 V 0 V +24V 24G DA DB DG FG Description Description Description LED LED LED PWR. Light ON with transmission power input, light Off without it Green light ON with circuit power input PWR.

SZ3000

SD RD 24 V OV VCAM FG CAM Vt BS+ BDH BDL BSFG 24 V 0 V 24 V 0 V +24V 24G DA DB DG FG Description Description Description LED LED LED PWR. Light ON with transmission power input, light Off without it Green light ON with circuit power input PWR.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Back pressure check valve A 4 (A) 4 (B) 2 Built-in Nil K None A 2 B SOL.b SOL.a 3 (R) 5 (R) 1 (P) Pilot specifications 4 position dual 3 port valve: N.O./N.O. External pilot Nil R Internal pilot (A) 4 (B) 2 B Dual 3 port valves are not available with external pilot specifications. SOL.b SOL.a 3 (R) 5 (R) 1 (P) 4 position dual 3 port valve: N.C./N.O.

Air Pilot Operated

\ LLrJ \ F".k t t t I * DI"ENSIONS DIRECTIOI{AL AIR YALVE SUBPLATES SERIES NVSA 4)24 GLn.I'l; Sub.pletes ar3 heavy duty aluminum dl castings.

Air Pilot Operated Series NVSA

\ LLrJ \ F".k t t t I * DI"ENSIONS DIRECTIOI{AL AIR YALVE SUBPLATES SERIES NVSA 4)24 GLn.I'l; Sub.pletes ar3 heavy duty aluminum dl castings.

Dedicated Controller Series LC1 Uniaxial Type

LJ1H102B-K LJ1H202F-K LJ1H202A-K LJ1H303A-K Ball screw High rigidity direct acting guide Without brake 100W 2H 200W 50W 100W 200W 50W 100W 200W 100W 100W 100W 100W 200W 3H 1S 2S 3S 1M 2M 3M 1VH Note 1) Slide screw Slider guide Slide screw High rigidity direct acting guide Ball screw High rigidity direct acting guide With brake Note 1) This controller includes the accessories listed below.

OMU0023

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

Body Size: 20, Thread: Rc, Port Size: 02 (1/4), Handle/Bonnet Material: A (Flame Resistant PBT)

Regulator Unit Combination: [Other FRL Combination Devices] Other FRL Combination Device, Port Size: Rc1/4, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: -, Size

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50 How to Order 30 03 RZ VHS Made to Order Standard Nil Body: Red X1 Built-in silencer (EXH port) X502 Pressure relief Optional specifications 3 port valve Des

Pressure relief 3 port valve VHS20 VHS30 VHS40 VHS40-06 VHS50 IN OUT Spacer part no. AC20 AC25, AC30 AC40 AC40-06 AC50, AC60 Note) Y200 Y300 Y400 Y500 Y600 Y200T Y300T Y400T Y500T Y600T Spacer with bracket Note) Although connection to AC60 is possible, the flow rate may decrease due to the mounting position. 1936

OMS0020

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

Plate Cylinder with Lock Series MLU

H2 P ZZ1 + Stroke GB GA Unlocks when pressurized BP unlocking port Front cylinder port GC D GW GY NH (manual unlocking unit) Dust cover P Rear cylinder port NS + Stroke NG NF NJ NJ NI Width across flats KA MM Width across flats B1 EY EY NY C H1 AL 4-ND through 4-ET B A NB NA K 2 x 4-NC counter bore Prepared hole diameter NE S + Stroke H ZZ + Stroke BY BB BS + Stroke BA 2-BT (mm) Stroke range

mlu

H2 P ZZ1 + Stroke GB GA Unlocks when pressurized BP unlocking port Front cylinder port GC D GW GY NH (manual unlocking unit) Dust cover P Rear cylinder port NS + Stroke NG NF NJ NJ NI Width across flats KA MM Width across flats B1 EY EY NY C H1 AL 4-ND through 4-ET B A NB NA K 2 x 4-NC counter bore Prepared hole diameter NE H S + Stroke ZZ + Stroke BY BB BS + Stroke BA 2-BT (mm) Stroke range

MLU

NJ NJ NI Width across flats KA MM Width across flats B1 EY EY NY C H1 AL 4-ND through 4-ET B A NB NA K 2 x 4-NC counterbore Prepared hole diameter NE H S + Stroke ZZ + Stroke BY BB BS + Stroke BA 2-BT (mm) Stroke range Model A BY D GW GY H H1 B1 C B AL BA BB BP BS BT ET GA GA1 GB GC GC1 EY 22 26 30 35 19.5 23.5 27 32 24 28 32 39 8 6.5 9 12 9 6.5 8 10 17 19 22 27 MLUB25 MLUB32 MLUB40 MLUB50

VM

Application 2 port 3 port Actuator VM220-02-00 VM230-02-00 Polyacetal roller Basic Roller lever VM220-02-01 VM220-02-01S VM230-02-01 VM230-02-01S VM-08A VM-07AS VM-07A VM-06AS VM-06A VM-05A VM-02AS VM-02A VM-01AS VM-01A Mechanical operation Manual operation Hard steel roller One way roller lever VM220-02-02 VM220-02-02S VM230-02-02 VM230-02-02S Polyacetal roller Hard steel roller Straight

VM

Fluid temperature Effective area (Cv) 5 to 60C (No freezing) 19mm2 (1.0) Recommended lubricant No required/Turbine oil #1 (ISO VG32) Port size (Nominal size) Rc(PT) (8A) 111g 1 4 Weight (Basic) Model No. of ports Actuator part No. 2 port 3 port Application Actuator Basic Polyacetal roller VM220-02-00 VM230-02-00 VM-08A VM-07AS VM-07A VM-06AS VM-06A VM-05A VM-02AS VM-02A VM-01AS VM-01A VM220

VM

Application 2 port 3 port Actuator VM220-02-00 VM230-02-00 Polyacetal roller Basic Roller lever VM220-02-01 VM220-02-01S VM230-02-01 VM230-02-01S VM-08A VM-07AS VM-07A VM-06AS VM-06A VM-05A VM-02AS VM-02A VM-01AS VM-01A Mechanical operation Manual operation Hard steel roller One way roller lever VM220-02-02 VM220-02-02S VM230-02-02 VM230-02-02S Polyacetal roller Hard steel roller Straight