PSxx-OMU0008CN

(L) N02(L) F02(L) C01(L) A2(L) B2(L) R1/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 SUS630SUS304 () 51 g 51 g 48 g 47 g 54 g 46 g () 77 g 78 g 74 g 65 g 81 g 72 g +40 g 110 -5Pam 3/s 110 -10Pam 3/s 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0008CN-D 02 48.4 N02 48.9 42.6 7 M50.8 5 02R1/4 N02NPT1/4 -79No.PS-OMU0008CN-D F02 C01 M50.8 5 Rc1/8 G1/4 A2 B2 URJ1/4 TSG1/4 -80No.PS-OMU0008CN-D

Digital Pressure Switch

Option 1 Piping specification Nil No option 02 Rc1/4 S Lead wire (5 m) with M12 straight connector N02 NPT1/4 F02 G1/4 (ISO1179) L Lead wire (5 m) with M12 right angle connector Output specification Unit specification 27 2 settings NPN open collector 2 outputs Nil With unit conversion function 1 M Fixed SI unit 2 NPN open collector 1 output 43 1 setting + P Pressure unit: psi (initial value

High-precision Digital Pressure Switch ( compatible)

.: ZS-50-B) -14No.PS-OMV0004-H Piping Piping specification: -02 and -N02 After hand tightening, tighten the fitting using a spanner on the flat surfaces of the fitting. The tightening torque must be 8 to 12 Nm. Piping specification: -F02 After hand tightening, tighten the fitting using a spanner on the flat surfaces of the fitting. The tightening torque must be 4 to 5 Nm.

High-precision Digital Pressure Switch

.: ZS-48-A) -16No.PS-OMV0009-E Piping Piping specification: -02 and -N02 After hand tightening, tighten the fitting using a spanner on the flat surfaces of the fitting. The tightening torque must be 8 to 12 Nm. Piping specification: -F02 After hand tightening, tighten the fitting using a spanner on the flat surfaces of the fitting. The tightening torque must be 4 to 5 Nm.

NARM Series

Description No. 2 Common IN Individual IN Common IN Individual IN Bonnet Polyacetal Regulator NARM2500-A-N02 NARM2500-B-N02 NARM3000-A-N03 NARM3000-B-N03 9 Regulator 1 Component Parts 10 End plate R 1 No.

•

l~1 "fd" , ,01 R(PT)1IB M5 X 0.8 With One-touch fillings R{PT)1/4 Rc(PT)lIB 03 'I R(PT)318 02 Rc(PT)1/8 R(PT)1/2 Rc{PT)1/4 04 R(PT)lf4 F02 G(PF)118 f03 R(PT)3/8 G(PF)lIB F04 R(PT)112 G(PF)li4 NOI NPT1/8 lO-32UNF N02 NPTl14 NPT1/8 NPT3/8 N03 NPT1/8 NPT1/2 NPTli4 1'04 Needle Valve/Flow Rate Characteristics ASP330F ASP430F 400 6 'E o,7,08,OY; E 06 12 ~300 200 3 'E ( 0 4 % r !

Digital Flow Switch

. -70No.PF-OMO0005-F Dimensions (in mm) PFMB7201-02 PFMB7201-N02 -71No.PF-OMO0005-F PFMB7201-02L PFMB7201-N02L -72No.PF-OMO0005-F PFMB7201S-02 PFMB7201S-N02 -73No.PF-OMO0005-F PFMB7201S-02L PFMB7201S-N02L -74No.PF-OMO0005-F PFMB7201-F02 -75No.PF-OMO0005-F PFMB7201-F02L -76No.PF-OMO0005-F PFMB7201S-F02 -77No.PF-OMO0005-F PFMB7201S-F02L -78No.PF-OMO0005-F PFMB7201-C8 -79No.PF-OMO0005-F PFM7B7201

Digital Pressure Switch

MPa 0 1 MPa Positive pressure -0.100 to 2.00 MPa -0.1 MPa 0 2 Mpa : Analogue output is 0.8 [V] or 3.2 [mA] at the pressure A. -51No.PS-OMM0003-J Dimensions Z/ISE80(F)-02/N02/F02/C01/A2/B2/-C01: Rc1/8 -F02: G1/4 -A2: URJ1/4 -B2: TSJ1/4 -52No.PS-OMM0003-J Z/ISE80(F)-02L/N02L/C01L/A2L/B2L/-C01L: Rc1/8 -A2L: URJ1/4 -B2L: TSJ1/4 -53No.PS-OMM0003-J With bracket (Rear piping) ZS-24-A With bracket

PFM7

Port size Instruction manual Symbol Description Flow rate range 10 With instruction manual (Leaflet: Japanese and English) None Nil N 25 50 11 01 02 N01 N02 F01 F02 C4 C6 C8 N7 Rc1/8 Rc1/4 NPT1/8 NPT1/4 G1/8 G1/4 Unit specification With unit switching function M Nil Fixed SI unit Note) Note) Fixed unit: Real-time flow rate: l/min Accumulated flow: l 4 (5/32") one-touch fitting 6 one-touch

High-precision Digital Pressure Switch

.: ZS-50-B) -13No.PS-OMW0002-C Piping Piping specification: -02 and -N02 After hand tightening, tighten the fitting using a spanner on the flat surfaces of the fitting. The tightening torque must be 8 to 12 Nm. Piping specification: -F02 After hand tightening, tighten the fitting using a spanner on the flat surfaces of the fitting. The tightening torque must be 4 to 5 Nm.

