Vacuum

(Nr'min): o L o [ r 1 l Lr e_l r Q,Q , = Q r = S x 11.1 (N/min) o, mean suction flow of a an ejector (Ny'min max suction flow spec for the ejector from the catalog (Nr'min), Vacuum Eiector System Circuit flow capacity tor the piping system (Nd/ min), Q, S the etfective cross-sectional area of tubing based on inside diameter and total lenoth (mm,). See graph below.

Digital Flow Switches

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

Stainless Steel 316 Fittings

Construction e q r q q Principal Parts Material Description No.

5 Port Solenoid Valve

connector) q SV e SYJ t t SZ VF VP4 VQ 1/2 y VQ 4/5 VQC 1/2 u i VQC 4/5 VQC 4/5 @0 @1 VQZ o SQ !

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Base material: Aluminum Fluid: Air Base material: Aluminum Fluid: Air Common SUP type Individual SUP type Common SUP type Individual SUP type u u e t u e t u w w t e y r q y i OUT t e y r q y i w i w i y r q y r q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com o

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

Booster Regulator/Air Tank

For VBATlS1 (Stainless Steel) Model VBAT05S1-l VBAT10S1-l VBAT20S1-l VBAT38S1-l Accessory kit Drain valve (When selecting an option) VBAT5S-Y-4 VBAT-V1 VBAT10S-Y-4 VBAT20A-Y-4 Model VBAT05Al-SV-Q VBAT10Al-SV-Q VBAT20Al-RV-Q VBAT38Al-RV-Q Accessory kit Safety valve Drain valve VBAT5A-Y-2 VBAT-S (Set pressure: 2 MPa) VBAT-V1 VBAT10A-Y-2 VBAT20A-Y-2 VBAT-R (Set pressure

0.55

Exploded view q r How to Calculate the Flow Rate u For obtaining the flow rate, refer to front matters 44 to 47. t y e o i o Magnifying figure Self-up screw 2 1 3 1504

Modular Type Regulators Series AR

Example) AR30K-03BE-1NR q w e r t y Made to Order (Refer to pages 354 and 355 for details.)

Modular/F.R.L. Units Series AC

D 53 70 Q 46 54 L 41 50 J 239(max.242) 276(max.280) K 59 75 U 40 54 V 53 70 A NPT 3/8 NPT 1/2 W 2.3 2.3 X M38 X 1.5 M42 X 1.5 DD 34.5 41 CC 38.5 42.5 E 30 38 F 83(max.86) 88(max.92) T 8 10.5 Y 31 35.5 Z 7 7 AA 19 21 H 3.5 1.5 S 6.5 8.5 AW30 AW40 6 Series AW20~40 Filter Regulator Standard (Manual Drain) PANEL FITTING IN OUT Z CC Bowl Detail EE (AW20) AA K L V U X W T J S Y Q F Bracket and

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Combination Cylinder

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

KR

Note) D1: Max. diameter Union Y: KRU Effective area (mm2) Applicable tubing O.D.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

High Purity Chemical Valve

Lock nut Locks the adjustment knob position. 463 Series LVC Construction Standard type N.C. type N.O. type Double acting type q q q PB PB PB e w e w e w PA PA PA A B A B A B r t y With reducer With flow rate adjustment With bypass u i PB i PA t y A B Suck back (single type) Suck back (unit type) i i i e P P q e P t y e t y e B A A B r w w r With indicator o Parts list No.

VEX1

At that time, the lower poppet valve y fully opens. Construction Component Parts Description No. q w e r t y u i o !0 !1 !

Dual Speed Controller with One-touch Fitting Series ASD

4 u t t q t u y !3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !5 Body B O-ring Electroless nickel plated Brass NBR r !

Magnetically Coupled Rodless Cylinder

0i q !4 !2 r @3 @7 o u y t @8 !8 !9 @2 CY3R10 2a 3a @0 !5 !6 @4 @9 @6 !0 i q !1 !4 !2 r @3 @7 @8 @5 o u y t @0 !8 !9 @2 CY3R15 to 63 2a 3a @0 @4 @9 @6 !5 !6 !3 !0 !1 !4 !2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !

AW

y y q q q IN OUT IN OUT IN OUT u u r u r t r t i i e Drain AW20(K) t w i y Drain q AW20K to AW60K (Filter Regulator with Backflow Function) IN OUT u A-A o Drain A r t i SMC K P C U O S L H o t A Drain Component Parts No.

LVQ

LQ1 Construction LVN 90 Degree turn type t TL/TIL LQ3 q e A B r w t y Multi-turn type (with indicator) A B A B Description No.