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M8 connector Cable length For connector cable of M8 connector, refer to page 1-5-78. 1 2 3 4 7 300 mm 500 mm 1000 mm 2000 mm 5000 mm 1-5-7 Series SYJ3000 2 Position Single [ ]: AC G H G H Grommet (G), (H): SYJ3120-M3 With bracket: SYJ3120-M3-F G: Approx. 300 H: Approx. 600 (Lead wire length) 54.4 [56.6] 28.4 32.2 22 2-3.5 (For mounting) 3.2 7.1 13.2 16.4 10 + 8.2 A B 4 19.3 7 11.5 Manual

20 stations (1) VO317-(-Q) (3) Port location (Direction)/Port size A Exhaust port Symbol Type R P Base (Side) Base (Side) Base (Side) ( ) 1 4 3 8 1 Common (2) ( ) 1 4 3 8 1 4 Base (Side) Base (Side) Base (Side) 3 Individual 1 4 1 4 1 4 Note 1) For more than 3 stations, supply air both sides of P port.

M8 connector Cable length For connector cable of M8 connector, refer to page 90. 1 2 3 4 7 300 mm 500 mm 1000 mm 2000 mm 5000 mm 4 Series SYJ3000 2 Position Single [ ]: AC G H G H Grommet (G), (H): SYJ3120-M3 With bracket: SYJ3120-M3-F G: Approx. 300 H: Approx. 600 (Lead wire length) 54.4 [56.6] 28.4 32.2 22 2-3.5 (For mounting) 3.2 7.1 13.2 16.4 10 + 8.2 A B 4 19.3 7 11.5 Manual override

ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.

Description IR1000 IR3000 IR3020/3120 IR2020/2120 IR3010 IR1020 IR2000 IR2010 IR1010 Bracket Pressure gauge P36203018 P36202028 P36201023 G43-2-01 G43-4-01 G43-10-01 G43-4-01 G43-10-01 G33-4-01 G33-10-01 G43-2-01 G33-2-01 Accuracy 3% (Full span) 14-5-7 7 Series IR1000/2000/3000 Construction IR1000 IR2000 IR3000 q i o !4 q o i !

2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note Note No. q Description Material No. Description Material Body Bushing B !0 o Hard anodized Aluminum alloy Sintered alloy steel End plate Stainless steel 10: Stainless steel 16 to 25: Aluminum alloy Piston w 16 to 25: Chromated Bumper !

For connector cable of M8 connector, refer to page 90. 49 Series SYJ7000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) y e q t r q t r w w (B) 2 (A) 4 (A) 4 (B) 2 i i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 t q r w 5 (R1) 3 (R2)

For connector cable of M8 connector, refer to page 90. 25 Series SYJ5000 Construction 2 position single 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) e w q t r q y t rw (A) 4 (B) 2 (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) i u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t rw 5 (R1) 3 (R2) 1

Common vacuum burst pressure (PD) port Note 2) 01 Rc1/8 01N NPT1/8 01F G1/8 M5 M50.8 NIL Without PD port (PV = PD) M5 M50.8 PVPD Note 2)Refer to model indication for single unit (4) for the combinations of supply valve and release valve selectable. 14 - Doc. no.

) 0.6mm ( for PVQ13) 0.8mm ( for PVQ13) 1.6mm ( for PVQ31, 33) 2.3mm ( for PVQ31, 33) 4.0mm ( for PVQ31, 33) M G Flow rate characteristics PVQ13-5-04 (24VDC type) at 0.45MPa PVQ3-5G-23 (24VDC type) at 0.35MPa 140 8 7 120 6 100 Flow rate (Lit/min) Flow rate (Lit/min) 5 80 4 60 3 40 2 20 1 0 0 30 40 50 60 70 80 75 85 95 105 115 125 135 145 155 165 65 Current (mA) Current (mA) Dimensions

-20Station 1(Mounting hole) Grommet (G), (H) VK VZ VF Manual override (Non-locking) G: 300 mm H: 600 mm (Lead wire length) (3 port valve) VFR (A port) VP4 VZS VFS (Pitch) (Mounting hole) VS4 4-Rc 1/8 (P , R port) (A, B port) VQ7 EVS VFN 4-M3 x 0.5 depth 4.5 (Bracket mounting screw) (mm) Stations 2 3 53 40 69 56 4 85 72 5 101 88 6 117 104 7 133 120 8 149 136 9 165 152 10 181 168 11 197 184

8 e q y !3 w !1 !6 !7 !2 t !9 !5 !4 u Component Parts No. Description No.

(Refer to Copy function on page 8.) 3 Series ZSE10(F)/ISE10 Dimensions ZSE10(F)/ISE10 M5 6.4 (7.7) (30) 2 x 3.3 M5 x 0.8 (12) 1.2 25 13 3.5 9.8 51.8 4.2 ZSE10(F)/ISE10 M5R 1.2 6.4 25 51.8 4.2 9.8 4.5 M5 x 0.8 4 Digital Pressure Switch Series ZSE10(F)/ISE10 ZSE10(F)/ISE10 01 6.4 2 x 3.3 1.2 Width across flats 10 Width across flats 12 11 13 13 25 3.5 8 R1/8 9.8 12.5 51.8 4.2 ZSE10(F)/ISE10

Rc Nil G F VP4 20 20 stations 4(A), 2(B) port N NPTF T NPT Rc 1/4 3/5(R) port Note) For more than 8 stations, supply air to both sides of P port and exhaust air from both sides of R port.

H Section AA TH (Head height of mounting bolt) +0.03 0 RL 10 10 T TB +0.03 0 R RH Detail of part U Q QL (n x 1) x Q B -Mounting reference planes D PR PR max18 B B PH PH Type of centralized piping on one side without switch rail Type of shock absorber (Only for MXY12) FH FW MA L LA M HR J JH F FL H HA MM MB Model M5 x 0.8 (Width across flats 2.5) MXY6 24 8.5 32 28 M3 x 0.5 18 0.5 60 20 3 12

0 Setting knob ARM q Diaphragm (A) q w !1 q !1 ARP Steel ball w !1 Bleed !2 Nozzle IR-A @2 w !2 Bleed Diaphragm (B) r !3 @4 Bleed Exhaust u IR IR !7 @3 !2 !5 !4 Diaphragm (C) e OUT (2) SUP (1) OUT (2) OUT (2) SUP (1) IRV SUP (1) @3 !8 Exhaust valve !6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !

-20Station 1(Mounting hole) Grommet (G), (H) VK VZ VF Manual override (Non-locking) G: 300 mm H: 600 mm (Lead wire length) (3 port valve) VFR (A port) VP4 VZS VFS (Pitch) (Mounting hole) VS4 4-Rc 1/8 (P , R port) (A, B port) VQ7 EVS VFN 4-M3 x 0.5 depth 4.5 (Bracket mounting screw) (mm) Stations 2 3 53 40 69 56 4 85 72 5 101 88 6 117 104 7 133 120 8 149 136 9 165 152 10 181 168 11 197 184

In this way fine pressure variations are detected by the nozzle/flapper type pilot mechanism, and precise pressure adjustment is performed. q o !4 o SRP !5 !5 i SUP side passage OUT side passage SRF SUP side passage OUT side passage ARX20 VCHR IN q IN q w Bleed ITV !1 !3 !2 Bleed e w y IC PVQ OUT(2) SUP(1) OUT(2) SUP(1) u !0 !2 !