Manifold Specifications

Prefix it to the part nos. of the solenoid valve, etc. 3-3-74 5 Port Solenoid Valve Base Mounted Series VZ5000 Common SUP/Common EXH How to Order Type 40 VV5Z5 05 40 2 01 1(P) port Rc 1/4 4(A), 2(B) Port size Stations P, R port thread type 02 2 stations 01 Rc1 8 Rc Nil 3/5(R) port G F 20 20 stations Rc 1/4 N NPTF T NPT 4(A), 2(B) port Note) For more than 10 stations, supply air to both

Precision Regulator Series IR1000/2000/3000

Application 0 1 2 size Symbol IR1000 IR2000 IR3000 Made to Order Specifications (Refer to page 560) 01 02 03 04 1/8 1/4 3/8 1/2 Note) Air operated type is model IR3120 only.

ZQ-OM01301

class is 2:6:3 of ISO08573-1:2010JISB83921:2012 .

ZQ-OM01401

) (3) (4) 1 (1) 2) 01 1 S () 02 2 P () : 08 8 (3) (PD) 1) 1 B (: P ) 3 (: PD ) C 2) 1) 3)12S 0.5 8 0.7 6 (4) 1.0 4 2) 8 4 A 4) Assy 6 - No.ZQ-OM01401-B ZQ000 U A-K15L B-EA M G-3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (1) U (6) M 6) (2) M SI (kPa) 6) (:psi) P K1 N.C.

3M/SMseries

/NVF323O-OD,NVF3330-OD,NVF343O-OD NVF3530-OD ( ) :3 position ( ):3 pcition X:with indicator light and surge voltage supfressor f]:with indicator light and surge voltage suppressor @ Series NVF3OO inch (mm) ( vF3r22-OG-02-F) Series Manifold B Mount Type/Dimensions inch(mm) Cornmoi ExhausVNWsF3-30-O01 (c) (D) < ):3 pqsilion f]:with indicator light and surge voltage suppressor 4 7 a 10 l l 12

90

No. 3 4 5 6 7 8 9 Note) When ordering a manifold ZZK2---A on page 3, q to e are delivered as a set.

VZ1000

Refer to page 3-3-14.

Compact Vacuum Unit

Note 3) Only the push-locking type (no symbol) is available for the latching type. Note 4) Refer to for the accessories. Mounting screw (M1.7 x 0.59 inch (15 mm)) 2 pcs. Table 3 Mounting screw (M1.7 x 0.87 inch (22 mm)) 2 pcs. Mounting screw (M1.7 x 0.59 inch (15 mm)) 2 pcs. !3 Pressure sensor assembly Mounting screw (M1.7 x 0.87 inch (22 mm)) 2 pcs.

IR1000/2000/3000

2 Series IR3000 Connection Rc(PT) 1/8 01 Connection Rc(PT) 1/4 02 Connection Rc(PT) 3/8 03 Connection Rc(PT) 1/2 04 Bracket B Accessories Pressure gauge G Pressure gauge reverse mounted R Connection NPT1/8 N01 Series IR2000 Connection NPT1/4 N02 Connection NPT3/8 N03 Connection NPT1/2 N04 Connection G(PF) 1/8 F01 Connection G(PF) 1/4 F02 Connection G(PF) 3/8 F03 Connection G

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

Manifold Specifications

Refer to page 3-3-14.

lVFl 10

Wl00-3-2 (s-sta.) Mounting screws: MT624-26 fincluded with manitold bar) Blank station kit: WFl00-02 Hol'VTO ORDER NVV3F1-30OO1 -01T-F ---T---_ T _ T I loptions | -None To order assembled manifold and valves: Ex.

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Wl00-3-2 (s-sta.) Mounting screws: MT624-26 fincluded with manitold bar) Blank station kit: WFl00-02 Hol'VTO ORDER NVV3F1-30OO1 -01T-F ---T---_ T _ T I loptions | -None To order assembled manifold and valves: Ex.

CG1-OM0227

P.1320 16 / 17 3. 3-1. 1 2 3 4 5 6 7 8 9 10 3-2. 2040 50100 18 3-2-1. 02 50 3-2-2. 1 6 2 7 6. 7. 3 19 3-2-3. GR-S-010(10g )GR-S-020(20g ) (XC85,X446)P25 1 2 3 4 8 1 100 83(g) L100mm 1 2 1mm 8. 8. g 20 25 32 40 100st 2 3 3 34 50st 0.5 0.5 0.5 1 20 3-2-4. 1) 8, 9 2 ( 8,) 10 3( 8,) 1mm 9. 10. 3-3.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

(EB) 1 (P) 5(EA) 3(EB) 1(P) JIS symbol 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 5(EA) 3(EB) 1(P) JIS symbol 3 position closed center 3 position closed center/exhaust center/pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 3 position exhaust center (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 3 position pressure center (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 5(

Air Slide Table Series MXP

3 and !4 each MXP6-PS GR-L-005 (5g) GR-L-010 (10g) Cylinder unit GR-L-020 (20g) GR-L-050 (50g) MXPJ6 No. Description Material Note Component Parts u q w i o y !3 !2 !

IDX-OM-W016

/ Installation 2 1 Transportation . 2 1 2 2 Installation . 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 2 2 2 4 Drain Tube . 2 3 2 2 5 Electric Wiring . 2 4 2 3 Cautions for Reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

;;l:=i.:., i:illl:i'l:l ,,:.a ;l';:':'':'" .r*,*i9.X,i t1*ff ,i=gr.g . ii : * f i'.f i,,.:,a.:.aa.':.: -: "' ,t*11*t3.s.&1*fi::{{'i: r:l:i, i:ar&i1 f i!.-r ..,;.;:li.i..i.i;t,l.il i.ii=i i i=i li,i !;;r,i:i l,t,t.t,::,:,,.4 a',::r:t:,. . *,,t;,,-:,i,:li=:3;d*:a*,,r.i,i t.i-i+,,i=r.t.r,,..r,r:,:t:*,:t:t i.3.li!i.i*i*!!i.

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'i,-.1-)^' l z N F Noz l!

Parallel Style Air Gripper: Wide Type Series MHL2

3!6@6 <16 to 25>eo!0 !4!6@6#0 <32, 40>ei!4!