High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

Table of Contents

-06S(-F20) ASR530F-03-08S(-F20) ASR530F-03-10S(-F20) ASR530F-03-12S(-F20) ASR630F-03-10S(-F20) ASR630F-03-12S(-F20) ASR630F-04-10S(-F20) ASR630F-04-12S(-F20) ASQ430F-02-06S(-F20) ASQ430F-02-08S(-F20) ASQ430F-02-10S(-F20) ASQ530F-02-06S(-F20) ASQ530F-02-08S(-F20) ASQ530F-02-10S(-F20) ASQ530F-02-12S(-F20) ASQ530F-03-06S(-F20) ASQ530F-03-08S(-F20) ASQ530F-03-10S(-F20) ASQ530F-03-12S(-F20) ASQ630F

Secondary Batteries

/Fixed Mounting Height Heavy Duty Stopper Cylinder Floating Joint /Standard Type /For Compact Cylinders /Stainless Steel Type Shock Absorber Rotary Table/Rack & Pinion Style P.33 P.34 Auto Switches D-M9BW(V)SDPC-900 D-M9BW(V)L-900 D-Y7BW(V)L-900 D-A90L-900 D-Z80L-900 P.62 P.63 P.64 P.65 P.65 P.66 Solid State Auto Switch Direct Mounting Style 90-JA 90-JB 90-JS 90-RB/RBC 92-MSQ P.35 P.35 P.35

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

PG PH C8, C10, C12, N9 N11 (-D) U D B (R) Stations 02, 03, When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

Modular/F.R.L. Units Series AC

Pressure Switch with Piping Adapter JIS Symbol IS1000E 30 03 Body size Description Symbol 20 30 40 Nil N Note) F Note) Thread type Rc NPT G + 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 Left Right Port size Pressure switch with piping adapter + Regulating pressure range Pressure display Lead wire length Symbol Mounting position Nil X250 P Note) X250-P Note) X202 X252 X202-P Note) X252-P Note) X201

Series KP/KPQ/KPG

P Polyolefin P White, Black Red, Blue Yellow, Green 20 P P 100 TPS P P P Soft Polyolefin P P 1ft = 0.3048 1in = 25.4mm 3 Series KP Clean One-Touch Fittings Recommended Applicable Tubing Polyolefin: Series TPH Soft polyolefin: Series TPS Tubing material 4, 6, 8, 10, 12 Tubing O.D.

Series KP/KPQ/KPG

P Polyolefin P White, Black Red, Blue Yellow, Green 20 P P 100 TPS P P P Soft Polyolefin P P 1ft = 0.3048 1in = 25.4mm 3 Series KP Clean One-Touch Fittings Recommended Applicable Tubing Polyolefin: Series TPH Soft polyolefin: Series TPS Tubing material 4, 6, 8, 10, 12 Tubing O.D.

Booster Regulator/Air Tank

Pressure gauge Pressure gauge Port size Applicable series Symbol Port size VBA10A-02 02 03 04 VBA1lA VBA2lA VBA4lA 1/4 3/8 1/2 VBA11A-02 Elbow silencer Silencer Combination of Thread Type and Options VBA20A-03 Body size Option Semi-standard Thread type Nil G N P P P P P P P P P P P P S P P P P P P P P P P GN P P P P P P P P P P P P GS P P P P P P P P P P LN P P P P LS P P GLN P P P

Compressed Air Preparation Filter

Combination example q A Spacer with bracket F S 2 x P (Port size) J M Line Filter AFF30-03-D 1 pc. Mist Separator AM30-03-D 1 pc. Spacer with Bracket Y300T-D 1 pc. R V1 V2 Q1 Q21 Q1 C Y300T-D U G Maintenance space E AFF30-03-D AM30-03-D 1 Q2 (Sizes 20, 40) Q1 (Size 30) Combination example w A Spacer with bracket N F 2 x P (Port size) J M S Mist Separator AM30-03-D 1 pc.

Plug-in/Plug Lead: Single Unit

5 (R1) 3 (R2) Circuit diagram Plug lead type Plug-in type Individual SUP spacer 03 04 03 04 VVQ5000-P-1(Plug-in type) VVQ5000-P-5(Plug lead type) 179 (Plug-in type) 133 (Plug lead type) 32 16 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 1 P 40.3 1(P) 4(A) 2(B) 03: Rc 3/8 04: Rc 1/2 1(P') 5(R1) 3(R2) Circuit diagram

