Smooth Cylinder/Low Speed Cylinder

32 29 28.5 29.5 22.5 23.5 25.5 26.5 27.5 28.5 24 25 25 25 28 27 29.5 30 28 33 32 29 28.5 29.5 22.5 23.5 25.5 26.5 27.5 28.5 24 25 32 32 31.5 30.5 33 33.5 29 34 33 30 29.5 30.5 23.5 24.5 26.5 27.5 28.5 29.5 25 26 40 40 36 35 37.5 38 32 39 36 35 32.5 35.5 26.5 29.5 29.5 32 31.5 34.5 28 31 50 50 41.5 40.5 43 43.5 40 46 44 42 40.5 42.5 34.5 36.5 37.5 39.5 39.5 41.5 36 38 63 63 48.5 47.5 50 50.5

NCG/CG1

WH Rod End Lock: -R Head End Lock: -H Bore size (mm) Bore size (mm) WH W P WA WB WH W P WA WB 20 M5 x 0.8 16 15(16) 30 M5 x 0.8 16 16 30 23 23 20 25 M5 x 0.8 16 15(16) 30 30 M5 x 0.8 16 16 25 25 25 32 Rc 1/8 16 15(16) 25 Rc 1/8 16 16 25 28.5 28.5 32 40 20 Rc 1/8 16 15(16) Rc 1/8 16 16 20 33 33 40 50 20 Rc 1/4 18 17(18) 40.5 Rc 1/4 18 18 20 40.5 50 63 47.5 20 Rc 1/4 18 17(18) Rc 1/4 18 18

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Instantaneous flow: L/min cfm Accumulated flow: L ft3 L3 IO-Link/ NPN/PNP Analog 1 to 5 V Analog 0 to 10 V*3 ZS-33-D ZS-33-F L4 IO-Link/ NPN/PNP Analog 4 to 20 mA + ZS-33-D *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 17 (18) AS22l1FG-02-04(S)A 4 8.2 AS22l1FG-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS22l1FG-02-08(S)A 8 13.2 23.9 33.2 (33.3) 14.2 18 (19) AS22l1FG-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 19 (20) AS32l1FG-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS32l1FG-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-10(S)A 10 15.9 26.7

Speed Controller with One-touch Fitting

-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 20 (21) AS321F-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS321F-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS321F-02-10(S)A 10 15.9 26.7 37 35.7 15.6

AC Servo Motor Driver (CC-Link Type ）

15.5.1 Power on and off procedures . 33 15.5.2 Stop . 33 15.5.3 Test operation . 34 15.5.4 Parameter setting . 35 15.5.5 Point table setting . 36 15.5.6 Actual operation . 36 15.6 Driver display . 37 15.7 Automatic operation mode . 39 15.7.1 What is automatic operation mode?

CG1

33 40.5 40.5 Hs 27 29.5 33 37.5 43 50 A 24 24 25 29.5 37 37 46.5 46.5 B 22.5 22.5 23.5 27 34.5 34.5 45 45 Hs 27 30 33.5 38 43.5 50.5 59 69.5 A 27 27 28 32.5 40 40 49.5 49.5 B 25.5 25.5 26.5 30 37.5 37.5 48 48 Hs 27.5 30 33.5 38 43.5 50.5 59 69.5 20 25 32 40 50 63 80 100 (mm) D-K5 D-G5W D-G59F D-G5 D-G5N D-K59N D-H7 D-H7W D-H7C D-H7BAL A 29 29 30 34.5 42 42 D-H7F Bore (mm) B 27.5 27.5

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Refer to page 6-5-33.

Soft Start-up Valve

)-A AVA5000-(F,N)06~10(B,G,S)(-R,Z)-A AVL2000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL3000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL4000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL5000-(F,N)06~10(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A Contents Page 1.

Hydraulic

A1 L1 R1 U1 NDH10 U(H8) E1 MM NX Applicable bore size (mm) Applicable bore size (mm) I-02 I-03 I-04 IA-04 Part no.

Modular F.R.L. Unit

-20 IS1000M-30 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 IS1000M-60 IS1000M-60 Y21001 (02) Y310-(01) 02 Y310-(01) 02 Y410-(02) 03 Y510-(02) 03 Y61003 (04) 06 (10) Y610(03) 04 (03) 04 Y610Note 5) Note 6) VHS40-06 02 03 04 E600VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50Note 6) E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 Note 6) 06 10 06 10 E60006 10 E600E100-M5 02 03 04

AC Servo Motor Driver (CC-Link Type ）

OFF: Lock is activated. 4 33 4.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

-12 SV 400 SYJ 200 70% 50% 10% SZ 0 MB 80 800 VP4 600 S0700 AS5000-02 AS420-02 400 VQ 200 VQ4 0 SV400 AN300 -KM12 T1209 VQ5 800 MB 100 VQC 600 AS5000-02 AS420-02 400 VQZ 200 SQ 0 VFS CS1 125 800 VFR 600 VQ7 AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Applicable related components For details

Compact Manifold Regulator Series ARM5

Direct mount VEA DIN rail mount VY2 Mounting position Direct mount Mounting position Symbol L R VBA VBAT Left DIN rail mount Right AP100 L side end block R side end block L side end block R side end block 33 33 50 50 50 50 SMC SMC SMC SMC 3.5 33 3.5 10 3.5 33 10 3.5 12.6 10 10 12.6 Direct mount DIN rail mount 481 Series ARM5A/B DIN Rail VVQ1000 90 7 L dimension Enter the No. for the desired

Base Mounted Metal Seal/Rubber Seal Series VQ

L dimension 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

0.

Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP (for VQZ100) This is used when changing piping location.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-02-08/AN200-2 Speed controller/Silencer 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 10 x 1 m) Speed controller/Silencer AS3301F-02-10/AN200-2 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 12 x 1 m) Speed controller/Silencer AS4001F-02-12/AN200-2 It is when the cylinder is

LEC-OM071xx

Byte 33 to byte 35 of the command format are specified as the SUB_CTRL field.

LEC-OM07605CN

PC_ _ ]). 5-33 5.2.4 ([Pr. PD_ _ ]) . 5-39 5.2.5 2([Pr. PE_ _ ]). 5-42 5.2.6 3([Pr. PF_ _ ]). 5-43 5.2.7 4([Pr.

Electric Actuators

Performance/Specifications General specifications LC5-1-T1-02 Part no.