42

) 1(P') 3(R2) 5(R1) Circuit diagram Plug-in type Plug lead type Individual EXH spacer 179 (Plug-in type) VVQ5000 R 1 03 133 (Plug lead type) 32 16 Thread type Port size 03 3/8 04 1/2 Manifold Nil Rc F G N NPT T NPTF 1 Plug-in type 5 Plug lead type 3 R 40.3 1(P) 03: 3/8 04: 1/2 4(A) 2(B) 3(R') 3(R2) 5(R1) Circuit diagram Plug-in type Plug lead type 522 Manifold Options VQ5000 Series Restrictor

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Orifice symbol (diameter) Solenoid valve model (Port size) VXE21 0 1 2 3 VX021N-12A 1 (2 mm) 2 (3 mm) 3 (4.5 mm) 4 (6 mm) Model VXE21 VXE22 VXE23 VXE22 0 2 3 4 VXE23 0 2 3 4 01 (1/8) 02 (1/4) 02 (1/4) 03 (3/8) 02 (1/4) 03 (3/8) VX022N-12A Port symbol (Port size) VXE22 0 5 6 VXE23 0 5 6 VX023N-12A-L Table (3) Rated Voltage Electrical Option Rated voltage Voltage L (With light) Voltage symbol

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

1: 100 VAC, 3: 110 VAC, 4: DC P, R port thread type 03 3 stations 3(R) port Nil Rc G NPT 12 00F 12 stations 00N Refer to page 3-3-7 regarding how to order applicable connector assemblies.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

-3 AMD850-20 110 15.0 AT125C-30 AFF125A-30 IDF120D-3 AMD910-30 150 20.0 AT150C-40 AFF125A-30 IDF120D-3 AMD910-30 220 30.0 AT220C-40 AFF220A-40 IDF150D-3 50 Hz area 60 Hz area IDF1D-1 IDF2D-1 IDF3DIDF4DIDF6DIDF8DIDF11CIDF15CIDF22C1-3 IDF22C1-3 IDF37C1-3 IDF55C-3 IDF75C-3 IDF120D-3 IDF120D-3 IDF150D-3 AMD1010-40 AMH150-03 AMH150-03 AMH250-03 AMH250-03 AMH350-04 AMH350-04 AMH450-06

1

3 SY 3 5 C6 1 0 3 1 SY EX600 Top ported VM !

KR

8 1 8 KGE06-01 KGE06-02 KGE06-03 KGE08-01 17 30 Applicable tubing 6 M14 x 1 15 17 13.1 10.4 17 19 29 26.1 18.0 28 27 48 17 1 4 KGE08-02 M16 x 1 18.5 8 17 19 3 8 KGE08-03 19 15 35 1 4 KGE10-02 41.5 29.5 53 67 34.5 36.5 12.5 14 21 21 M20 x 1 10 22 24 3 8 KGE10-03 3 8 KGE12-03 92 59 37 14 12 M22 x 1 27 23 24 58.3 46.1 22 1 2 KGE12-04 41 18 3 8 KGE16-03 14 40 127 25 96 113 (96) 16 M28 x 1.5 32

KG

4 KGE08-02 M16 x 1 18.5 8 17 19 3 8 KGE08-03 19 15 35 1 4 KGE10-02 41.5 29.5 53 67 34.5 36.5 12.5 14 21 21 M20 x 1 10 22 24 3 8 KGE10-03 3 8 KGE12-03 92 59 37 14 12 M22 x 1 27 23 24 58.3 46.1 22 1 2 KGE12-04 41 18 3 8 KGE16-03 14 40 127 25 96 113 (96) 16 M28 x 1.5 32 29 30 1 2 KGE16-04 18 44 132 Note) Dimensions in ( ) are the case of soft nylon tube.

Stainless Steel 316 Fittings

KFG2L0425-01 KFG2L0425-02 KFG2L0403-01 KFG2L0403-02 KFG2L0604-01 KFG2L0604-02 KFG2L0806-01 KFG2L0806-02 KFG2L0806-03 KFG2L1075-02 KFG2L1075-03 KFG2L1075-04 KFG2L1008-02 KFG2L1008-03 KFG2L1008-04 KFG2L1209-02 KFG2L1209-03 KFG2L1209-04 KFG2L1210-02 KFG2L1210-03 KFG2L1210-04 KFG2L1613-03 KFG2L1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

P, R, A, B port thread type Clean series Valve stations Rc G NPT NPTF Nil F N T Symbol Station 3 stations : 8 stations 3 stations : 16 stations Note SI unit A B A B 03 A B NPN output (+ COM.) Nil A B Double wiring Note 1) : A, B port M5 x 0.8 A B 8 6 4 2 0 08 03 CE-compliant PNP output ( COM.)