ARX Series

ARX Series Specialty Regulators Regulator for 290psi (2MPa) ARX20, 21 Specifications ARX20 Model Piston regulator Regulator construction Relief type Relief mechanism NPT 1/8, 1/4 Piping port size NPT 1/8, 1/4 Pressure gauge port size 435 (3.0) Proof pressure psig (MPa) 290 (2.0) Maximum operating pressure psig (MPa) ARX20-N02 7~120 (0.05 to 0.85) Standard Regulating pressure range psig (MPa

lPSMt

NOTES: r Split ranging allows position control using 3 to I psi or 9 to 15 psi as signal pressure Within 0.5% for each 7.5 osi Within 1% for each 1.5 psi Within 0.5% for each 1.5 psi Within 0.5% for each 1.5 psi Within 0.3% for each 1.5 psi " For 1/2 split range add 1.5% to these values Use clean, dry, oil free air Recommended for air preparation: NAC 2030-N02 or NAC 2040-N02 filter, coalescer

lPSMt

NOTES: r Split ranging allows position control using 3 to I psi or 9 to 15 psi as signal pressure Within 0.5% for each 7.5 osi Within 1% for each 1.5 psi Within 0.5% for each 1.5 psi Within 0.5% for each 1.5 psi Within 0.3% for each 1.5 psi " For 1/2 split range add 1.5% to these values Use clean, dry, oil free air Recommended for air preparation: NAC 2030-N02 or NAC 2040-N02 filter, coalescer

Pneumatic Positioner IP300/IP3100

Split ranqinq allows position control using 3 to I psi or I lo 15 psi as signal pressure Within 0,5% for each 1 .5 osi Within 1% for each 1.5 DSi Within 0.5% for each 1.5 psi Within 0.3% for each 1.5 psi Within 0.5% for each 7.5 osi *Fof 1/2 split range add 1.5% to these values Use clean, dry, oil free air Recommended for air preparation: NAC 2030"N02 or NAC 2040-N02 filter, coalescer, regulator

1

VM230U-02-08A VM-08A 110 g Red VM220-02-30RA VM230-02-30RA VM220U-02-30RA VM230U-02-30RA VM-30AR 58 g Black VM220-02-30BA VM230-02-30BA VM220U-02-30BA VM230U-02-30BA VM-30AB Green VM220-02-30GA VM230-02-30GA VM220U-02-30GA VM230U-02-30GA VM-30AG Yellow VM220-02-30YA VM230-02-30YA VM220U-02-30YA VM230U-02-30YA VM-30AY Push button (Mushroom) Red VM220-02-32RA VM230-02-32RA VM220U-02-32RA VM230U

2

03-A 02-A IS10E-3003-A 04-A Cross spacer Note 6) Y14-M5-A Y24-01-A 02-A Y34-01-A 02-A Y44-02-A 03-A Y54-03-A 04-A Note 1) in part numbers for a round pressure gauge indicates a pipe thread type.

VM

plunger VM220-02-05 VM230-02-05 Polyacetal roller Hard steel roller Roller plunger VM220-02-06 VM220-02-06S VM230-02-06 VM230-02-06S Cross roller plunger VM220-02-07 VM220-02-07S VM230-02-07 VM230-02-07S Polyacetal roller Hard steel roller Toggle lever VM220-02-08 VM230-02-08 VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y VM220-02-30R VM-30AR Red Push button (Mushroom) VM-30AB Black

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Secondary Batteries

Applicable model 90-BM64 90-IDG50L 90-BM65 90-IDG75L, 100L *With cap bolts (2 pcs.) and spring washers (2 pcs.) 45 Clean Air Filter 90-SFD Series How to Order 90 2 0 SFD 0 C08 Series compatible with secondary batteries Port size Connection size Note 90 Material restriction Symbol C08 C10 C12 02 N02 F02 8 10 12 Clean One-touch fittings (Series KP) Clean air filter Rc 1/4 NPT 1/4 G 1/4 Size

I

ZSE5-02-27L Two Output NPN Open Collector 30V, 80mA ZSE5-02-67L Two Output PNP Open Collector 80mA ISE5-02-26L None (Analog Output) 1~5V(5%F.S.)