Vacuum Unit Ejector / Vacuum Pump System

This assembly does not include special cable assembly for a pressure switch with energy saving function. (6) Connector assembly ZK2-LV W K A Valve type: J Valve type: K, R Lead wire length Applicable valve type Nil 300 mm Valve type K, R W (With supply valve and release valve) 6 600 mm 10 1000 mm 20 2000 mm S Valve type J (Supply valve only) 30 3000 mm (7) One-touch fitting assembly (Purchasing

Vacuum Unit Ejector / Vacuum Pump System

Note 11) When K, Q, R, S is selected, select K for (3) Combination of Supply Valve and Release Valve, select W or L3 for (6) Wiring Combinations. Note 12) Unit selection function is not available in Japan due to new measurement law.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

7 8 (mm) K J 5 6 E F n L1 L2 Note 2) The above dimensions are for ZQ1 3M2 .

Booster Regulator/Air Tank

The length of G thread type is about 6 mm longer due to plug type differences.

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 3 Direct Operated 2 Port for Air Series VCA Dimensions Grommet: G Conduit: C Approx. 300 Approx. 280 Q F D Q F D G1/2 C R C R L IN E E Manual override A B B A 2-P Port size 2-P Port size Manual override 2 L K 2-M Thread depth 6 2-M Thread depth 6 K DIN connector: D Conduit terminal: T F F (Q) Q S 34

VCA

size (S) PB Port size G1/2 Compatible heavy-duty cord Cable O.D. 6 to 12 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B Model A C D E F K L M Grommet: G Conduit: C DIN terminal: D Conduit terminal: T S 68 71 74 74 U 81 91.5 101 103.5 S 51 54 57 57 Q 98 101 104 104 R 36 44 53 55.5 R 40 48 56 58.5 Q 46 50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5

Pin Cylinders Series CJP2/CJP

Without rod end thread 3 41.5 34.5 27.5 3 32.5 25.5 18.5 9 M10 x 1.0 R B 5 46 39 32.5 4 34 27 20.5 13 M15 x 1.5 Rod end nut Refer to page 35. 6 50 43.5 37.5 5 36 29.5 23.5 20 M22 x 1.5 13 (12) Dimensions: Embedded Type CJPS4 Exhaust port NN MM 0.4 C0.3 Gd9 C Q K W H R (mm) E F A H S Z B B C E G H K F Bore size (mm) 4 6 10 15 MM A 5st 10st 15st 3.5 7.5 6.5 6 11.5 10 6 10 18 26 M2 x 0.4 CJPS6

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NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

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45

Refer to external dimensions in pages 1-6-78 to 1-6-79, and then mount it.

-fl Seies

NVFR221O-3G NW5FR2-10-06M-027 Mix: sta. 1) 1/4 side sta. 2-6) 1/8 bottom See Note 2) Four Station Manilold Ass'y as follows: sta. 1) NVF?

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

NVFR221O-3G NW5FR2-10-06M-027 Mix: sta. 1) 1/4 side sta. 2-6) 1/8 bottom See Note 2) Four Station Manilold Ass'y as follows: sta. 1) NVF?

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(D, Y) Manual override (Non-locking) Double Single VK 197.5 (3 position: 226.5) Y: 217.5 (3 position: 246.5) D: 218.5 (3 position: 247.5) 218.5 (3 position: 247.5) Y: 108.5 (3 position: 123) D: 109.5 (3 position: 124) (3 position: 124) (3 position: 113.5) VZ (Pitch) (Mounting hole) VF 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) (With individual EXH

2

28.5 14 6 AR25(K)-B 30 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 AR30(K)-B 41 40 45.8 6.5 8 53 2.3 31.1 38.5 19 7 AR40(K)-B 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 AR40(K)-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50(K)-B 70 66 65.8 11 13 90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2 Note 1) The dimension of B is the length when the filter regulator knob is unlocked.

Table of Contents

Note 2) Drain guide is G 1/4 (applicable to AW30 to 40). 1 (4) AW20(K) to 40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K)/40(K) AW20(K) AW30(K)/40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K)/40(K) PPA 2 6 8 C J (5) AL N R W Port size Z (6) AW20(K) to 40(K) Body size Symbol Port size When more than one specification is required, indicate in ascending alphanumeric order.

High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 A XLS Series Dimensions XLS/Without control power supply D Lead wire AWG20, O.D.: 2.63 mm E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT

Rotary Actuator/Vane Style Series CRB1

Applicable shaft type: K (mm) CRB2 L3 max X W1 L1 max (mm) Shaft type CRBU2 Y W2 L2 max L4 max Size J K T J K T J K T J K T W1 = L3 = L1 = Size 50 50 11.5 to 39.5 1 to 6 1 to 6 Y-3 L2-2 11.5 to 39.5 L1-2 X-3 L4 = CRB1 L2 = Y = 63 63 12.5 to 45 1 to 7.5 1 to 7.5 Y-3 L2-2 12.5 to 45 L1-2 X-3 80 80 13.5 to 53.5 1 to 8.5 1 to 8.5 Y-3 L2-2 13.5 to 53.5 L1-2 X-3 X = MSU 100 100 18.5 to 65 1 to

Metal Seal/Rubber Seal Series VQ Body Ported

SI unit output no. 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no.

Modular Type Regulators Series AR

AR25(K) AR30(K) AR40(K) AR40(K)-06 AR50(K) AR60(K) 4.5 6.5 30 25 28 40 2 18 18.5 44 5.4 15.4 34 30 55 2.3 25 28.5 14 6 AG 15.4 34 44 5.4 30 55 2.3 26 32.5 16 6 8 6.5 41 40 46 53 2.3 31 38.5 19 7 AV 10.5 54 8.5 50 54 70 2.3 35.5 42.5 21 7 8.5 10.5 54 56 50 70 2.3 37 42.5 21 7 AF800 AF900 13 65.8 11 70 66 90 3.2 13 66 65.8 11 70 90 3.2 Note 1) The total length of B dimension is the length