Modular/F.R.L. Units Series AC

A 10 B 14 D 14 Port size M5 x 0.8 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 3/4 Model Note 1) E100-M5 E200-01 E200-02 E200-03 E300-02 E300-03 E300-04 E400-02 E400-03 E400-04 E400-06 30 23.5 28 B Center of F.R.L. body D A 32 30 30 32 36 36 E500-06 3/4 32 40 44 Piping adapter AC50, AC55, AC60, AC50A AC60A, AC50B, AC55B AC60B, AF50, AF60, AR50 AR60, AL50, AL60, AW60 E600-06 3/4 48 53 35 E600-10 1

Air Fittings & Tubing

Nylon Urethane L2 L1 M KCE04-02 KCE06-02 KCE08-03 KCE10-03 KCE12-03 1 4 1 4 3 8 3 8 3 8 2.6 6.8 16.2 25.6 35.4 17 17 19 22 24 14.7 14.7 15 14.2 13.7 13 15 17 21 23 18 19 21.5 24 25.5 M12 X 1 M14 X 1 M16 X 1 M20 X 1 M22 X 1 2.6 32 36 42 79 105 14 17 19 24 27 40.5 42.7 49.4 53.9 56.1 6.8 13.1 20.4 30.4 Straight union: KCH Effective area (mm2) Weight (g) Tube O.D.

Modular F.R.L. Units

-A IS10M-40-A Y410-(02)-A 03-A 02A VHS40-03A 04A 02-A E400-03-A 04-A 06-A 02-A IS10E-4003-A 04-A 06-A Y44-02-A 03-A Y500-A Y500T-A Y200-A Y200T-A AKM2000-01-A (02)-A IS10M-20-A Y210-01-A (02)-A Check valve Note 2) Note 3) Pressure switch Note 3) IS10M-50-A Y510-(02)-A 03-A T-shaped spacer Note 2) Note 3) VHS20-01A 02A VHS30-02A 03A 3-port valve for residual pressure release Note 3) VHS40

Stainless Steel One-touch Fittings Series KG

3 8 KGE10-03 3 8 KGE12-03 37 14 92 59 12 M22 1 27 24 23 22 58.3 46.1 1 2 KGE12-04 41 18 3 8 KGE16-03 14 40 127 25 96 113 (96) 16 M28 1.5 32 29 30 1 2 KGE16-04 18 44 132 Note) ( ): Values for soft nylon.

Tamper Proof and Flat Head Screw

Type Metric sizes Inch sizes Elbow Universal 2 3 3.2 01 23 1/8 5/32 3/16 1/4 5/16 3/8 1/2 04 06 08 10 12 03 05 07 09 11 13 4 6 8 10 12 Control type Meter-out Meter-in 0 1 Use 1/8 tubing.

4/5 Port Solenoid Valve

SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (B) 2 (A) 4 (B) 2 (A) 4 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

Speed Controller with One-touch Fitting

Model Port size Seal method Metric size Inch size Elbow type Universal type 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 M5 x 0.8 Gasket seal Note 3) AS121F-U10/32AS131F-U10/32 10-32UNF Note 3) AS221F-01 AS231F-01 1/8 Note 3) AS221F-02 AS231F-02 1/4 Note 3) Note 3) R NPT Note 1) Sealant AS321F-02 AS331F-02 1/4 AS321F-03 AS331F-03 3/8 AS421F-04 AS431F

Series KG Stainless Steel One-touch Fittings

3 8 KGE10-03 3 8 KGE12-03 37 14 92 59 12 M22 1 24 27 23 22 58.3 46.1 1 2 KGE12-04 41 18 3 8 KGE16-03 14 40 127 25 96 113 (96) 16 M28 1.5 32 29 30 1 2 KGE16-04 18 44 132 Note) ( ): Values for soft nylon.

KF

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64

A

3/8 30 14 18 RCS-025 8 20 41 1/4-28UNF 25 0~0.002 18 -0.5 ~ -03 3/8 41.6 30 14 12 RCD-03 36 16 22 42 5/16-24UNF 32 0~0.002 18 -0.5 ~ -03 3/8 30 14 12 RCS-03 16 22 42 5/16-24UNF 32 0~0.002 18 -0.5 ~ -03 3/8 41.6 30 14 12 RCD-04 36 16 22 42 3/8-24UNF 40 0~0.002 18 -0.5 ~ -03 3/8 30 14 12 RCS-04 11 22 42 3/8-24UNF 40 0~0.003 22 -0.5 ~ -03 1/2 50.6 40 20 16 RCD-05 44 20 28 56 1/2-20UNF 50, 63