CG5-S

(mm) Connection threads Model Connection threads Model M5 x 0.8 KGH04-M5 -01 -02 KGH06-M5 -01 -02 -03 KGH08-01 -02 -03 KGH10-01 -02 -03 -04 KGH12-02 -03 -04 KGH16-03 -04 M5 x 0.8 KGL04-M5 -01 -02 KGL06-M5 -01 -02 -03 KGL08-01 -02 -03 KGL10-01 -02 -03 -04 KGL12-02 -03 -04 KGL16-03 -04 4 4 R 1/8 R 1/4 R 1/8 R 1/4 M5 x 0.8 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2

VEX1

AS600-10 AS600-10 AS800-12 AS900-14 AS900-20 AN300-03 AN400-04 AN400-04 AN500-06 AN600-10 AN600-10 AN700-12 AN800-14 AN900-20 VEX3 23 4 03 04 VEX35004 06 10 VEX37010 12 VEX39014 20 1959 Series VEX3 How to Order Electrical entry (Only with solenoid) Body size Port size Symbol Body size Electrical entry Port size Port 3 (R) 1 (P), 2 (A) 01 02 02 03 04 04 06 10 10 12 14 20 Body size G Grommet

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360-03 VX2260-04 VX2360-04 2 3 4.5 2 0.59 1.2 2.4 0.59 1.2 1.5 0.6 0.2 1.5 0.6 1.5 3.0

VQ7-6/7-8

Dimensions inside are for sub-plate aperture Rc 3/4. 3-10-33 34 Series VQ7-8 Manifold Option Parts Individual EXH spacer VV72-R-03/04 Individual SUP spacer VV72-P-03/04 R1/R2 individual EXH spacer VV72-R2-04 Reverse pressure spacer AXT512-19A-1 2 Silencer box AXT512-26A SMC SMC 223.5 211.5 183.5 171.5 120.5 140 PA B PE PE PA B PE PE PE P 80.5 P R1 R2 78 R2 R1 EA EB Courtesy of Steven Engineering

VQ7-6/7-8

Dimensions inside are for sub-plate aperture Rc 3/4. 3-10-33 Series VQ7-8 Manifold Option Parts Individual EXH spacer VV72-R-03/04 Individual SUP spacer VV72-P-03/04 R1/R2 individual EXH spacer VV72-R2-04 Reverse pressure spacer AXT512-19A-1 2 Silencer box AXT512-26A SMC SMC 223.5 211.5 183.5 171.5 120.5 140 PA B PE PE PA B PE PE PE P 80.5 P R1 R2 78 R2 R1 EA EB A EA EB 2-3/8, 1/2 Individual

5 Port Solenoid Valve Series VQZ1000/2000/3000

VQZ2000) VVQZ3000-R-5-02 (for VQZ3000) P.959 P.959 P.959 P.959 Port plug VVQZ1000-CP (for VQZ1000) VVQZ2000-CP (for VQZ2000) VVQZ3000-CP (for VQZ3000) Name plate [-N] (Applicable to VQZ2000/3000) VVQZ2000-N5(for VQZ2000) VVQZ3000-N5(for VQZ3000) DIN rail AXT100-DRBlanking plug KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 Stations Stations + + + P.959 P.960 P.960 P.960 Silencer (for EXH port) Perfect

Pilot Operated

Minimum operating pressure differential 0.99 Upstre am p ress 2 0 2 0 ure 0.9 of v alv Downstream pressure of valve (P2) MPa e P 0.8 1 = 0.9 0. 99 0.7 MP 0.8 Subsonic Critical pressure a 0.6 0.7 0.6 0.5 Sonic 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 VXD2130-02 10 1,000 2,000 3,000 VXD2130-04 03 10 1,000 2,000 3,000 4,000 VXD2142 0-03 15 2,000 4,000 6,000 8,000 VXD2142 0-04 15 2,500 5,000 7,500

VQZ1000/2000/3000

2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

Fluoropolymer Piping Equipment

2 3 4 5 6 LQHB Panel mounting nut LQNP TL TIL TLM TILM P.908 Nut insert bush LQ1-U B N TD TID TH TIH P.909 Blanking plug LQ-P P.909 Tubing plug LQ1-CP P.909 Note) Basic size With reducer 869 LQ3 Series LQ3 Series P.912 Port size Tubing O.D.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

R P R 26.6 22 Approx. 300 (Lead wire length) 48.8[51] L1 2-3.5 (For mounting) L2 3.5 Manual override Manual override (Pitch) P = 10.5 Approx. 300 (Lead wire length) 12.5 5 M5 x 0.8 (P, R port) 2-3.5 (For mounting) 48.8[51] P R 26.6 P R 13 22 (Station n) (Station 1) 11 (Pitch) P = 10.5 12.5 4.5 41.5[48.5] + + + + + (Station 1) (Station n) 26.1 A A 13 10 41.5[48.5] (Pitch) P = 10.5 13.5 M3